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Equipment log for the CVC E-Beam Evaporator
| 2009-8-26 | Information | The viewport issue has been resolved as well as the beam control issue. |
| 2009-7-14 | Calibration | The regeneration was completed late this afternoon. The tool is operational. |
| 2009-6-29 | Calibration | The system was cleaned as per normal procedures for monday. |
| 2009-6-19 | Calibration | A few users have reported issues with the beam control. They are reporting that the beams amplitude is moving on its own. We have not observed this behavior. test will be conducted test runs on Monday. Please monitor your runs and make sure that the beam is centered.
|
| 2009-5-26 | Calibration | The metals have been refilled and cleaned. |
| 2009-5-12 | Calibration | The cryo had to be regenerated after an emergency stop button on a particular item was pressed. The tool was still being checked to ensure that it was functioning properly. It should be marked up in the morning. |
| 2009-4-30 | Calibration | Regeneration was done Tuesday night. System is up and running |
| 2009-11-10 | Calibration | The cryo pump has been regenerated. |
| 2009-10-7 | Calibration | The system will remain down until the arcing problem has been resolved. The problem will be further investigated tomorrow. |
| 2007-9-6 | The E-Beam is currently logged down. The cryopump crashed this morning,
and is regenerating. It needs to continue cooling over night. An email
will be sent out tomorrow once it has completed the regeneration process. |
| 2007-9-28 | The silver has been used recklessly. Too much silver is being deposited at
one time. If this continues to happen, the crucible may become damaged.
Please limit how much silver you deposit at once. If this continues, the
silver may have to become an item that is checked out from a staff member. |
| 2007-9-27 | The Aluminum and Gold have been refilled. If you notice a metal that is
below 50% or has a cracked crucible, please inform a staff member immediately. |
| 2007-8-16 | The E-Beam will be down until the cryo-pump is fully regenerated. |
| 2007-6-21 | The primary magnet for the E-beam 1 has been replaced. The system is
available, but we are still fine tuning the beam control. |
| 2007-5-1 | E-beam 1 will be unavailable until tomorrow morning. The gold was refilled
today, and please notify a staff member once any metal source reaches 50%
or less. |
| 2007-4-4 | A user reported a problem with the power source today. We are looking into
the problem and hope to have it fixed tomorrow. |
| 2007-4-30 | Reminder | We will be regenerating the E-beam starting tomorrow, as well as cleaning
the gun. Please remember to make sure your deposition rate is 3A/sec or
lower. If you would like to deposit at a higher rate, please contact Charlie. |
| 2007-4-27 | Your deposition rate for the E-Beam 1 and E-Beam 2 should not be higher
than 3 Ang/s. If your deposition rate is higher than this, please contact
a staff member to get permission. |
| 2007-4-20 | Cryo Pump Regeneration | A regeneration of the cryopump was initiated this morning, and is still in
progress. An email will be sent when the E-beam is available again. |
| 2007-4-18 | A user reported a problem with the interlock lights. We discovered that
one of the sensors at the top of the chamber was not working properly. We
have temporarily adjusted the sensor and will look for a more permanent
solution tomorrow. |
| 2007-4-17 | We have adjusted the tooling factor for the Nickel in the E-beam 1 as
well. We are also investigating the Titanium Gold deposition in the E-beam
1, but have noticed no problem with just Gold depositions. If you notice a
problem, please contact staff. |
| 2007-3-9 | Information | Next week we will be performing quality
tests on the E-beam gold source. The
results from the Noran EDS will be sent out
to all of the E-beam users. |
| 2007-3-26 | Information | The Au recipe has been fixed. A test run
today yielded only 1% higher (606A) error
than the setpoint (600A).
A graph showing the pressure vs.
pumpdown time curve has been placed on
the right side of the control panel. |
| 2007-2-23 | Electron Beam Power Supply | A user reported a problem with the power settings for Au. We have made
adjustments to the power settings to keep the power from ramping up too
high. If you get the error message 'Max Power Error' it means that you did
not center the beam properly. |
| 2007-11-6 | The E-beam is back up and running. The problem with the hoist has been
solved. Thank you for your patience while we solved this problem. |
| 2007-11-5 | The E-beam will be down until tomorrow due to a problem with the hoist. We
appologize for any inconvenience this may cause you. |
| 2007-11-26 | Please remember to check the other E-beam before pumping down. The two
systems share a roughing pump. Switching from one system to the other
while pumping down is not good for the pump and could cause it to fail.
Please be courteous to other users and let another user finish pumping
down before beginning. |
| 2007-11-14 | The E-beam Evaporator is back up. Thank you for your patience while we
solved the problem on the machine. |
| 2007-10-8 | The E-beam is still down. We are trying to solve the problem as quickly as
possible and would like to thank everyone for their patience. |
| 2007-10-5 | The E-beam is currently down due to a water problem. We apologize for any
inconvenience. |
| 2007-10-30 | Please remember to unscrew all screws and place them, and the clips, in
their appropriate amber bottle. Then stack the plates on top of the clear
cabinet. |
| 2007-10-26 | The metals have been filed on the E-beam evaporator. If you notice a metal
that is low, please let a staff member know. |
| 2007-10-16 | We have solved the problem involving the hoist getting stuck. Also, the
beam will now respond in the longitude direction. Thank you for your
patience while we solved these problems. |
| 2007-10-11 | The metals will be refilled tomorrow morning. |
| 2007-10-10 | The metals in the E-beam 1 have been refilled. Please let a staff member
know if the metal is getting low, and do not use a crucible that is less
than 50% full. |
| 2007-10-1 | We have brought a new plate into the cleanroom for the E-beam evaporators.
It is designed to hold one 4" wafer. If you have any questions about it,
do not hesitate to ask a staff member. |
| 2007-1-4 | Information | The gold crucible has been refilled. All users
need to remember that they need to check
the levels of all metals they plan on using. |
| 2007-1-29 | Information | The Al crucible has been replaced with a
new one. If any user sees any cracks, or a
piece of broken crucible embedded in the
sample, do not attempt to use the source
material. |
| 2007-1-25 | Reminder | All users are reminded to verify that the shutter is closed before
hoisting down. |
| 2007-1-23 | Information | We are performing test runs to examine the
quality of samples deposited with Cr. We
have found that an evaporation of 1 micron
yields undesirable results. |
| 2007-1-12 | Reminder | Both systems are temporarily attached to the same roughing pump. Therefore
if both E-Beam Evaporators try pumping out at the same time, one will
fail. Please be curteous and wait until the other E-Beam has switched to
the Cryopump before starting. |
| 2007-1-11 | Cooling Water | A user reported a problem with the water
interlock. The problem has been
investigated, and the water interlock has
been working since.
