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The chemicals listed in the tables below are provided by the MiRC cleanroom.
| Developers | |
|---|---|
| 1112A Remover | MicroChem Corp. |
| 1165 Remover | Microchem Corp. |
| MF-319 Developer | Microchem Corp. |
| 351 Developer | Microchem Corp. |
| 354 Developer | Microchem Corp. |
| Resist Developer RD6 | Futurrex, Inc. |
| Acids | |
|---|---|
| Acetic Acid | Brenntag |
| Hydrochloric Acid | Brenntag |
| Hydrofluoric Acid | Brenntag |
| Nitric Acid | Brenntag |
| Sulfuric Acid | Brenntag |
| Phosphoric Acid | Brenntag |
| Etchants | |
|---|---|
| Aluminum Etchant | Brenntag |
| Buffered oxide Etch | Brenntag |
| Chromium Etchant | Cyantek |
| Photoresists | |
|---|---|
| NR7-1500P Photoresist | Futurrex, Inc. |
| SPR 220 Photoresist | Microchem |
| SC 1813 Photoresist | Microchem |
| SC 1827 Photoresist | Microchem |
| Solvents and Bases | |
|---|---|
| Acetone | Brenntag |
| Ammonium Hydroxide | Brenntag |
| Isopropanol | Brenntag |
| Methanol | Brenntag |
| Trichloroethylene | Brenntag |
| Hydrogen Peroxide | Brenntag |
| Others | |
|---|---|
| Chlorobenzene | Fisher |
| HMDS | Micro Si |
| Photomask Fixer | Cyantek |