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Equipment log for the CVC E-Beam Evaporator 2
| 2009-7-22 | E-beam 2 has been logged back up. We have resolved the issue with the leak in the foreline valve. The regeneration was
completed late this afternoon. The pressure remains stable when running the Al. Please remember to have the
beam located in the center of the crucible.
|
| 2009-7-21 | The tool should be back up this evening. The regeneration is running. |
| 2009-7-20 | A small water leak was discovered around the main gun. This water leak has been repaired. The issue was found by users reporting that the pressure was rising during their depositions. Because there was a small amount of water vapor getting into the chamber over a long period of time, the cryopump became saturated. A regeneration is currently in progress and the tool should be available tomorrow. |
| 2009-6-29 | The system was cleaned as per normal procedures for monday. |
| 2009-5-26 | The metals have been refilled and cleaned. |
| 2009-5-19 | A user reported a problem with the beam control There were several wiring issues with the XY control. These problems have been resolved. If you notice any issues with the beam control in the XY direction, please report it right away.
|
| 2009-4-28 | After the power outage, the tool did not sound as if it were operating correctly. Also a great many metal flakes were found all over the chamber.
These issues will be further investigated in the morning. |
| 2009-11-11 | There is a leak on the tool. The system will be leak checked tomorrow. |
| 2007-9-28 | The gold, copper, and chrome have been refilled in the E-beam 2. Please
let a staff member know if any metal seems to be getting low. Do not use a
crucible if the metal is not above 50%. |
| 2007-8-23 | The E-beam 2 is back up and running. The problem with the interlock is
fixed and the beam performs normally. Please let a staff member know if
you notice anything wrong with the machine. Thank you for your patience. |
| 2007-8-22 | There is a safety issue with the high current interlock. The current can
be turned on while the chamber is at atmosphere. The machine will be
logged down until the problem is resolved. We are working on the problem
and hope to have it resolved soon. Sorry for any inconvenience and thank
you for your patience. |
| 2007-5-1 | The gold and aluminum have been refilled. Please notify a staff member
once any metal source reaches 50% or less. |
| 2007-4-30 | Please remember to make sure your deposition rate is 3A/sec or lower. If
you would like to deposit at a higher rate, please contact Charlie. |
| 2007-4-20 | A user has reported a high base pressure. The cryopump will be regenerated
on Monday morning, making the tool unavailable for several hours. |
| 2007-4-17 | We have adjusted the tooling factor for the Nickel in the E-beam 2. Users
noticed that there was problem with Titanium then Gold deposition. We are
currently looking into the problem, but have found no problem with just
Gold depositions. If you notice a problem with your sample, please contact
staff. |
| 2007-3-29 | When the material in the crucible reaches
50% or less, immediately stop the process
and notify a staff member. Do not attempt
to use a material that is at or less than
50%. This is true for both E-Beams. |
| 2007-3-26 | A graph showing the pressure vs.
pumpdown time curve has been placed on
the right side of the control panel. |
| 2007-11-6 | The E-beam 2 is back up. The cryopump has been regenerated. Thank you for
your patience. |
| 2007-11-26 | Please remember to check the other E-beam before pumping down. The two
systems share a roughing pump. Switching from one system to the other
while pumping down is not good for the pump and could cause it to fail.
Please be courteous to other users and let another user finish pumping
down before beginning. |
| 2007-11-14 | The cryopump regeneration was finished today on the E-beam 2, and the
machine is now back up. Thank you for your patience. |
| 2007-10-5 | The E-beam 2 will be down over the weekend due to a water and vacuum
problem. We apologize for any inconvenience. |
| 2007-10-30 | Please remember to unscrew all screws and place them, and the clips, in
their appropriate amber bottle. Then stack the plates on top of the clear
cabinet.
The E-beam 2 is back up. The film advancement knob is currently not on the
machine. A replacement knob will be put on soon. |
| 2007-10-26 | The metals have been filed on the E-beam evaporator 2. If you notice a
metal that is low, please let a staff member know. |
| 2007-10-23 | The problem with the water and the film has been fixed with the E-beam. If
you notice the water light is out, please let a staff member know
immediately. Also, if you cannot see into the chamber, ask a staff member
for help. |
| 2007-10-18 | The metals on E-beam 2 have been refilled.
