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Equipment log for the Gasonics Asher
| 2009-8-7 | Because the tool was turning on spontaneously with no one logged in [e.g. the chamber was found to be glowing brightly with no one having logged in withing 24 hours], the system was logged down. The source of the problem will be isolated on Monday. |
| 2009-3-27 | This tool is now working. The O2 setpoint was adjusted upwards so the tool would not give a low flow error and stop operation. |
| 2009-10-26 | The magnetron will be replaced tomorrow. |
| 2009-10-14 | Tool is down because of misalignment of loading arm with loading stage, e.g. the arm that loads the wafers from the incoming cassette is not properly aligning them when placing them on the stage susceptor for placement into the tool. |
| 2007-8-22 | The oxygen ran out on the asher today, but it has been replaced. It now
works fine. |
| 2007-3-9 | A user reported a problem with the loading
stage. One of the backets was loose and
caused a jam in the stage. The bracket
has been reset and secured.
The staff discovered an error during the
unload step. Someone had removed their
wafer and did not report the problem. |
| 2007-2-22 | Several test runs have been made and photoresist was removed successfully
on all test runs. If you encounter problems, report them immediately using
the pettit request. |
| 2007-2-21 | The problem with the Asher has been fixed
and it is working perfectly now. |
| 2007-1-29 | The recipes have been re-programmed and
the Asher is now back in service. |
| 2007-1-26 | The plasma detection system has been
reset to the correct specifications. Please do
not reset the system as this erases the
memory and causes a system failure. |
| 2006-5-3 | A few adjustments have been made to the
system due to a plamsa error. If the
plamsa error continues, we will need to
replace the magnatron to the system. |
| 2006-5-19 | Several users reported a problem with the
plasma in the Asher. The system was
logged down today due to this problem. It
appears that the power supply needs to be
changed out. The system is working now,
but we advise all users not to run recipes
longer than 1 min over the weekend. If the
problem continues next week, we will need
to swap out the magnetron. |
| 2006-4-5 | A user reported a problem with the Asher.
The recipes were running at incorrect
process times. We discovered that all of
the recipes had been wiped from the
system. This only occurs when there is a
cleanroom wide power outage or if
someone turns the machine off and then
turns it back off. No users should be
turning equipment off and on. |
| 2006-4-19 | This is a friendly reminder to all users. No
2 min recipes are allowed on the system.
Also no users may shut the system down.
If you have a problem please report it
immediately. |
| 2006-4-12 | The problem with the lamp 3 failure has
been resolved. The system is currently
down due to a plasma error. We will be
running test runs tomorrow morning. |
| 2006-4-11 | A user reported that gas channel 1 was out
of compliance. The O2 bottle needed to be
replaced. It was replaced late this morning. |
| 2006-3-15 | Houri Johari has been assigned as the new
trainer for the Gasonics Asher. She will
now be in charge of the training for this
system. Charlie Suh will still be in charge
of performing the check-offs on the
system. |
| 2006-3-1 | A user reported a problem with the Asher
attacking the surface of their gold covered
substrate. There is a possibility that the
plasma is deforming the soft metal. If any
other users are experiencing the same
problem, please let us know.
A few users have inquired about a small
sample holder for the Asher. If need a
sample holder that will hold samples
smaller than a 4" wafer, please email
Charlie at cs176@mail.gatech.edu. Please
give a brief description of what sized and
type of sample you are using, and why you
do not want to use cool grease. |
| 2006-11-3 | The machine is completely functional once again. |
| 2006-10-3 | We are installing a vacuum switch in case a wafer gets improperly seated
on the load arm. Please contact Charlie for more information on how to
use the vacuum switch. |
| 2005-9-20 | The mass flow controllers have been
calibrated for this system. The warm up
step was put back into operation for the
system. We are still conducting test runs on
the system to find the cause of the lamp 3
error, but it is still available for use. |
| 2005-9-2 | The system has been logged down due to
some software issues. We will be
performing some maintenance on the
system tomorrow morning. |
| 2005-9-2 | Several users have reported a problem with
gas channel one. The settings for channel
one needed to be adjusted. A temporary
fix has been put in. We will run a complete
mass flow controller calibration on Tuesday. |
| 2005-9-19 | The warm up step has been removed from
the Asher. We found that this step was
causing the lamp error. We will be running
test runs on the system tomorrow. The
Asher is still available for use. |
| 2005-9-16 | A user reported a problem with a lamp 3
error. This seems to be a reoccuring
problem. We are in the process of
permanently resolving this issue. For now,
a temporary fix has been put in place. |
| 2005-8-8 | A user reported a problem with recipes in
the system. The recipes were reset to their
default settings due a problem with the
main circuit board. We have put in the
correct parameters for recipes A and B. |
| 2005-8-5 | We found a short in one of the control
boards. This was causing the lamp 3 failure
users have been experiencing this week.
