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| Equipment Status History | ||
| Name | Vendor | Equipment Log |
|---|---|---|
| 3600F PG | H&L Associates (support for GCA/Mann equipment) | |
| AET RTP | AET Thermal, Inc. | Equipment Log |
| Astex ECR | Astex | Equipment Log |
| Blue M: A Unit of General Signal Ovens -- class 10 | Blue M Electric | Equipment Log |
| Blue M: A Unit of General Signal Ovens -- class 1000 | Blue M Electric | Equipment Log |
| Brewer Scieces CMOS Hot Plate | Brewer Science, Inc. | Equipment Log |
| CEE 100CB Spinner | Brewer Science, Inc. | Equipment Log |
| Coyote PECVD | Pacific Western Systems | Equipment Log |
| CVC DC Sputterer | CVC Products, Inc. | Equipment Log |
| CVC DC Sputterer 2 | CVC Products, Inc. | Equipment Log |
| CVC E-Beam Evaporator | CVC Products, Inc. | Equipment Log |
| CVC E-Beam Filament | CVC Products, Inc. | Equipment Log |
| Dektak 3030 Profilometer | Veeco Instruments Inc. | |
| Dexon Fume Hood--Class 10 | Dexon/La Calhene Inc. | Equipment Log |
| Dexon Fume Hood--Class 1000 | Dexon/La Calhene Inc. | Equipment Log |
| Dexon Fume Hood--Dry Process | Dexon/La Calhene Inc. | Equipment Log |
| Dexon Fume Hood--Metalization | Dexon/La Calhene Inc. | |
| Dexon Fume Hood--Plasma Processing | Dexon/La Calhene Inc. | |
| EBL CEE Spinner | Brewer Science, Inc. | |
| Ernest Fullam SputterCoater | Ernest F. Fullam, Inc. | Equipment Log |
| EV620 Mask Aligner | EV Group Inc. | Equipment Log |
| EVS Mask Aligner | EV Group Inc. | Equipment Log |
| Fume Hood--Focus Center | Cleanzones, LLC | |
| Gasonics Asher | Gasonics International Corporation/Novellus Systems, Inc. | Equipment Log |
| Heraeus Vacuum Oven 1 | Heraeus Instruments/Kendro Laboratory Products | Equipment Log |
| Heraeus Vacuum Oven 2 | Heraeus Instruments/Kendro Laboratory Products | |
| Hitachi 3500H SEM | Hitachi | Equipment Log |
| Hysitron TriboIndenter | Hysitron Inc. | |
| Jeol 6400 SEM | Jeol USA, Inc. | |
| Karl Suss Bonder | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss MA-6 Mask Aligner | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss MJB-3 Mask Aligner -- Left | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss MJB-3 Mask Aligner -- Right | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss Probe Station | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss RC8 Spin Coater | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Karl Suss TSA MA6 Mask Aligner | Karl Suss (Suss MicroTec Inc.) | Equipment Log |
| Laurell Developer | Laurell Technologies Corporation | |
| Laurell Technologies Corp. Spin Coater | Laurell Technologies Corporation | |
| Leitz Ergolux Microscope | Equipment Log | |
| Lindberg Furnace | Lindberg | Equipment Log |
| Nanospec Refractometer | Nanometrics | Equipment Log |
| Noran EDS System | Thermo Noran | Equipment Log |
| OAI: Optical Associates, Inc. Mask Aligner | Optical Associates, Inc. | Equipment Log |
| Obducat Nanoimprint Lithography System | Obducat | |
| Olympus / C Squared Vanox Microscope | Olympus Optical | Equipment Log |
| Olympus Inspection Microscope | Olympus Optical | |
| Plas-Mos Ellipsometer | PlasMos/Jobin Yvon Inc. | Equipment Log |
| Plasma-Therm ICP | Plasma Therm, Inc. | Equipment Log |
| Plasma-Therm PECVD | Plasma Therm, Inc. | Equipment Log |
| Plasma-Therm RIE | Plasma Therm, Inc. | Equipment Log |
| Plasma-Therm SLR RIE | Plasma Therm, Inc. | Equipment Log |
| Plating Station | ||
| Screen Printer | Affiliated Manufacturers, Inc. | |
| SemiTest SCA-2500 Surface Charge Analyzer | Semitest, Inc. | Equipment Log |
| Semitool Spin Rinse Dryer | Semitool | Equipment Log |
| Solitec Developer | Solitec Wafer Processing, Inc. | Equipment Log |
| Solitec Spin Coater (Right) | Solitec Wafer Processing, Inc. | Equipment Log |
| STS ICP | Surface Technology Systems (STS) | Equipment Log |
| STS PECVD | Surface Technology Systems (STS) | Equipment Log |
| STS Pegasus | Surface Technology Systems (STS) | |
| Tencor Alpha-Step Profilometer | KLA-Tencor Corporation | Equipment Log |
| Tencor KLA Profilometer - FC | KLA-Tencor Corporation | Equipment Log |
| Trion ICP | Trion Technology | Equipment Log |
| Tystar Poly Furnace 1 | Tystar Corporation | Equipment Log |
| Unaxis PECVD | Unaxis USA Inc. | Equipment Log |
| Veeco AFM | Veeco Instruments Inc. | Equipment Log |
| Veeco AFM Advanced Training | Veeco Instruments Inc. | |
| Veeco Instruments, Ltd. Four Point Probe | Veeco Instruments Inc. | Equipment Log |
| Verteq Spin Rinse Dryer | Verteq, Inc. | Equipment Log |
| Vision RIE - Oxide | Advanced Vacuum AB | Equipment Log |
| VWR Oven | Sheldon Manufacturing, Inc. (Shel Lab) | |
| Wafer Stepper | H&L Associates (support for GCA/Mann equipment) | |
| Woollam Ellipsometer | J.A. Woollam Co. | Equipment Log |
| Wyko Profilometer | Veeco Instruments Inc. | Equipment Log |
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