If you notice a metal that is less than 50%
full, please do not use it. Instead, inform a
staff member so we may fill it up for you. |
| 2007-10-12 | The E-beam 2 is down due to problems with the hoist. We hope to have the
problem solved as soon as possible. |
| 2007-10-11 | The metals will be refilled tomorrow morning. |
| 2007-1-4 | Reminder to all users: The maximum
allowed evaporation rate is 3 A/s. Any
users who violate this rule will be
suspended from the machine. |
| 2006-6-26 | A user reported problems with the Al
evaporation. We will be running test runs
on the Al tomorrow. |
| 2006-4-4 | The system was logged back up late this
afternoon after the cryopump completed the
regeneration. The compressor was
swapped out this morning. We apologize
for the delay. |
| 2006-4-3 | We expected the system to be back up
today. Unfortunately, there was another
problem with the compressor. We will
replace the compressor tomorrow morning.
Once the compressor is replaced, we will
begin cooling down the cryopump. We
expect the system to be back up by
tomorrow afternoon.
|
| 2006-3-9 | A user reported a problem with the valve
controller. The system would not let him
vent the chamber. We discovered that
cryopump had crashed during the run. The
system was regenerated today, and it was
logged back up late this afternoon. We will
replace the chamber liner tomorrow
morning. |
| 2006-3-6 | We are still conducting some evaporation
test runs on the system. Some users are
experiencing some major error with the
thickness when they deposit amounts less
than 1000 Angstroms. |
| 2006-3-31 | The cryopump crashed late this morning.
We began the regeneration, and we expect
the system to be back up late this
afternoon, but it will definitely be back up
Monday morning. |
| 2006-3-3 | We have found that the amplitude for the E-
beam two is not responding like it should.
We will be making test runs on the system
Monday. For now, users can still use the
system. |
| 2006-3-29 | We've been running test runs on the
crucible selector throughout the day.
Several users have also reported no
problems. Please make sure to test the
crucible selector before pumping the
system down. |
| 2006-3-28 | Several attempts have been made to repair
the problem with the crucible selector. The
system was logged down late this
afternoon. We hope to have the system
back up early tomorrow morning. |
| 2006-3-28 | The system was logged down due to
problems with the crucible selector. This
morning, we removed the cover to the
E-beam gun to get a better look inside. We
found no metal build up. The system was
logged back up this afternoon, and a few
users have made some runs on the system.
They did not run into any problems with the
crucible rotation.
The system seems to be working now, but
we advise all users to test the crucible
selector before pumping the system down. |
| 2006-3-22 | A user reported a problem with the shutter
this afternoon. We discovered that the
shutter was out of alignment. This caused
the shutter to allow some material to be
evaporated onto the sample while it was
warming up.
Please be sure to check the shutter before
pumping the system down. |
| 2006-3-21 | Several users reported problems with the
crucibles not rotating when selected. A
piece of metal was discovered. It was
lodged in such a way that prevented the
crucibles from rotating easily. The lodged
metal was removed and the system was
logged back up. |
| 2006-3-16 | Several users reported that the crucible
holder was not rotating properly. This
afternoon, we discovered that the position
of the holder was not set right. When this
happens, the holder tries to move forward
and backwards to get back to the correct
position. |
| 2006-3-14 | The system was briefly logged down to help
with troubleshooting the problem with the E-
beam one. We have also discovered that
the LED to the roughing valve light is not
working. When you are pumping down the
system, please allow the system 2-3 mins
to pump down. You will know the system is
pumping by watching the pressure gauge
move. |
| 2006-3-13 | This is a reminder to all E-beam users. The
chamber liner has been replaced. This
should resolve the issue with flaking caused
by running certain metals. |
| 2006-2-9 | The gold crucible in the system will be
unavailable starting tomorrow. The gold
crucible in the E-beam 1 will be unaffected.
The gold will be made available somtime
late next week. We apologize for the
inconvenience. |
| 2006-2-8 | A user reported a problem with evaporating
Al. Please remember to check the level of
the material before using the system.