The system has been logged back up. If
there are any more problems with this
system, please contact Charlie. |
| 2005-8-3 | A cleanroom user reported a problem with
the Asher today. A loose sensory wire is
the culpret to this intermitten problem. The
system is however still available for
cleanroom processing. |
| 2005-8-29 | This is a reminder that all wafers must be
run using the 1 min recipe only. Recipe
combination AB is not allowed. |
| 2005-8-25 | All users are reminded that the maximum
recipe time allowed is 2 mins. All users
before the month of March were required to
send in an email acknowledging the new
policy. All new users are required to know
this policy in order to gain access to the
equipment. |
| 2005-8-18 | The settings for the Asher have been
restored. Please report any processing
problems on this system to Charlie at
cs176@mail.gatech.edu |
| 2005-8-17 | A user reported that the warmup step in the
Asher. The software problem we had over
the weekend with the system caused the
settings to go back to default. We will reset
all of the settings tomorrow. For now users
may use the system without the warm up
step.
|
| 2005-6-16 | A user reported a problem with the Asher early this afternoon. We
discovered that a wafer was shattered inside the chamber. We are
currently investigating the cause shattered wafer. Please remember to
report problems with the system right away. We ran a test wafer in the
system, and the system worked fine. It has been logged back up.
|
| 2005-5-25 | A user reported that the system was not working properly. One of the
relays has been replaced. We ran test runs on the system to make sure
it works. |
| 2005-4-29 | A cleanroom user reported that the asher was not functioning properly
when they attempted to clean their wafers. Upon further inspection
cleanroom staff found that the system was not in the normal operating
mode. The system was put back in the correct operating mode, and is once
again ready for cleanroom use. |
| 2005-4-28 | A user reported that the stage was not properly moving. We found that
one of the motor's fuse had blown. The fuse was replaced and the system
once again has a movable stage. |
| 2005-4-1 | Earlier today, we discovered that the entire system had crashed. We have
re-programmed all of the recipes and system parameters, and the system is
operational. However, we are still investigating the cause of the crash.
The Asher will be available for use later this afternoon. |
| 2005-3-9 | The small sample holder is still missing for the GaSonics Asher. If you
know there whereabouts of this holder please contact MiRC staff or just
return it to the asher so that other users can utilize it. |
| 2005-3-8 | The small sample holder for the asher is still missing. If you have used
the sample holder before, please check your toteboxes to see if you have
accidentily taken it. |
| 2005-3-3 | Asher users: you only have until 12am tonight to reply to Charlie Suh's
email. Failure to respond will result in suspension from the GaSonics
Asher. |
| 2005-3-29 | Etch rate testing will be occuring this Thursday on the GaSonics Asher
system. |
| 2005-3-2 | An email was sent yesterday by Charlie Suh with instruction regarding the
GaSonics Asher. If you do not respond to Charlie's email by tomorrow
night your equipment access will be removed. |
| 2005-3-14 | Several cleanroom users have reported a problem with a lamp 3 failure
error. It turns out that whenver you operate the system without the
sample loading cover in place you will receive this error. Please be sure
to be properly using this sample cover to prevent this error from occuring. |
| 2005-3-10 | The small sample holder has been found, its seems someone placed it on
the hallway cart. The small sample holder should reside on top of the
asher in the box labeled "small asher sample holder." |
| 2005-3-1 | Earlier today an email was sent out by Charlie Suh in regards to the
proper use and procedure for the GaSonics Asher. If you do not follow
these standards then your equipment eligibilty will be under review. |
| 2005-2-4 | All users are reminded that the maximum process time for each wafer is 1
min. Any user who runs the system for more than 1 min per wafer will be
suspended from the system. They will be required to retake the training
class and get rechecked off. |
| 2005-2-25 | The small sample holder has been repaired since it got broken yesterday. |
| 2005-2-24 | A user reported that the small sample holder for this system was
damaged. It will be repaired tomorrow. Please contact Charlie at
cs176@mail.gatech.edu if you need different sized sample holders. Right
now the system supports 4" wafers and samples that are smaller than 1"x2"
samples which can fit into the small sample holder. |
| 2005-2-17 | Today, a cleanroom user reported a problem with the loading arm of the
Gasonics Asher. It turns out that one of the senors became
disconnected. After reattaching the senor the system was once again
fully functional. |
| 2005-2-14 | There are currently two recipes on this system. Recipe A is a one min
recipe with the heater activated. Recipe 1 is a one min recipe with no
heater. |
| 2005-12-6 | A user reported a low flow 1 error on the
system. The oxygen gas bottled needed to
be replaced. |
| 2005-12-1 | A user reported a problem his samples
using the Gasonics Asher. There was an
isolated incident where the cool grease did
not keep the samples on the wafer. If any
other users are experiencing problems,
please submit a Pettit Request. |
| 2005-10-27 | This is a reminder to all Asher Users. The
small sample holder is no longer needed.
Users may mount a small sample to a 4"
wafer using cool grease. Please contact
staff if you need cool grease. |
| 2005-1-7 | Today the magnatron arrived and was installed on the gasonics asher.
