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Equipment log for the ALD - SrTi
| 2009-6-24 | The computer failed on this tool. A new one has been formatted and should be reinstalled now or soon. |
| 2009-6-23 | Valve issue resolved. |
| 2009-6-19 | Flow sensor issue |
| 2009-6-18 | Issue with valve. Problem will be investigated tomorrow. |
| 2009-5-8 | The vacuum pump is not operating correctly (e.g. base pressure is 560mT)
and the pressure gauge needs to recalibrated at atmosphere or vacuum. The
oil in the vacuum pump has been changed. The manifold also needs to be
checked for buildup. |
| 2009-5-7 | The vacuum pump is not operating correctly (e.g. base pressure is 560mT) and the pressure gauge needs to recalibrated at atmosphere or vacuum. The oil in the vacuum pump has been changed. The manifold also needs to be checked for buildup. |
| 2009-5-27 | A test run on the TiO2 was performed today. The results of that test will be provided to the users tomorrow. |
| 2009-5-26 | A TiO2 sample is being tested tomorrow. |
| 2009-5-22 | The pressure gauge has been recalibrated. |
| 2009-5-20 | The pressure sensor still has not been calibrated. There were some issues with the systems that were going to be used to calibrate it. The issue is expected to be resolved tomorrow. |
| 2009-5-19 | The pressure gauge is still not working. Calibration of a spare was not successful today. More efforts will be made tomorrow. |
| 2009-5-15 | Pressure gauge needs to be recalibrated. This has to be done using PVD75 Sputterer tool and there was not a sufficient block of time available this week. It will be done next week. |
| 2009-5-12 | Pressure gauge has problems. Manifold needs to be checked for clogs. Pump needs to be checked. Will be at least partially done tomorrow. |
| 2009-4-8 | Another pressure sensor has been obtained. It has been put on the system and will be tested in the morning. |
| 2009-4-7 | new pressure sensor installed will have to be calibrated tomorrow morning |
| 2009-4-1 | We will put a pressure gauge on this tool tomorrow and it should be operational tomorrow or Friday. |
| 2009-3-31 | Pressure sensor failed catastrophically. Was returned to vendor for repair under warranty. Update will be sent out when more information is available. |
| 2009-3-27 | Pressure sensor was taken and put on ALD1 as this was the lower used of the two tools. The other pressure sensor is out for repair under warranty as it failed catastrophically. |