Please make sure that atleast 60% of the
crucible is full before using it, and you must
report it to the staff if it gets this low.
|
| 2006-2-28 | A user reported a problem while
evaporating gold in the system. We have
discovered that any thickness less than
1000A are off by 25%. We will be running
test runs on the system tomorrow.
|
| 2006-12-4 | The machine has been logged back up, and the gold and chromium crucibles
have been refilled. |
| 2006-11-30 | This tool will be up and running by late this afternoon. |
| 2006-10-20 | We discovered that the controller had been turned off early this
afternoon. Please do not turn off the controller. If you find the
controller turned off, do not turn it back on; contact staff right away. |
| 2006-10-19 | A polarized lens filter has been installed into
the viewport of the E-beam 2. You can now
adjust the brightness using the polarized
lens. If you do not know how to use it,
please contact Charlie. |
| 2006-10-12 | For the moment, E-Beam 1 and E-Beam 2 both share the same mechanical pump,
so the pumpdown time will be greater. Please allow an additional two
minutes for the machine to pumpdown. |
| 2005-9-8 | A user reported the power supply shutting off during their run. After the
breaker was reset, the power supply operated normally. We contacted the
manufacturer about the intermittent problem, and we are pursuing a
permanent solution. |
| 2005-9-16 | A user reported a problem with the
interlocks on the system. There was a
loose wire to one of the interlocks. This
resolved the problem. |
| 2005-9-15 | There was a power supply problem while
running test runs this afternoon. We will be
working on the power supply tomorrow. |
| 2005-8-5 | A user reported a problem with one of the
interlocks on the power supply. We found
that there was a loose connection in the
back. |
| 2005-8-25 | A new polarized lens has been installed to
replace the large green lens in the
viewport. Users should have an easier time
spotting the ebeam inside the chamber. |
| 2005-7-6 | Cleanroom staff noticed that the beam has
not been properly aligning during use.
Minor adjustments will be made tomorrow
to fix this problem. |
| 2005-7-28 | The valve controller for the E-Beam 2 has
been repaired and reinstalled. After a few
test runs the system once again is ready for
cleanroom processing. |
| 2005-7-25 | Staff is still in the process of repairing the
controller board that was removed from E-
Beam 1. Look for an email updating you on
the status of this piece of equipment. |
| 2005-7-22 | The vacuum controller for this system was
removed and is currently being used in the
E-Beam 1 tool. Until the other controller is
repaired this system will be down. |
| 2005-7-11 | A minor fuse has been blown in the E-beam
2 system. It will be replaced first thing
tomorrow morning and test runs will be
made shortly after. Look for an email
updating you on the status of this tool. |
| 2005-6-9 | MiRC Staff is in the process of making various adjustments to the ion
gauge and its controller. Until that is completed the system will remain
down. |
| 2005-6-8 | The cleanroom staff is still in the process of troubleshooting a few
minor problems with the E-beam 2's ion gauge and controller. |
| 2005-6-7 | The E-Beam Evaporator 2 is down as Charlie works to repair the ion gauge
controller for this system. |
| 2005-6-16 | This is a reminder to all users. There is now a gold crucible in pocket
3 on this system. Gold has been available on this system for a couple
of months. All users who need metals evaporated are enouraged to get
training on this system. More training sessions will be available soon.
|
| 2005-6-13 | The system is now available. There was a problem with the cable to the
Ion Gauge controller. This problem has been fixed. Training sessions
for this system will be set up again soon. |
| 2005-6-10 | The system is still down. The cable to the ion gauge needs to be
replaced. We will try to install the replacement cable on Monday. |
| 2005-5-9 | A user reported a problem during the Al deposition. We ran several test
runs today using the Al. We found that there was a problem with the
power settings on the Al. We also found that the Al would not reach a
stable deposition rate. We will continue running test runs tomorrow.
Users should not use the Al until further notice. |
| 2005-5-23 | A user reported there was a hoist problem. We discovered that one of the
sensors was not secured properly; that sensor is now in the correct
place and the hoist is working correctly. |
| 2005-5-17 | The E-Beam Evaporator 2 had its filament replaced today, in addition to
having some of the chamber's mounting screws fixed. This system is once
again ready for cleanroom use. |
| 2005-5-12 | The system will be logged down tomorrow at 9:30am. Several users have
reported that the base pressure is too high. We will run a regeneration
tomorrow morning. The regeneration should be completed by late in the
afternoon. An email will be sent out to all E-beam 2 users. |
| 2005-5-11 | A user reported a problem with beam positioning on the crucible. Staff
will explore the possibility of an electrical problem in the system and
will notify users once this problem has been corrected.
