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Equipment log for the CMOS Cleaning Station
| 2009-7-9 | Chemicals will be changed out tomorrow (SC II & piranha) |
| 2009-7-20 | A user reported that the Piranha tank was nearly full. This will be checked tomorrow. |
| 2009-6-18 | The SCII cleaning station, piranha, and BOE chemicals were changed. Thanks. |
| 2009-6-11 | Both the piranha and the SCII chemicals have been changed. Please remember to top off the tanks with Hydrogen Peroxide before each use. The correct ratios and amounts are to the left of the cleaning station in the paper holder. If you have any questions, please do not hesitate to ask a staff member. Thank you for your time and patience. |
| 2009-5-27 | The chemicals have been replaced. |
| 2009-5-26 | The maintenance on the tool has been completed. The tool will be refilled tomorrow morning. |
| 2009-5-20 | The Piranha Cleaning Station and the BOE Dip chemicals have just been changed. Thanks |
| 2009-5-15 | The CMOS wetbench repair is going to be delayed until sometime next week because of parts on backorder. Please watch for an email on this topic next week. |
| 2009-4-21 | Tank has been contaminated by organic material probably caused by someone cleaning a sample covered with photoresist, etc. Please note that the CMOS cleaning station can be thought of as a final descum in the sense that it should only be done after THOROUGHLY removing all resist, etc from your wafer with solvents, etc. It is NOT to be used when there is still visible residual organic material on the wafer. You will need to clean it with solvents, etc BEFORE it goes into the tank. No residues.
The tank & station will be thoroughly cleaned tomorrow and the chemicals will be changed. |
| 2007-8-22 | Please make sure only blue boats are used in the CMOS cleaning station.
Green boats are used in the MEMS wet bench, and will contaminate the CMOS
station. |
| 2007-8-16 | Please remember that only blue boats are to go into the cleaning station.
Green boats are not to be used. The green boats are used in the MEMs bench
which puts it in contact with metals, and no metals are to be in the
Cleaning Station as it will contaminate it. |
| 2007-6-14 | The CMOS wet bench is still down. It will be worked on extensively tomorrow. |
| 2007-5-1 | The piranha bath has been moved back to its original location, closer to
Dump Rinse #1. The correct piranha bath controller has been labeled "piranha."
Please do not use the tank in the far right corner. |
| 2007-4-4 | The CMOS cleaning station is back up and running. If you experience any
problems, please alert a staff member immediately. |
| 2007-11-5 | The CMOS Bench will be down until tomorrow at noon for maintenance. An
email will be sent out once this is done. Thank you for your patience. |
| 2007-11-26 | The chemicals in the CMOS wet bench have been changed. |
| 2007-1-16 | A user reported that one of the lids in the
piranha bath was damaged due to improper
usage. We are currently investiaging the
problem. If you do not know how to use the
fume hood correctly, please contact a staff
member for assistance. |
| 2006-5-3 | The cleaning station was temporarily logged
down due to some flow tests that needed to
be done. We apologize for the
inconvenience. |
| 2005-9-28 | We want to thank all of the users who
submitted operating procedures used in the
wetbench. We will sort through the
submitted procedures to create an official
operating procedure for the cleaning
station. A training video will also be made.
All users will be required the follow these
new rules. Anyone who does not, will have
their access to the station suspended. |
| 2005-8-3 | The CMOS Wet Bench has had its tanks
completely cleaned and new chemicals have
been poured. The bench is now available
for use. Additional instruction sessions will
be held to train users on how to use the
new tanks. |
| 2005-8-24 | Please remember to clean up after using
the CMOS cleaning station. We found small
droplets of acid around the sink area. |
| 2005-8-2 | The CMOS Wet Bench underwent extensive
cleaning today. Fresh chemicals will be
poured first thing tomorrow morning making
the bench once again available for use. |
| 2005-8-11 | New chemicals have been placed in the
CMOS Wet Bench. Remember, if you
happen to make any droplets of liquid
please wipe them up immediately. Do not
leave them for the next user or staff
member to find. |
| 2005-8-10 | Lately liquid residue and acid residue have
been accumulating on the CMOS Wet
Bench. Please be sure that you are leaving
this station in a proper condition. If you are
unsure as to what the condition should be
please contact Chris Holshouser. |
| 2005-8-1 | The new stripper and SC-II tank have been
fully installed on the CMOS cleaning
station. Additional training will occur to
cover the use of the new tanks. The
system will remain down however until the
bench can be cleaned and removed of any
contaminants. |
| 2005-7-28 | Staff is still in the process of installing and
hooking up the new stripper and SC-II
tanks for the CMOS Wet Bench. The bench
will be down until these tanks are
completely installed. |
| 2005-7-27 | The CMOS Wetbench will be logged down
for the rest of the week as a new 1112A
stripper tank is installed. |
| 2005-7-21 | The CMOS wet bench is in the process of
having its chemicals changed. The bench
will be brought back up later this evening. |
| 2005-7-20 | A revised set of rules and procedures for
the CMOS wet bench will be distributed once
the final touches are placed on the new SC-
II tank. At that point every user must go
through a "refresher" course on the use of
this wet bench. |
| 2005-7-11 | When using any of the acid tanks at the
CMOS Cleaning Station, make sure you are
properly wearing your personal protective
equipment. If you are found not wearing
this protective gear you will be suspended
from the wetbench. |
| 2005-6-9 | The CMOS Cleaning Station has had its Piranha, Phosphoric Acid, BOE, and
1112A stripper tanks cleaned and refilled today. Please remember to sign
out of this wetbench if you are not activly using it. |
| 2005-6-22 | The CMOS Wetbench has had its chemicals for the BOE, Piranha, and
Phosphoric Acid tanks replaced today. Please remember that no tweezers,
metal or any other kind are allowed at this bench. |
| 2005-6-21 | Reminder to all CMOS Wetbench users, be sure you leave the Wetbench in a
spotless state once you have finished using it, this includes any
residual liquids that should be wiped up before leaving. |
| 2005-6-2 | The CMOS Wetbench had its BOE, Phosphoric, and Piranha tanks changes
today. |
| 2005-5-5 | The CMOS Wetbench will be logged down tonight as we clean and change the
Pirahna tank and the BOE tank. We are also looking into a draining
problem that just recently arose. The sink will be back up come
tomorrow after noon with fresh chemicals. |
| 2005-5-27 | The CMOS Wet Bench has had all of its tanks drained, cleaned, and
refilled today. Also we are still in the process of installing the SC-II
tank. Once that is installed additional training will occur to once
again use this Wet Bench. |
| 2005-5-26 | The CMOS wetbench will be down tomorrow as we clean each of the tanks and
change out the chemicals. Also, you may notice that the bench has
recently had its new tank installed. New guidelines for this tank will
be implemented once it is fully installed. |
| 2005-4-19 | The CMOS Wetbench is currently undergoing the long drawn out process of
having each of its tanks drained, cleaned, and refilled. Until we have
finished cleaning these tanks and resuppling the benches chemicals the
bench will remain logged down. |
| 2005-2-9 | We are notifying current CMOS and MEMS wetbench users that if you have
used the tool in the past you are eligible to continue using it as long as
you go through proper training up and until the 18th of February. After
this date you will no longer be able to the wetbench stations without
proper training. |