If you encounter further problems, notify
the staff. |
| 2006-9-29 | A user reported problems with the
aluminum power supply settings. We ran
test runs and the correct settings are now in
place. |
| 2006-9-13 | A user reported a problem with the
viewport. The kapton film on the viewport
needed to be replaced. We took the
viewport off and replaced the film. |
| 2006-6-29 | Information | A user reported a problem with the shutter
hitting one of the posts. The shutter had
been bent. This usually happens when the
chamber is lowered on top of the shutter to
cause it to get bent. |
| 2006-6-12 | Information | The E-beam Evaporator will not be available
on Wednesday. The system will be logged
down Wednesday morning. The
compressor for the system needs to be
moved and new hoses will be attached. We
hope that a regeneration will not be
needed, but just in case, we are scheduling
the system to be down all day. |
| 2006-5-30 | Information | A user reported that a sign had been left on
the E-beam to notify users that the system
was down. We discovered that the seal had
been pulled off of the chamber. The only
way this is possible is to left the chamber
up before the system is fully vented.
Please remember that you must wait
atleast one minute before hoisting the
chamber up. |
| 2006-5-3 | Information | A user reported a problem with the iron
crucible. Please be sure to report any
problems with the crucibles right away.
That way we can replace the crucible as
soon as possible. |
| 2006-5-24 | Information | A few users reported pump down problems
on this system. There was a small water
leak from a loose fitting. The fitting has
been tightened, and the system started to
pump down normally late this afternoon. |
| 2006-5-16 | Information | We have discovered that the ramp and
soak times have been changed on some of
the recipes. Users are not permitted to
change these times. Any users who are
caught changing any of the settings will be
suspended from the tool. No warning will
be given. |
| 2006-4-5 | Information | We ask that all users check the level of
material before making your run. If you
are not sure if the material is low, have a
staff member check it for you. If you know
that the material is low, please do not just
use the system and report that the crucible
is getting low. |
| 2006-4-24 | Information | This is a reminder that the metals in the
system can only be refilled by the staff.
Any users who refill the metals will be
suspended from the machine. |
| 2006-4-19 | Information | This is a reminder to all users that the
maximum deposition rate for both E-beam
evaporator systems is 3A/s.
A user reported a problem with evaporating
gold. The beam was not heating the gold
high enough for evaporation. We made an
adjustment to the power settings to resolve
this problem.
|
| 2006-4-12 | Information | Several users have reported a problem
with the beam control on the E-beam. We
have made an adjustment to the positioning
magnets to help focus the beam a bit
more. This should resolve the problems
with focusing. |
| 2006-4-11 | Electron Beam Focus | A user reported a problem with the beam
focus. The positioning magnets were
cleaned early this afternoon. Users should
have more control over the beam now. |
| 2006-3-29 | Information | A user reported a problem the Copper
evaporation late this afternoon. We will be
running test runs on the Cu tomorrow
morning. |
| 2006-3-21 | Information | While running a test run on the system, we
discovered that two of the interlock lights
were not being met. The system was
logged down early this afternoon. The
cause of the problem was on the chamber.
A modification has been made to the
chamber. We hope this will prevent the
problem from happening again. |
| 2006-3-20 | Information | We have noticed that the rates for some of
the metals have been set to 5 A/s. The Al
was one of the materials set to this rate.
The crucible for the Al was damaged over
the weekend. It was replaced this morning.
All users are reminded that the maximum
rate for all metals is 3 A/s. Any users who
are caught running at a higher rate, will be
suspsended from the machine. |
| 2006-3-14 | Information | The system was temporarily logged down
due to a problem with the valve controller.
The system would not vent when the vent
button was pushed. The problem has been
fixed. |
| 2006-12-4 | Information | The gold crucible has been refilled. Please remember to check each
crucible before you make your run. |
| 2006-11-7 | All the metals have been refilled, including silver. |
| 2006-11-30 | The mechanical pump on this system was leaking oil so it had to be
removed. We are currently trying to find a replacement and hope to have
the machine back up by this evening. Please check the website to see the
updated status. |
| 2006-11-14 | A new aluminum crucible was installed yesterday. Please check all the
metals you are going to use before you pump the system down to see that
they are all clean and full. Also, please make sure that you center the
beam so that it does not hit the crucible. |
| 2006-10-3 | Information | This tool now takes about 30 minutes to reach 3.0 * 10^-6 Torr, which is a
bit slower than before. |
| 2006-10-27 | A user reported a problem with the platinum. We will look into the
problem later today. |
| 2006-10-2 | Information | The tool is back up. The regeneration was completed late this afternoon,
and the problem was that the hi-vac valve was not closed all the way. You
need to make sure the hi-vac valve closes before you vent the chamber. You
should hear it close. |
| 2006-10-12 | Vacuum Pump | For the moment, E-Beam 1 and E-Beam 2 both share the same mechanical pump,
so the pumpdown time will be greater. Please allow an additional two
minutes for the machine to pumpdown. |
| 2006-10-10 | The chamber shield was cleaned this morning. If anyone has any problems
lowering the chamber lid, please report the problem on the Pettit request
page. |
| 2006-1-26 | Vacuum Pump | We are currently running uniformity test
runs on the system. We are aware that
some improvements need to be made. We
are in the process of developing a better
method to hold samples. |
| 2005-9-29 | Information | The regeneration was completed early this
morning. The system has been logged up
since then.
A problem with the lateral control was
discovered during the training session this
afternoon. There was a loose connection
on the gun. The connection has been fixed.
|
| 2005-9-28 | Information | A user reported a problem with the vacuum
early this afternoon. We found that the
cryopump had failed. We are currently
investigating the problem. The cryopump is
being regenerated, and we will need to run
a few test runs in the morning. |
| 2005-9-21 | Information | A user reported a problem with the Al
crucible. We discoverd that the shutter
was preventing the sensor from detecting
any deposition. The shutter has been
adjusted to allow the sensor to make
measurements. |
| 2005-9-2 | Information | The Al crucible and the mirror were
damaged late this afternoon. A new
crucible was made and has been installed.
If you are having trouble seeing the beam,
please contact staff right away. |
| 2005-9-2 | Information | A user reported a problem with the cut back
light. We found that the filament had a
broken connection on it. The connection
was replaced, and the system was logged
back up. |
| 2005-9-12 | Calibration | The gold crucible has been refilled. A user
reported that the Al crucible had a crack in
it. We will monitor the condition of the
crucible and replace it when necessary. |
| 2005-9-1 | Information | The E-beam was logged down earlier today
to be sand blasted. We hoped that the sand
blasting would reduce the out gassing. We
will be running some more test runs
tomorrow. |
| 2005-8-9 | Today a cleanroom user reported that the
they were unable to properly align the
beam during operation. Staff cleaned and
replaced the film over the view port.
