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Equipment log for the Black Magic PECVD
| 2009-7-9 | A user requested that the staff change the carrier gas from Argon to Helium. This has been done. If you have any questions, please see Ben Hollerbach or William Kimes. |
| 2009-11-11 | The mechanical pump on the system is having trouble pumping down to the trip point to meet the interlock. |
| 2009-11-10 | The system is down. |