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The brochures below were created by John Pham (johnpham@gatech.edu). For questions regarding the content of these brochures, please contact Gary Spinner (gary.spinner@mirc.gatech.edu).
| Topic | Outside Cover | Inside Cover |
|---|---|---|
| Etch Processing (download pdf) |
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| Chemical Vapor Deposition (download pdf) |
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| Lithography (download pdf) |
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| Metallization (download pdf) |
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| Metrology (download pdf) |
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| Nano Lithography (download pdf) |
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