Aligning should once again be easily
performed. |
| 2005-8-8 | Information | A user reported a problme with the cut back
light. One of the lines in the back was
causing a short. We have moved the wire
out of the way to temporarily fix the
problem. We will be ordering some ceramic
beads to completely fix the problem. |
| 2005-8-31 | Information | The out gassing in the chamber has become
a major problem. We will be logging the
system down tomorrow morning to be
cleaned and sand blasted. We apologize for
the inconvenience. The system should be
back up by the afternoon.
|
| 2005-8-29 | Information | A user reported that there was a problem
with the interlock lights. We found that
there were some particles in the filament
causing a short. Another user reported a
problem with the lateral controls. We found
that there was a connection problem. Both
problems have been resolved.
A third problem was reported involving the
pressure. The pressure was increasing
after the filament had been turned on. We
believe that this is due to out gassing from
the tooling. We will schedule a time to
clean the tooling within the next few days.
If the problem becomes too severe, we will
log the machine down sooner. |
| 2005-8-2 | Users reported that for some metals they
were having difficulties aligning the beam.
Some minor adjustments were made to the
position of the magnets which have proven
to make alignment easier. If you are still
have problems aligning certain metals
please contact Charlie Suh. |
| 2005-8-19 | Information | The gold level in the crucible is at about
50% full. We will refill the crucible
tomorrow. Please remember to check the
levels of each metal you plan on using
before you use the system. |
| 2005-8-17 | Information | The system has finally been rapaired.
There were several components in the
controller that needed to be replaced. The
coil in the E-beam gun also had to be
replaced. There damage was caused by a
short in the system. We are in the process
of installing some more insulation to the line
that caused the damage. |
| 2005-7-6 | A cleanroom user reported that the pump
down times for the E-Beam to reach
appropriate deposition pressures was
outrageous. In response to this the cryo
pump was regenerated and normal pump
down times were restored. |
| 2005-7-22 | The vacuum controller for the E-Beam is
still undergoing repairs. Until then a
controller from the E-Beam 2 system is
going to be used in its place. The system is
currently undergoing regeneration and
should be accessable tomorrow. |
| 2005-7-21 | Multiple issues arose today in regards to the
E-Beam Evaporator. The automatic control
system failed today, we will repair this
control problem and regenerate the system
in hopes of making it available for use
tomorrow evening. |
| 2005-7-12 | The cryo-pump has been regenerated and
test runs show that the E-Beam 1 is working
as intended. |
| 2005-7-11 | The E-Beam Evaporator has had its cyro-
pump regenerated today. We have found
that people are pressing "Stop" and "Vent"
without pausing and thus the valve to the
cryo pump has not been closing. With the
cyro pump being open to the atmosphere
the pump has been crashing more
frequently. In order to help preserve the
cryo-pump's life, please count to 3 after
pressing the "Stop" button before venting
the chamber. |
| 2005-6-8 | This morning, a cleanroom user reported that they were receiving
a "Shutter Delay" warning and their process would abort. Be sure that
when you go to deposit your metal that your beam is actually well focused
and not hitting the crucible. If there are any questions as to how to
properly focus the beam please contact Charlie Suh. |
| 2005-6-7 | A note to all E-Beam users: remember that the maximum deposition rate for
any metal is 3 angstroms/minute. If you wish to deposit at a higher rate
you must submit a viable reason and show that it is crucial to your
research. For those who do not have permission to run at higher rates,
if you are caught exceeding this rate your access will be removed from
this system. |
| 2005-6-13 | Electron Beam Focus | Several users have reported that they are having problems with the Al
evaporation. Please contact Charlie at cs176@mail.gatech.edu if you are
having a problem. He will try to supervise your run. |
| 2005-6-10 | Electron Beam Power Supply | A user reported that the breaker to the power supply had been tripped.
The breaker needs to be replaced. We have a replacement breaker in our
storage room. We will need to log the system down to replace the
breaker. An email will be sent out to all E-beam users to let them know
when we plan to replace the breaker. The system is still usable, but the
breaker may trip. Please contact Charlie at 404-925-2047 if this happens. |
| 2005-5-5 | The E-Beam's tooling underwent some sandblasting today. The system is
also undergoing a full regeneration. Both actions are in hopes of
clearing up the pressure problems that have been occuring lately for
this system. |
| 2005-5-4 | Lately multiple cleanroom users have reported fluctation in process
pressure while they were running the E-Beam. We are currently in the
process of investigating the cause of this problem. |
| 2005-5-25 | Reminder | A user reported a problem with the Al crucible. They reported that
there was poor film quality. We discovered that the Al had oxidized.
Please remember to allow a few minutes for the crucible to cool down
before you vent the system. Also, users are encouraged to inspect the
metals before you use them. If is any kind unusual discoloration,
please report it immediately.
|
| 2005-5-23 | All metals in the system have been refilled. Also, the maximum
deposition rate for this system is 3 A/sec. If you need to run a higher
deposition rate, please contact staff and let us know why. |
| 2005-5-19 | Today, a cleanroom user reported that the beam in the Old E-Beam
Evaporator system was not properly aligning. A loose wire was causing
the beam controller to lose its lateral control. The wire has been
reattached and the system is once again fully functional. |
| 2005-5-18 | The E-Beam Evaporator has completed its regeneration and had its shorts
fixed. The system is once again ready for cleanroom processing. |
| 2005-5-17 | The E-Beam Evaporator is currently marked down due to a large short that
caused the system to crash. We are currently regenerating the system.
Once the system has been regerated we will be able to address the
shorting problems that occured. |
| 2005-5-16 | During a process today, a cleanroom user reported that the cutback light
had come on stopping their run. We are currently in the process of
procuring a more permanent solution to this re-occuring problem. |
| 2005-5-11 | A user reported that the electron beam was not coming to a pinpoint focus
in the system. Staff removed and cleaned the positional magnets within the
electron gun, and the beam is now focusing properly. |
| 2005-4-7 | If any E-Beam user notice that the metal sources are starting to run low
please contact MiRC Staff. |
| 2005-4-6 | The E-beam Evaporator is once again ready for cleanroom user after its
tooling was sandblasted and reinstalled. |
| 2005-4-5 | Reminder: the E-Beam Evaporator will be brought down tomorrow morning as
its tooling it being sand blasted. |
| 2005-4-4 | The E-Beam Evaporator had its metals refilled today. Expect this system
to be brought down for some pre-maintenance, as its tooling needs to be
sand blasted. |
| 2005-4-25 | Today, a cleanroom user reported that they found the E-beam Evaporator
not under vacuum. This user went to pump down the system and found that
it required an extraordinary amount of time to pump down to processing
pressure. We and this user are urging all Evaporator users to remember
to pump down the system once they have finished using it. |
| 2005-4-19 | The E-beam Evaporator has been logged back up after its cryo-pump was
manually cooled and restored to standard operating conditions. |
| 2005-4-13 | Today the E-Beam had its Gold crucible refilled. A little reminder to
all E-Beam users, the maximum deposition rate for all metals is 3 A/sec. |
| 2005-4-1 | Information | Next week, either Tuesday or Wednesday, we will schedule time on the E-
beam Evaporator for sandblasting. During this time, the machine will be
down for approximately three hours. |
| 2005-3-9 | The E-Beam Evaporator is once again available after its isolation valve
was cleaned. The trainers of this system want to once again remind users
to vacuum around the chamber seal. They also want to urge careful
handling of all crucibles. |
| 2005-3-8 | There were some problems with the regeneration today. The cryopump would
not stay pumped down, so we made some adjustments to the valve. We are
attempting another regeneration tonight. If the regeneration fails, then
we will have to take out the valve tomorrow. |
| 2005-3-7 | Late this afternoon, the E-Beam Evaporator was caused to crash by a
cleanroom user. This user's access has been removed because of their
actions. We will be regenerating the system over night. Look for a
future email regarding the status of this equipment. |
| 2005-3-4 | Today, a cleanroom user noticed that the chromium crucible had its center
metal depleted and no longer contained any chromium. The chromium was
remelted, replenished, and is once again ready for cleanroom use. |
| 2005-3-3 | Today, the view port for the E-Beam was cleaned making it easier to see
the crucible during alignment and focusing. |
| 2005-3-29 | Next Monday the Ebeam Evaporator will be scheduled down as staff
sandblasts it's tooling. |
| 2005-3-24 | The CVC E-Beam has had its metals refilled today.