However the door limit switch issue will be dealt with first thing Monday
morning. |
| 2005-1-6 | We expect the magnetron to arrive either tomorrow or Monday. As soon as
the new magnetron arrives, we will install it and run test runs on the
system to optimize the ash rate. |
| 2005-1-4 | The magnatron has been ordered and will be in Friday. |
| 2005-1-28 | Reminder: Currently, there is only one recipe available on the system
(Recipe A, 1 minute). The other three standard recipes (Recipes 1, 2, and
B) will be added on Monday. At this time, no other processing recipes are
allowed on this machine. |
| 2005-1-26 | Yesterday, a cleanroom user reported a problem with the oxygen flow for
the gasonics asher. A minor offset was detected in the system's MFC.
Slight tweaking corrected the problem. Test runs were made to verify
that the system is once again working. All gasonics users who have not
responded to the email that was sent out Monday need to reply immediately
to Charlie Suh. |
| 2005-1-25 | A cleanroom user reported a problem with gas number one being out of
compliance. After investigation MiRC staff found a problem with the
oxygen mass flow controller. We will be looking further into this problem
tomorrow, but until then the system is once again logged down. |
| 2005-1-24 | The gasonics asher is up and running once more. If you experience any
problems please contact MiRC staff. |
| 2005-1-21 | All of the repairs have been completed. However, we still need to perform
some calibration and test runs. The Asher will be back up by Monday at
1:00 PM. |
| 2005-1-14 | We are still in the process of troubleshooting the electrical problems
with the Gasonics Asher. Progress has been made but some sensor issues
still need resolving. |
| 2005-1-13 | We discovered a problem with the control board for the system. The
replacement parts will arrive tomorrow. We were unable to make any test
runs since the control board was malfunctioning. |
| 2005-1-12 | After various test runs we are still troubleshooting the main motherboard
of the Gasonics Asher. We expect the system to be down until early next
week. We appologize for the inconvenience. |
| 2005-1-10 | As mentioned previously the new magnetron for the gasonics asher was
installed last friday. Today's test runs show that the new magnetron is
fully functional, however some unforseen issues have arisen regarding a
few of the system's sensors. Additional troubleshooting will occur
throughout the whole of tomorrow. Expect the system to be down until at
least Wednesday. |
| 2004-12-23 | The replacement magnetron has been ordered. We will install it as soon
as it comes in. We will need to run several test runs to optimize the
system and ash rate. |
| 2004-12-22 | We discovered several problems with this system. We discovered that the
plasma tube needed to be cleaned. There is another problem with the
unload arm sensor. We will need to rewire the connector. The magnetron
also needs to be replaced. Once the new magnetron is installed, we will
need to run test runs to optimize the system. |
| 2004-12-17 | We have located a problem with the plasma detection system on the Asher.
We are currently working on this machine, and will complete the repairs
by Monday afternoon. |
| 2004-12-16 | We will replace a capacitor on the system tomorrow. Hopefully, this will
resolve the plasma issues. We will let users know when this system is
back up. |
| 2004-12-15 | We are still working on the plasma problem. We ran several test runs
today, and have narrowed down the source of the problem. Tomorrow, we
will remove some of the Asher parts to determine if they are working
properly. |
| 2004-12-14 | The Asher is still down due to issues with the plasma. We will continue
to look into this issue tomorrow. |
| 2004-12-13 | The Asher is currently down. Several cleanroom users have reported
problems with the plasma. We will perform some tests tonight. |
| 2004-12-10 | The maximum run time for any recipe is 2 minutes. Also, after you process
a wafer, you will have to wait 20 minutes before processing the next
wafer. |
| 2004-12-1 | Reminder: Always keep the plastic cover on the machine when running this
system. If you encounter any problems while using the Asher, please
contact Charlie Suh. |
| 2004-11-30 | A cleanroom user is adjusting the pins on the sample holder arm. This
causes other users' wafers to fall off the sample holder. Currently, the
pins are set back to the default position. If you find that the pins
appear to be misaligned, do not re-adjust them yourself, but contact
Charlie Suh right away. |
| 2004-11-29 | Please remember to put the small samples holder back into the 4"x4" box.
Do not leave it lying on top of the machine. |
| 2004-11-10 | A cleanroom user reported a problem with the unload step. If any other
users experience a similar problem, please contact Charlie Suh. |
| 2004-10-7 | The Asher will be up later this afternoon. We have found the replacement
parts needed to repair the sample holding bracket. Thank you for your
time and patience. |
| 2004-10-6 | The Asher is currently down due to a broken holder bracket. We are in the
process of looking for the necessary replacement parts. We apologize for
the inconvenience. |
| 2004-10-25 | Reminder: There is a small sample holder available for this system. It can
be found on top of the machine. Please do not try to put small samples on
top of a normal wafer for processing in this system; your samples will
slide off of the wafer. Please contact Charlie if you have any questions
or issues regarding this machine. |
| 2004-10-13 | A cleanroom user reported a problem with the system shutting down. We
examined the machine, and found a short in the system that was causing
the breaker to trip. The problem has been resolved, and users may now use
the system again. |