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Equipment log for the Coyote PECVD
| 2009-6-29 | The tool is down until the issue with the ammonia regulator on its cabinet has been resolved. |
| 2009-6-24 | This tool is down until the tool owner examines it to ensure that there
were no issues after the issue with the ammonia gas cabinet were resolved.
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| 2009-6-23 | This tool is down until the tool owner examines it to ensure that there were no issues after the issue with the ammonia gas cabinet were resolved. |
| 2009-5-15 | When the exhaust system was taken apart there are a few complications that will require the systems to be down longer than expected. A part needs to be fabricated at the GT machine shop. As soon as an expected finish time for this project is ascertained, we will send out another email.
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| 2005-3-29 | The Coyote PECVD will be brought down tomorrow morning as some changes
aer being made to its gas lines. |