Also, this system will be brought down tomorrow from 8am to 12pm. |
| 2005-3-15 | When using either of the E-Beam Evaporators be mindful of your beam
positioning. This is something that was covered in your training
sessions and should proceed throughout your use on these systems. |
| 2005-3-1 | Reminder to E-beam users, you are not allowed to increase the deposition
rate for any of the materials that are programed in the system. For
example the copper recipe is set to 3 A/sec you are not allowed to
increase this value. If we find that you have altered a set deposition
rate for any of the materials on this system your equipment privileges
will be under review. |
| 2005-2-9 | A cleanroom user reported that the E-Beam Evaporator was not properly
pumping down. MiRC staff noticed that the cryo-pump had crashed and is
currently being regenerated. |
| 2005-2-7 | The metals for the CVC E-Beam Evaporator were refilled today. Also if
any users need to be checked off on this system please contact Charlie at
cs127@mail.gatech.edu. |
| 2005-2-4 | Information | The E-beam finished regenerating early this morning. We needed to run
some pump down test runs late in the morning. The system pumps down to
3.1 x 10^-6 Torr in 30mins. The sample holder and e-beam gun have also
been cleaned. This helped resolve the issue we were having with the
pressure increasure during deposition.
Please remember to widen the beam as far as possible without hitting the
crucible. |
| 2005-2-3 | Information | The various components of the E-beam have been taken out and cleaned. We
hope that this will resolve the problem with the pressure increase during
deposition. We are currently waiting for the cryopump to finish
regenerating. As soon as the system becomes available, we will send an
email out. |
| 2005-2-28 | Over the weekend a cleanroom user reported that the high power light had
shut off during their run. Upon investigation we found that the main
power circuit breaker had tripped. We have noticed that as of late this
has been a re-occuring problem. We are currently looking in to replacing
the circuit breaker and/or looking in to replacing the power supply to
come up with a more permanent solution. |
| 2005-2-25 | The gold crucible has been refilled since users reported it was low. |
| 2005-2-24 | A user reported an inconsistency with the deposition measured and the
thickness programmed using the Al. We will be running calibration test
runs on the system over the next few days. |
| 2005-2-23 | CVC Ebeam users are not permitted to alter the deposition rates for any
of the recipes that are being used. If you do want to deposit at a
higher rate please contact Charlie Suh. |
| 2005-2-22 | If you plan on using the CVC E-Beam Evaporator tonight and you find that
you are unable to hoist up the chamber eventhough you are logged into the
machine, gently tap the access controller box to remedy this slight
glitch. We will be permanently fixing this problem first thing tomorrow. |
| 2005-2-2 | Miscellaneous | The E-beam is currently down. We are still in the process of resolving
the problem with increasing pressure during the deposition step. The
system will be regenerated tomorrow.
All check-off sessions for tomorrow, Thursday, Feb. 3 are cancelled until
further notice. The trainer will re-schedule check-off sessions. |
| 2005-2-18 | Today the iron metal crucible was refilled today. If you have any
additional problems or concerns with the CVC E-Beam please contact Charlie
Suh. |
| 2005-2-17 | New sample holders have been fabricated and can be used to mount samples
for either of the E-beam systems. |
| 2005-2-11 | Several users have reported a problem with depositing Al. We will run
test runs on the Al on Monday. |
| 2005-2-1 | Deposition Controller | A cleanroom user reported a problem with the power controller. Something
was causing the cut back light to illuminate. A flake of metal was
discovered within the filament causing a slight short. If you have any
additional problems with the system please contact MiRC Staff. |
| 2005-12-6 | Cryo Pump Regeneration | A user reported a problem with the
cryopump over the weekend. The
regeneration was completed last night. The
crucible were all refilled. |
| 2005-12-19 | Information | The primary magnet for the e-beam gun
has been replaced. The required power for
each material is now higher than before.
Users can expect the power level for the
gold to reach about 35-40%. If any users
have a problem aligning the beam, please
report it immediately. We are still trying to
fine tune the system with the new magnet in
place. |
| 2005-12-1 | Electron Beam Focus | Several users have reported problems with
the power supply and the beam over the
last week. We have made a few
modifications on the system to resolve
these problems. A few more test runs need
to be made on the E-beam gun to make
sure the system is working properly.
Please remember that gold and aluminum
are in thick walled crucibles. The beam size
for these materials needs to be small. |
| 2005-11-9 | Calibration | The calibration for the Tungsten filled
crucible will be completed tomorrow
morning. Once the calibration is finished,
tungsten will be available for evaporation in
the E-beam 1. |
| 2005-10-4 | Information | The system was logged back up this
morning. A user reported a problem with
the e-beam position controller. The main
connection to the controller was not
secured. The system was logged back up
late this morning. |
| 2005-10-27 | Information | The heater on the e-beam has been
removed. If you need the heater on this
system, please contact Charlie. |
| 2005-10-26 | Information | A user reported that the level of Al in the
crucible was low. The crucible was refilled.
If any of the metals in the crucibles seem
low, please contact staff immediately.
|
| 2005-10-11 | Information | Please remember to check the levels of
each crucible before using them. We
discovered that the level of the chrome had
gotten down to about 20%. If the any of
the metals get this low, please notify staff
as soon as possible.
|
| 2005-1-7 | Information | The new CVC E-Beam Evaporator has been fully installed and can be found
next to the old E-Beam Evaporator and the SEM in the metallization bay.
