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Equipment log for the Hummer Sputtering System

2009-6-9
The tool is still sputtering films that have very poor adhesion and are slightly off in color. The problem will be further investigated tomorrow to determine whether or not the target leads are potentially shorting to and/or sputtering the lid.
2009-6-8
The connectors to the target have been adjusted to address a possible short. However, tests of the system show improvement in the quality of the film but testing needs to continue.
2009-6-5
The system is sputtering a black material that may be caused by a short between the target and the lid. The problem is being investigated.
2009-6-4
The system is still sputtering an unknown black material. The problem is being investigated. The possibility of a mis-seated target has been eliminated.
2009-5-19
System is not striking a plasma. There may be an issue with the target.
2009-4-15
A user reported that a sample slid off the stage in the Hummer. The system was opened and the sample was retrieved. Please report any lost samples to the staff.
2007-4-4
The Hummer is out of the Clean room while it is being repaired. If you need to coat something for the SEM, please use the Ernest Fullam.
2007-4-20
The Hummer is now connected to the access control system. You can now request a checkoff online.
2007-4-2
The Hummer is down due to a pump problem. An email will be sent out as soon as the problem is fixed.
2007-4-17
The Hummer is now hooked up to the access controller. All users who need to use it, please request a check-off. We will get anyone who needs to use the machine checkedoff ASAP.
2007-3-29
Training sessions will be held tomorrow at 3 and 4pm. Please sign up for a session if you have not already, or email Nicole at Nikky@gatech.edu.
2007-3-27
Training has started on this system which will replace the Ernest Fullam SputterCoater.
2007-3-26
Training sessions are being held every day for the remainder of the week starting tomorrow at 3:00pm and 4:00pm. Please email Nikky (Nikky@gatech.edu) to let her know which date and time you would like to attend.