Microelectronics Research Center

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Equipment log for the CEE 100CB Spinner


2007-10-2
Please keep the hood closed while you are spinning your sample. Both spinners in bay 3 are back up and running. Thank you for your patience while we fixed the problem.
2007-10-11
Please remember to keep the lid lowered while you are spinning your sample.
2007-10-1
Please make sure to lower the lid on all Spinners before using them. Not doing so will result in suspension from the tool.
2007-1-31
Users reported vacuum problems, all spinners will be checked in the morning. Please use the correct chuck when mounting your samples. If you are unsure, please ask a staff member.
2005-6-7
To all spinner users, whether you spin polymer or photoresist we expect each user to take the time to clean up any spills or residual liquid that may deposit during use. If you are found not cleaning these systems after you have finished your access to these tools will be removed.
2005-6-27
Remdinder: users are not allowed to pipette directly from the large photoresist bottles. We supply amber bottles for this purpose. Multiple spills have occured from users using and leaving the large bottles at the spinners.
2005-5-27
Please remember that if you are not signed in to the spinner or if you do not close the hood lids you will receive a ERROR-POOR VACUUM alarm. Everyone by now should know that you have to run these systems with their lids down for everyone's safety.
2005-4-7
CEE spinner users: remember to cleanup the spinners once you are finished using them. Any texwipes or pippettes that have residual photoresist should be disposed of in the solvent waste trash located next to the spinners.
2005-4-29
Two items: The first, users who do not clean the spinners will be at the risk of loosing access to these systems. If a staff member finds a spinner unit left uncleaned the previous three users will be contacted and issued warnings. The second, if you happen to spill photoresist on the chucks you are required to clean the chucks logging off the equipment. We have had multiple chucks get stuck on the spinner's shaft because users have allowed photoresist to get inside the chuck and harden.
2005-4-25
All spinner users are required and expected to clean the spinners' furace and area after use. Staff will be checking on the condition of these spinners.
2005-4-18
We once again are reminding Spinner users to throw all photoresist covered texwipes, pipettes, or any additional cleanroom items away in the properly vented trash cans and not in the general trash bins.
2005-3-18
Reminder: Do not forget that the fume hood cover must be down when you are using the spinner. Also, return the cover to the down position when you leave the machine.
2005-3-14
We are reminding all spinner users that they are not allowed to place any texwipes on any of the hotplates in the cleanroom. We supply high thermal grade foil so please use it.
2005-2-23
Lately we have noticed that the CEE Spinners work areas have been cluttered with dirty texwipes and pipettes. It is the users of these pieces of equipment's responsibility to properly dispose of these items.
2005-2-18
The spill pans for the CEE spinners have been replaced today. Please remember to use texwipes to reduce initial spills. If you do happen to get any residual photoresist on the spinners please immediately cleanup with a little bit of acetone.
2005-2-1
Reminder, if you change the temperature settings of the hot plates on any of the spinners remember to change them back to its original setting once you are finished used the hot plate.
2005-11-9
A user reported a problem with the vacuum on the left spinner. Both systems had to be logged down to repair the vacuum problem. The problem was fixed late this afternoon. Both systems have been logged back up.
2005-10-28
It has been brought to our attention that someone is improperly operating the CEE Spinners. Please remember to use the proper sized chuck for your samples. Any user who does not use the proper sized chuck will be suspended from using the spinner. If you cannot find the proper sized chuck, please contact the staff
2005-1-28
When you change out a spinner chuck, please place the chuck on top of the shelf on the right-hand side of the machine. Please do not leave the chucks on the table as they tend to roll.
2005-1-19
A user reported a problem with particles falling onto their sample. Please be sure to check the cover on any of the spinners. Please contact a staff member if you think that the plastic covers to the spinners need to be changed.
2004-11-18
Please remember to lower the hood door and the spinner lid while you are using this system.
2004-10-27
Make sure to turn the vacuum off after you use the CEE spinners. If the vacuum switch of one of the spinners is left in the "On" position but there is no wafer on the spinner chuck, then the vacuum to the other spinner will be very weak, even if the user is using the system properly.
2004-10-26
Please remember that it is mandatory to leave both the spinner cover and the fume hood cover down when you have finished using these systems. Photoresist is carcinogenic, and this helps to contain the fumes.