Training sessions on this system can be expected to occur as quickly as
next week.
The Old E-Beam Evaporator has had all its metals refilled today and is
ready for use. If any user experiences any problems involving this
system please contact MiRC Staff. |
| 2005-1-6 | Information | A user reported a problem with the power supply. One of the breakers
tripped on the system. If you find a sign on qny equipment stating a
problem, please do not attempt to use the system. |
| 2005-1-28 | Please let us know if you notice any pressure fluctuations during
evaporation. Don't forget to list details such as initial processing
pressure and deposition material. |
| 2005-1-25 | A cleanroom user reported that the process pressure has been fluctuating.
We will be scheduling time to leak check the system for later this week. |
| 2005-1-24 | Note: the cleanroom staff will be performing a leak check on this system
first thing tomorrow morning. Expect minimal downtime for this system. |
| 2005-1-18 | Information | A cleanroom user reported that the cut back light was coming on preventing
them from using the high vac lamp and thus shutting down the system. Upon
investigation a small short was detected inside the filament causing the
system to arc. The system is now working.
The metals for the CVC E-beam were refilled. |
| 2005-1-13 | Information | A user reported a problem with the Al crucible having a small crack in
it. The crucible has been replaced with a thick walled crucible. Please
narrow the beam when using Al. |
| 2005-1-11 | Information | CVC: A cleanroom user reported that the crucible selector was not
aligning properly. After minor tweaking the selector is once again
working as it should. Reminder though to E-Beam users to check to make
sure the crucible selector is working before they pump down the chamber.
NEW: Instructions for the newly converted E-Beam have been posted online
for users to view. If you wish to learn how to use this machine please
take a look at these instructions, and expect training to take place
starting sometime this week. |
| 2004-12-6 | Cryo Pump Regeneration | The cryo pump had crashed over the weekend. The regeneration will be
completed later this evening; afterwards, we will conduct a test run to
check the system's performance. We will send out an e-mail when the E-
beam is back up for use. |
| 2004-12-17 | A cleanroom user reported a problem with the pump down time. We ran
several tests, and the system went down to 1.0 E-6 in 40 minutes. If you
experience any pump down problems, please report them to a staff member. |
| 2004-12-15 | Information | Reminder: The maximum deposition rate for aluminum is 4 A/s. We have
added an extra end step to the aluminum recipe; now, there is an
additional 5 minute ramp down time. After this ramp down step, you will
still need to wait until the crucible has stopped glowing completely
before venting the system. |
| 2004-12-10 | Reminder: Please check the metal level in the crucible before you begin
using this system. |
| 2004-12-1 | Electron Beam Focus | We have made some adjustments to the system so that now the beam is more
focused. If you notice any problems with the beam, please notify Charlie
Suh. |
| 2004-11-9 | Vacuum Poor | We are still experiencing issues with slow pump down time on the E-beam.
We have leak checked the system and performed test runs. We will continue
to address this issue, and keep users posted on the status of the E-beam. |
| 2004-11-8 | Cryo Pump Regeneration | The cryo pump was replaced this morning, and the replacement pump was
regenerated today. We have observed a large build up of carbon inside the
chamber. The carbon is from users hitting the crucibles with the electron
beam. If you have any questions at all about whether or not you are
running the system correctly, do not hesitate to ask a staff member. The
machine will be down tomorrow until we can complete a mechanical clean
inside the chamber. |
| 2004-11-5 | Miscellaneous | Reminder: no cleanroom user is allowed to change out the materials in the
E-beam. Also, no one is allowed to change any of the deposition parameters.
Anyone who does so will be suspended from the machine. If you would like
to change the deposition rate, please contact a staff member. If you have
any questions regarding these policies, please contact Gary.
The E-beam will be down Monday morning so that we can change out the cryo
pump. We will let users konw when the E-beam is back up for use. |
| 2004-11-4 | Reminder | No cleanroom user is allowed to change out the materials in the E-beam.
Also, no one is allowed to change any of the deposition parameters.
Anyone who does so will be suspended from the machine. If you would like
to change the deposition rate, please contact a staff member. If you have
any questions regarding these policies, please contact Gary. |
| 2004-11-3 | Reminder | Today, another user attempted to re-fill the metal in a crucible.
Cleanroom users are not allowed to re-fill the materials crucibles
themselves. Always check the level of the metal before using this machine.
If you notice that the metal is running low, contact a cleanroom staff
member. Do not try to replenish the metals yourself. |
| 2004-11-29 | Crucible Refilled | Today, the crucibles were re-filled. If you notice that any of the metal
levels are getting low, please contact Charlie Suh. |
| 2004-11-22 | Crucible Refilled | The materials have all been replenished in the E-beam. If you notice that
a crucible level is getting low, please report it to an MiRC cleanroom
staff member. |
| 2004-11-2 | Reminder | Reminder: Cleanroom users are no longer permitted to change out the
material crucibles on their own. Normally, the following metals are
available in the E-beam:
Slot 1: Titanium
Slot 2: Chromium
Slot 3: Gold
Slot 4: Nickel
Slot 5: Aluminum
Slot 6: Copper
If you would like to use any other material in the E-beam, you will need
to contact a staff member. You will only be able to use other materials
when a staff member is present at the MiRC: between 8AM and 7PM. If you
have any questions, please contact a cleanroom staff member. |
| 2004-11-19 | Reminder | Reminder: Don't forget to check the material level in the crucible before
you begin your process. If you notice that the metal is getting low,
please contact a staff member. |
| 2004-11-18 | Miscellaneous | A cleanroom user reported that the system will pump down much faster
now. If you notice any issues with the E-beam, please contact Charlie
Suh. |
| 2004-11-15 | Cryo Pump Regeneration | Last night, a cleanroom user reported that the cryo pump had failed. The
regeneration process was completed this morning, and the E-beam has been
marked back up. If you observe a longer than normal pump down time,
please notify an MiRC cleanroom staff member. |
| 2004-11-12 | Information | We have finally located the source of the leak in the E-beam. The system
will be logged back up later tonight. If you ever observe any pumping
issues with this system, please contact a staff member. |
| 2004-11-11 | Vacuum Leak | The regeneration process was completed last night. Today, we leak checked
the system and tried to isolate the source of the pump down problem. We
have changed out the compressor, and are currently running some more
tests on the system. We will keep users posted on the E-beam's status. |
| 2004-11-10 | Cryo Pump Regeneration | We have changed out the cryo pump again, and the system is currently in
the regeneration process. We will send out an e-mail later tonight or
tomorrow updating users on the E-beam's status. |
| 2004-11-1 | Information | The cleanroom staff found that a cleanroom user had left the palladium
crucible in Slot 1 of the E-beam. Another cleanroom user mistakenly
assumed the crucible contained titanium, and since the metal level was
low, attempted to re-fill it himself, thus coating the palladium with a
titanium layer. Please be reminded that cleanroom users are not permitted
to re-fill crucibles themselves. If a metal needs to be replenished,
please contact a cleanroom staff member. Because of this incident,
cleanroom users will also not be allowed to swap out crucibles
themselves. If you would like to use a metal that is not currently in the
E-beam, you will need to contact a staff member. This also means that you
will only be able to use metals not normally found in the machine on
weekdays, Monday - Friday, from 8AM until 7PM. |
| 2004-10-28 | Shutter | The automatic shutter control on the E-beam evaporator has been fixed.