Be aware that the Aluminum soak power percentage is actually set higher
than the deposition power percentage. This intentional change will result
in a more stable aluminum deposition rate. If you have any questions,
please contact Charlie Suh. |
| 2005-4-8 | A cleanroom user reported that the ion gauge was not staying lit. This
has been an on going issue, one which we are currently in the process of
fixing. |
| 2005-4-29 | Once again, the gold crucible is now available for cleanroom use. The
deposition calibration has been finished and showed that the system will
provide a plus or minus 10% error. |
| 2005-4-28 | Once again the gold crucible is now available. Any users that want to
use gold and have access to the system are allowed to use it. The gold
is currently located in the third selection. The silver crucible that
used to occupy that spot can now be found in the metals cabinate. |
| 2005-4-27 | The gold crucible has been installed and calibrated in the Ebeam2
system. If you need further conformation please contact Charlie. During
our deposition runs we have verified and optimized the Titanium
deposition for this sytem. If you are interested in these results please
contact Charlie. |
| 2005-4-26 | The gold crucible will become available tomorrow. Deposition test runs
are still in the process of being made and compiled. |
| 2005-4-19 | Metal deposition rate testing will continue to occur on the E-beam
Evaporator 2. A full report will be posted on our processing website once
all the rate data has been compiled. |
| 2005-4-14 | Deposition tests were made on Copper, Titanium, and Aluminum. Each test
yielded at least a plus or minus 10% on overall thickness. Additional
test runs are being made to verify this.
A few days ago a cleanroom user reported that the system was not properly
pumping down. The ion gauge was replaced resolving the pumping problems.
We are also investigating whether or not we should open this system up to
Gold depositions. This may become an option in the near future. |
| 2005-4-11 | A cleanroom user reported a problem with the system's ion gauge. The ion
gauge was cleaned and a frayed wire was replaced. Once the system
reaches the proper pressure the ion gauge will not come on as it should.
If you notice any additional problems with this system please contact
MiRC Staff. |
| 2005-3-24 | The CVC E-Beam Evaporator 2 will be brought down from 8am to 12pm. Sorry
for the inconvenience. |
| 2005-2-4 | All users who have been trained on the E-beam 2 system are encouraged to
send the trainer an email to set up a time for check-off. The trainer is
Charlie Suh. His email is cs176@mail.gatech.edu |
| 2005-2-24 | The access controller permissions have been changed. Also, the name on
the scheduler has also been changed from E-beam Filament to CVC E-beam
Evaporator 2. |
| 2005-2-2 | Reminder: Once you have attended a training class, you may e-mail the
trainer when you are ready to schedule a check-off session.
Also, please remember that gold will not be available in this system. |
| 2005-2-17 | When using the New Ebeam Evaporator after turning the key on you will
have to allow time for the cutback light to illuminate before pushing the
start button. If you do not wait for the cutback light to come on, then
one of the interlocks will not come on. |
| 2005-2-11 | A user reported a problem with the deposition rate for the titanium. We
made some adjustments to the controller so that the correct deposition
rate was used. We also made some calibration test runs to make sure
that the titanium was depositing the correct amount. |
| 2005-2-10 | A cleanroom user reported that the during their run they noticed an
erradict deposition rate. To help with this we are asking users that
wish to run at low power to consult MiRC Staff first, as test will need
to be made to verify these low power recipes. |
| 2005-2-1 | Reminder to all users that attended the first E-Beam 2 training session
has to schedule a check off time with the main trainer. The interlock
issue has been resolved allowing check offs to occur. |
| 2005-12-6 | A user reported a problem with the e-beam
power. There appeared to be a short
somewhere in the filament assembly. One
of the components on the filament was
warped and needed to be replaced. Once
this part was replaced, the beam came on
right away. |
| 2005-10-25 | A user reported a problem with the power
supply. One of the interlock lights was not
coming on. This was caused by a problem
in the access controller box. One of the
relays needs to be changed. This relay will
be changed Tuesday morning. |
| 2005-1-28 | We have resolved the issue with the interlock problem. Training sessions
will now resume on this equipment. To see a list of available training
sessions, please go to http://grover.mirc.gatech.edu/training/view.phtml.
If you have signed up for training but later find out that you will not
be able to attend the class, please cancel your registration so that
another user can take your place. |
| 2005-1-21 | We have begun training sessions on the new E-beam 2. Please check for
available classes at: http://grover.mirc.gatech.edu/training/view.phtml.
The materials that will be allowed in this machine are: Titanium,
chromium, silver, nickel, aluminum, copper, and platinum. Please note
that gold will not be allowed in this system. |