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| Cleanroom | ||
| Internal / Academic | ||
|---|---|---|
| Facility Entry Fee, per billing quarter | $500 | per entry per billing quarter |
| Cleanroom Supply Use Charge, per hour | $15 | per hour |
| Tech Consultation, per hour | $52 | per hour |
| Industrial Users: | ||
| Facility Entry Fee, per billing quarter | $1,411 | per entry per billing quarter |
| Cleanrooom Supply Use Charge, per hour | $15 | per hour |
| Tech Consultation, per hour | $52 | per hour |
| Mask Shop | ||
| Internal / Academic | ||
|---|---|---|
| Contact Print | $57 | per hour (per each defined as per hour) |
| Pattern Generation | $97 | per hour (per each defined as per hour) for files up to 1 MB; $97 for each additional megabyte of data |
| Photorepeater | $181 | per hour (per each defined as per hour) |
| Industrial | ||
| Contact Print | $207 | per hour (per each defined as per hour) |
| Pattern Generation | $191 | per hour (per each defined as per hour) for files up to 1 MB; $97 for each additional megabyte of data |
| Photorepeater | $354 | per hour (per each defined as per hour) |
| Electron Beam Laboratory | ||
| Educational Institutions | ||
|---|---|---|
| Operator Time | $52 | per hour |
| EBL Machine Time | $130 | per hour |
| Industrial | ||
| Operator Time | $52 | per hour |
| EBL Machine Time | $975 | per hour |
| Materials Characterization Facility | ||
| Internal / Academic | ||
|---|---|---|
| Operator Time - ESCA, SIMS | $46 | per hour |
| Instrument Time - ESCA, SIMS | $29 | per hour |
| Industrial | ||
| Operator Time - ESCA | $54 | per hour |
| Operator Time - SIMS | $73 | per hour |
| Instrument Time - ESCA | $142 | per hour |
| Instrument Time - SIMS | $59 | per hour |