We believe that this will no longer present a problem. Any further
problems with this equipment should be directed to cleanroom staff. |
| 2004-10-25 | Cryo Pump Regeneration | A cleanroom user reported that the E-beam would not function properly. We
examined the system, and found that the cryo pump had crashed. We are
currently performing a regeneration process; the E-beam will be available
later this evening.
Several users have reported problematic pump down times. We are in the
process of resolving this issue. We will run test runs on the system later
tonight to see if there is any improvement. |
| 2004-10-21 | Information | We have changed out the emitter on the E-beam. The system is back up for
use now. Please notify a cleanroom staff member if you have any issues
while using this equipment. |
| 2004-10-20 | Miscellaneous | Reminder: No cleanroom users are allowed to change any power settings
without first contacting an MiRC cleanroom staff member. Changing
equipment settings is Violation #21 of the MiRC Cleanroom Policy
(http://grover.mirc.gatech.edu/userservices/cleanroompolicy.shtml).
Also, the gold crucible was replenished today. |
| 2004-10-19 | Miscellaneous | A cleanroom user reported that the crystal monitor holder was missing.
Upon inspection, we found that it had fallen into the bottom of the
chamber. When you change out the gold sensor, please make sure that the
holder is fully secured when you put it back into the system. If you have
any other issues with this system, please contact an MiRC staff member. |
| 2004-10-12 | Cryo Pump Regeneration | Last night, the cryo pump regeneration failed due to a problem with the
high vac valve. Today, we leak checked the system, and restarted the cryo
pump regeneration. The regeneration will be done early this evening. We
will send out an e-mail when the system is back up for use. |
| 2004-10-11 | Cryo Pump Regeneration | The mirror in the E-beam was damaged inside the system. The glass
fragments caused the high vac valve to malfunction, which in turn caused
the cryo pump to crash. We are currently regenerating the system. In the
future, please report any broken mirrors immediately to the cleanroom
staff. The E-beam will be back up tomorrow once the regeneration has been
completed. |
| 2000-4-3 | Crucible Pocket Alignment | Earlier today we found the the crucibles were out of alignment and that this was causing the electron beam to hit the crucible during a users run. We have realigned the crucible tray. If you find the crucibles out of alignment, please report it immediately. |
| 2000-3-30 | Crucible Pocket Alignment | A user reported that the crucible pockets were misaligned. We also found that the protective film for the viewport had become loose. We realigned the crucible pockets and fixed the film. |
| 2000-3-30 | Vacuum Poor | The e-beam's poor pumping was caused by low helium pressure in the cryo compressor. We have replaced the compressor. The e-beam is pumping very well now. After pumping overnight it had reached 3.0 x 10^-8 torr. |
| 2000-3-3 | Miscellaneous | We are currently installing an access control card reader on this system. We expect to have it installed by the time the cleanroom reopens on the 13th. |
| 2000-3-29 | Cryo Pump Regeneration | We found that the cryo pump compressor helium pressure was low. This is probably the cause of the poor pumping that we have been experiencing lately. We are still waiting for the cryo pump to cool down. |
| 2000-3-22 | Cryo Pump Regeneration | The e-beam cryo pump was regenerated last night. This has fixed the poor pumping performance we were experiencing earlier in the week. |
| 2000-3-21 | Vacuum Poor | The e-beam is experiencing vacuum problems. We will be regenerating the cryo pump tonight. Hopefully this will correct the problem. |
| 2000-3-20 | Deposition Controller | The deposition controller experienced a crystal failure error in the middle of a deposition. We have replaced the sensor crystal. |
| 2000-3-14 | Electron Beam Power Supply | A user reported that the cut back light would not go off on the electron beam power supply. We determined that the power supply had been shorted out by a metal flake. We removed the metal flake. The system is working now. |
| 2000-3-10 | Cryo Pump Regeneration | We performed a long purge on the cryo pump and restarted it. |
| 2000-3-1 | Crucible Pocket Alignment | The crucible rotation mecahism became loose preventing the crucible pockets from rotating properly. We have realigned the turntable and tightened the system. |
| 2000-2-9 | Miscellaneous | The machine shop has finished refinishing the high vacuum valve housing. We have reinstalled the valve housing and cryo pump. The e-beam gun was removed today to be rebuilt. |
| 2000-2-8 | Miscellaneous | We are continuing to work on the high vacuum valve. |
| 2000-2-7 | Miscellaneous | We have removed the hi-vac valve from the evaporator. The valve has been sent to the GTRI machine shop to be refinished. |
| 2000-2-4 | Vacuum Leak | The high vacuum valve in the e-beam evaporator was SERIOUSLY damaged by chrome pellets that were dropped onto the valve. This is a very difficult problem to fix. We will have to entirely remove the cryo pump and high vacuum valve assembly (two big parts) from the system. We do not expect to have the evaporator working any earlier than late next week. |
| 2000-2-3 | Cryo Pump Regeneration | The fuse for the e-beam control circuitry blew earlier today. We have replaced the fuse. The evaporator was off long enough to allow the cryo pump to lose vacuum. We are currently regenerating the pump and expect it to be available tomorrow morning. |
| 2000-2-28 | Electron Beam Focus | Several test runs were made today to adjust the focus on the E-beam. The beam is now focused. |
| 2000-2-25 | Deposition Controller | The problem with aluminum has been resolved. We have adjusted the deposition controller to correct the problem. |
| 2000-2-24 | Electron Beam Power Supply | Several users have reported problems with the aluminum splattering out of the crucible during deposition. We are trying to find out what is wrong. |
| 2000-2-22 | Crucible Pocket Alignment | The crucible pockets were out of alignment. We have realigned the crucible turntable. Please check to be certain that the pockets are aligned properly before starting your run. If the crucibles are not centered serious damage can occur. Contact MiRC staff if the pockets are not aligned correctly. |
| 2000-2-18 | Crucible Refilled | We have finished refilling all of the metal crucibles, including the nickel and platinum crucibles. |
| 2000-2-17 | Electron Beam Power Supply | A user reported that the "cut back" light on the power supply was flashing. We determined that the electron emitter leads were shorted in the back of the chamber. This problem has been corrected and the e-beam is now working properly. All metal crucibles will be filled completely later today. |
| 2000-2-16 | Miscellaneous | The e-beam gun has been reinstalled and the crucibles have been replaced and refilled. The e-beam is now operational. |
| 2000-2-15 | Miscellaneous | The system is back up now. The valve and e-beam gun have been repaired. We are currently refilling the crucible pockets. If you are not comfortable operating the e-beam, please ask for assistance before you break it. |
| 2000-2-14 | Miscellaneous | The e-beam remains down due to a problem with the e-beam gun. In addition, one of the thermocouple pressure gauges was damaged when the high vacuum valce was removed and must be replaced for proper system operation. We expect to have a replacement thermocouple Wednesday. |
| 2000-2-11 | Miscellaneous | A user inadvertantly turned on the cooling water pump, causing water to enter the cryo pump. We have removed and drained the pump and will be purging it with nitrogen overnight. We hope to have the e-beam operational by early next week. |
| 2000-2-11 | Miscellaneous | The high vacuum valve has been replaced. However, the electron gun was rebuilt and did not fucntion properly afterwards. We will be investigating this problem further on Monday. |
| 2000-2-1 | Crucible Refilled | A new chrome crucible has been installed. We ran several successful test runs. |
| 2000-1-7 | Crucible Refilled | The crucible pockets have been refilled. Once again, we would like to remind all e-beam users to let the materials cool for several minutes before venting the chamber. |
| 2000-1-6 | Crucible Refilled | The titanium in the e-beam has been destroyed by a user who vented the chamber without allowing the metal to cool. It is extremely important to allow the metal to cool for at least several minutes after the deposition and before venting the system. We have replaced the titanium. Most of the metal crucibles in the e-beam need to be refilled. We will be refilling them tomorrow morning. |
| 2000-1-25 | Deposition Controller | A user reported an extremely high deposition rate while operating the evaporator. We tested the evaporator and experienced no problems. |
| 2000-1-21 | Test Run | A user reported an inconsistent deposition rate while evaporating nickel. We ran a test run using nickel and did not experience any problems. |
| 2000-1-19 | Electron Beam Power Supply | A user reported erratic beam movement while operating the evaporator. We have run several test runs and it appears that the system is running properly. |
| 2000-1-11 | Test Run | We made a test run of the E-beam evaporator using the equipment procedures. We did not experience any major problems. |
| 1999-9-9 | Information | The ion gauge on the system has been modified. It is no longer necessary to turn the power on and off when venting or pumping the system. It is linked to the high vacuum valve and will turn on approximately 15 seconds after the high vacuum valve opens. It will turn off immediately as the high vacuum valve closes. Note that only the tube turns on and off. The display will continue to show a "10". The tube is on when a small LED located just to the left of the "10" lights. |
| 1999-9-20 | Shutter | A cleanroom user reported a hissing sound. We later discovered that the valve controlling the shutter was leaking. We replaced the valve and performed several test runs. The system is now functioning properly. |
| 1999-7-27 | Crucible Refilled | The aluminum crucible has been replaced and refilled. |
| 1999-7-22 | Information | The e-beam power supply has been moved into the utility chase to increase lab space. This should have little effect on lab users. |
| 1999-6-24 | Information | Several more tests need to be run on the Lead. The tooling still needs to be adjusted for the proper deposition rate. An accurate measurement was difficult to obtain. Therefore, a layer of Titanium will have to be put down before the Lead. Further test runs will be made tomorrow. |
| 1999-6-23 | Information | A cleanroom user requested that the MiRC staff set up the CVC E-beam Evaporator to deposit Lead. The metal was properly melted down to specifications. The IC5 controller was set up to run lead. We will be fine tuning the deposition tooling factor in the near future. The gears that rotate the carousel were also reported to be misaligned. The problem has been remedied. |
| 1999-5-5 | Reminder | Reminder: let the aluminum crucible cool completely before venting the chamber. Venting the chamber early causes the crucible to crack and split. |
| 1999-5-26 | Cooling Water | A cleanroom user reported a water interlock alarm. We replaced the water filter to increase water flow. Please remember to make sure that the crucibles are full of metal before using the e-beam. |
| 1999-5-20 | Crucible Pocket Alignment | Cleanroom user reported that the cruciable was misalligned. The Crucible was realigned and some aluminum was melted in the respected crucible. Test runs were made and the Evaporator is fully operational. |
| 1999-5-19 | Crucible Pocket Alignment | Cleanroom User reported that crucible pockets were misaligned. Realigned the crucible pockets and ran several test runs. System is now operational. |
| 1999-5-17 | Cryo Pump Regeneration | The system remains down while the cryogenic pump cools down. Any problems should be reported to the technical staff immediately. |
| 1999-4-27 | Crucible Pocket Alignment | Cleanroom user reported that the crucible pockets were misaligned. Realigned the crucible pockets, test runs were made and the machine is now operational. |
| 1999-4-23 | Deposition Controller | The aluminum crucible has been replaced after the original crucible exploded during a run. The crucible exploded because of overheating which had initially caused the crucible to crack in several places. The overheating occurred because a user had modified the material parameters in the IC5 deposition controller. Users are not permitted to modify any of the material parameters such as power levels and tooling factors. Users may only modify deposition rate and deposition thickness which are located in the Process Parameters section of the IC5. |
| 1999-4-2 | Electron Beam Power Supply | The system was experiencing "AIR/CAB" interlock problems. A replacement part was installed on Thursday. We have run several test runs without problems. Users: If the crucible metals are running low, please add more metal to the crucibles. |
| 1999-4-14 | Crucible Pocket Alignment | We realigned the e-beam evaporator crucibles. Please make sure the metals are full before performing your run. Please pay attention to the metal labels on the evaporator. We will be temporarily replacing the titanium with nickel. |
| 1999-3-9 | Crucible Pocket Alignment | We adjusted the alignment of the crucible pockets. We trained a user on the use of the equipment. We obtained satisfactory results. |
| 1999-3-4 | Substrate Holder | During the course of depositions, several layers of metal have been deposited on the circular ring that holds the square substrate holder. We sandblasted the circular holder and now all of the unnecessary layers have been removed. |
| 1999-3-2 | Test Run | We performed several test runs depositing Titanium and Chrome. We obtained satisfactory results. |
| 1999-3-17 | Electron Beam Power Supply | A user reported that the e-beam evaporator power supply high voltage would not come on. We determined that a loose metal flake was shorting out the filament electrodes. |
| 1999-3-16 | Crucible Pocket Alignment | We checked the crucible alignment on the e-beam evaporator. We are working on implementing a permanent solution to the repeated alignment problems we have been experiencing. |
| 1999-3-15 | Vacuum Pump | The Evaporator was temporarily down today. The oil in the mechanical pump was changed. The pump was flushed twice and then filled with new oil. The Evaporator is now fully fucntional and ready to use
. |
| 1999-3-12 | Deposition Controller | A user was complaining yesterday evening that the Nickel metal was spraying out of the crucible during evaporation. To solve this problem, we increased both of the rise and soak times. We also increased the power in the process. Also, when you are evaporation Nickel, increase the amplitude of the beam during the initial rise and soak times. This will decrease the possibility of any sparks. |
| 1999-3-11 | Deposition Controller | A user complained that the nickel was spraying out of the crucible when he tried to evaporate it. We will be looking at the process and trying to find the cause of the problem tomorrow. |
| 1999-3-1 | Crucible Refilled | We added and melted gold metal in the respective crucible. We also continued to adjust tooling factors in the system. |
| 1999-2-9 | Information | Replaced nickel crucible with platinum. |
| 1999-2-8 | Information | The Platinum crucible will be permanently installed in the E-beam. The
system was inspected and functions properly. |
| 1999-2-5 | Electron Beam Power Supply | The Hi Voltage on the power supply would not come on. We reset a switch and the system is functional. |
| 1999-2-4 | Test Run | We trained a user on the equipment. The test runs yielded satisfactory
results. |
| 1999-2-25 | Crucible Refilled | We melted some more gold down. We are continuing to recalibrate the tooling factors for each of the materials. We also trained a new user. |
| 1999-2-24 | Calibration | We continued to adjust the tooling factors. The tooling factors for the Titanium are complete. We performed test runs using Chrome. We obtained satisfactory results. We also deposited Aluminum on substrate holders for the RIE. |
| 1999-2-24 | Crucible Refilled | More gold was added to the E-beam gold crucible. We recommend that all users make sure that the crucible is pretty full before evaporating. More gold will be added tomorrow. |
| 1999-2-23 | Deposition Controller | We are continuing to record some of the settings on the deposition monitor so that we will have a copy if they are lost. We are also continuing the process of adjusting all of the tooling factors to increase the accuracy of the deposition thicknesses. We trained a user on the equipment. Also, the crucible pockets were misaligned. We are in the process of a more permanent repair to this problem. In addition, a cleanroom user accidentally destroyed the gold crucible by not properly aligning the beam before starting the deposition. Always remember to reduce the amplitude to two or three bars and move the beam position to the center of the position display before pressing start on the deposition controller. Then watch the beam through the sight glass on the front of the chamber as the beam power is increasing and adjust the beam position and amplitude as necessary. If you see an extremely bright spot, that is usually an indication that the beam is hitting the crucible. |
| 1999-2-22 | Cryo Pump Regeneration | The e-beam cryo-pump was regenerated over the weekend. Hopefully this will increase the pumping speed. We also recorded some of the settings on the deposition monitor so that we will have a copy if they are lost. We are in the process of adjusting all of the tooling factors to increase the accuracy of the deposition thicknesses. |
| 1999-2-19 | Crucible Pocket Alignment | We completed the tooling adjustments for the Silver process. The sensor reads the accurate thickness deposited. The gears on the crucible alignment pockets were replaced. |
| 1999-2-18 | Information | The platinum crucible is in the drybox near the evaporator. If you need to use platinum, you may replace the silver in the e-beam with platinum and put the silver in the drybox. It is your responsibility to make sure that the correct metal is installed. We ran several silver processes and are continuing to adjust the tooling to the Silver program. The crucible pockets were misaligned. We adjusted the set screw to the gears. We will be replacing these gears tomorrow. |
| 1999-2-16 | Crucible Pocket Alignment | The crucible pocket was misaligned. We adjusted the gears for a smoother alignment of the crucibles. We performed test runs depositing Silver metal. Since this is the first time that Silver metal has been used in the E-beam, we discovered that we need to adjust the toolinng in order for the program controller to correctly display depositions. We will be making these adjustments tomorrow morning. |
| 1999-2-15 | Information | We used the multi-sample dome to deposit Aluminum on several 2" wafers for a class. The process yielded satisfactory results. We also replaced the crucible containing platinum with a new silver crucible. We performed several runs to melt down new silver in the crucible and set up the deposition controller for silver depositions. |
| 1999-2-12 | Test Run | We performed several test runs in order to obtain deposition rates for the multi-sample dome. We will be using the dome to deposit Aluminum for a class. |
| 1999-2-11 | Test Run | We ran several test runs checking the z-ratio of the sample holder dome. E-beam users: Please remember to enter each of your runs in the log book. |
| 1999-2-10 | Deposition Controller | The deposition controller locked up. We reset the controller. |
| 1999-11-9 | Information | The system is still down. We will notify users of the status tomorrow. |
| 1999-11-5 | Electron Beam Power Supply | Cleanroom user reported high voltage power fluctuating. We are currently working on resolving this problem. |
| 1999-11-11 | Information | Power supply for the E-beam will not be in until Monday. We will continue to update you on the progress with this machine. |
| 1999-10-4 | Crucible Pocket Alignment | A cleanroom user reported that the crucible carousel was not aligned. It was determined that the gears and coupling were stripped. Both items have been replaced. An improved solution is being sought.
A cleanroom user reported that the ion gauge was not lighting. The filament had burned out. The tube has been replaced.
Please do not turn off the deposition controller or the ion gauge controller after your run. |
| 1999-10-28 | Vacuum Poor | Cleanroom user reported that the system was having a high base pressure. Technical staff will be looking into the problem on Friday. |
| 1999-1-8 | Vacuum Poor | We have traced the leak to the roughing valve and are working on replacing the valve. |
| 1999-1-7 | Crucible Pocket Alignment | Realigned crucible pockets. |
| 1999-1-7 | Vacuum Poor | The system will only rough down to about 500 millitorr. The pump is okay, so there may be a leak somewhere. We did not have time today to investigate this further. |
| 1999-1-6 | Crucible Pocket Alignment | The crucible pockets were misaligned. They have since been realigned and
the system is running properly. |
| 1999-1-26 | Crucible Pocket Alignment | Realigned crucible pockets. Gears has slipped. Reconfigured material list. If anyone changes a material, you are responsible from modifying the material list to indicate the change. |
| 1999-1-21 | Electron Beam Focus | The problem with the beam width has been solved. We had a problem with the vacuum and interlocks, but we resolved these problems. |
| 1999-1-20 | Electron Beam Focus | There is a problem with the width of the electron beam. We have adjusted the rods that control the beam aim and have reduced the width some. We will work on this problem more Thursday. |
| 1999-1-19 | Crucible Pocket Alignment | Adjusted crucible alignment. Tightened bevel gears to reduce slippage. Replaced set screw in one gear. |
| 1999-1-14 | Crucible Pocket Alignment | We realigned the crucible pockets. A user error caused an additional
problem with the shutter. That situation has been rectified. A new
shutter shaft was machined for the evaporator. It has since been
installed, and the system is now operable. |
| 1999-1-11 | Vacuum Poor | The roughing valve has been rebuilt and replaced. The system base pressure is good now. |