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Equipment log for the AET RTP
| 2009-7-2 | Chamber | Forming gas bottle changed. |
| 2009-6-24 | Chamber | Users are reminded to please check the status of the forming gas bottle
and when they are planning on doing a large number of runs or simply long
ones, they need to tell the staff at least one day, preferably two,
beforehand so that a new bottle of forming gas can be brought up.
Requests to change the bottle at the end of or outside of normal working
hours do not enable the staff to ensure that these kinds of issues get
resolved in a timely fashion. Thank you.
|
| 2009-6-23 | Chamber | Users are reminded to please check the status of the forming gas bottle and when they are planning on doing a large number of runs or simply long ones, they need to tell the staff at least one day, preferably two, beforehand so that a new bottle of forming gas can be brought up. Requests to change the bottle at the end of or outside of normal working hours do not enable the staff to ensure that these kinds of issues get resolved in a timely fashion. Thank you. |
| 2009-6-18 | Chamber | The water flow issue has been resolved, and the control issues have also been solved. |
| 2009-6-15 | Miscellaneous | The tool is not operating properly. The problem will be further investigated tomorrow morning. |
| 2009-6-10 | Chamber | If the chamber will not open, please contact the staff as the computer may need to be rebooted and users may not do this. |
| 2009-5-8 | Chamber | A user complained about low forming gas levels. The forming gas has been replaced. |
| 2009-4-28 | Chamber | The tool was marked down because of the power issue. It will be investigated in the morning. |
| 2009-4-1 | Chamber | Please remember to turn the forming gas off at the end of your run. |
| 2009-3-31 | Miscellaneous | Please remember to close the forming gas bottle when you are done. Also promptly report low forming gas levels to the staff. |
| 2009-3-27 | Chamber | A user reported that the temperature spiked. This issue will be further investigated Monday. |
| 2009-3-26 | Chamber | asdfd |
| 2009-11-10 | Chamber | The forming gas bottle has been changed. |
| 2009-10-26 | Chamber | Tool logged back up; was marked down because of error. |
| 2009-10-22 | Chamber | Thermocouple is broken. |
| 2009-10-21 | Chamber | The thermocouple has failed. |
| 2007-2-6 | The RTP will be down until tomorrow. |
| 2006-9-28 | The forming gas bottle has been changed out. Reminder: the three gasses
in the system are oxygen, nitrogen, and forming gas (10% hydrogen bal
nitrogen) |
| 2006-4-8 | Miscellaneous | All authorized users must now access the
machine using the access controller. The
controller is located on the left side of the
bay when you enter.
|
| 2006-3-29 | Chamber | A user reported a problem with the
chamber door. The door was locked.
Please remember to report any similar
problems. Please do not try to resolve it
yourself. |
| 2006-3-21 | Miscellaneous | A user reported a problem with the O2
flow. It turns out that the bottle was not
turned on. If any users have any problems
with gas flow, please contact staff to get
help. Please do not try to turn the bottle on
yourself. |
| 2006-3-10 | Chamber | Several users reported problems with
running the system at temperatures higher
than 500C. We have recalibrated the
system. It will not ramp up to the proper
temperature. |
| 2006-10-13 | If users have problems with the system, do not just reboot the system. A
user reported a problem with the lamps - they would not activate during
the recipe. We discovered the connection to the lamps was disconnected -
we reconnected it and the lamps are now working. |
| 2006-10-11 | Miscellaneous | A user reported a problem with the lamps not coming on. Please do not
reset the system. The problem was a computer connection, but we have
fixed it. |
| 2006-1-26 | The move to the new area in the
metallization bay is complete. The utilities
to the system have been hooked up. A
successful test run was completed late this
afternoon. Users may now use the system. |
| 2005-8-25 | Test Run | The RTP operating temperature has been
calibrated. |
| 2005-6-7 | Today, the graphite sample holder was reported missing. If any user
accidentally removed the graphite sample holder from its normal resting
location please return it to the RTP or Charlie Suh. |
| 2005-6-15 | Miscellaneous | Please remember that the RTP is now hooked up to the access controller
on the wall near the entrance to the bay. If you are a current RTP
users, but do not have access, please contact Charlie. |
| 2005-5-30 | This system once again is connected to an access control unit. Be sure
you are signing in to use this equipment as now the monitor will not turn
on if you don't. |
| 2005-5-26 | The RTP is again hooked up to an access controller which is located on
the left side of the entrance to the bay. Please sign in when using this
system now. |
| 2005-4-8 | Today, a cleanroom user reported that the system overheated during a
temperature calibration. The system will be recalibrated first thing
Monday morning. Until then, if you wish to run the RTP please do not run
a recipe past 900 degrees C. |
| 2005-4-28 | Once again, remember if you are using a recipe that requires you to take
the system to 800 degrees C you have to run it during normal business
hours of 8-5. |
| 2005-4-27 | Today, a cleanroom user had a wafer break while running the RTP. We want
to remind all users that run a recipe above 800C need to make sure that
they do this during standard business hours of 8-5. |
| 2005-4-20 | The replacement lamps are scheduled to be installed tomorrow afternoon.
Once they are installed the system will undergo extensive testing and
temperature calibrations. Upon completion of these calibrations, the
system will be back up by 6pm tomorrow. |
| 2005-4-18 | We are still awaiting the arrival of the replacement lamps for the RTP.
Until that time the system will remain logged down. |
| 2005-4-15 | Once again, this system will be logged down as we await the arrival of
the new replacement lamps. |
| 2005-4-13 | We are currently in the process of replacing the lamps that have gone
bad. We are expecting the new lamps to be here next week, until then the
RTP will be machine down. |
| 2005-4-12 | In response to the false callibrations that occured on the system,
further investigations were made. We found that some of the lamps had
gone bad on the system. Currently we are in the process of replacing
these lamps. |
| 2005-4-11 | Due to a failed callibration that occured last week, the RTP is currently
undergoing additional temperature tests and callibrations. |
| 2005-3-31 | A cleanroom user reported a temperature setpoint problem. Users should
expect there to be a + or - of at least 1-2% error between the setpoint
and actual temperature. In response to this reported problem the heaters
did undergo a temperature recalibration. Upon testing staff found that
the actual reading was with 1% error of its setpoint. |
| 2005-3-24 | Just like both E-beam systems the RTP will be brought down tomorrow from
8am to 12pm. |
| 2005-3-23 | Remember, if you need any recipes to be programmed into the RTP please
contact Charlie Suh, and please remember to provide ample time for him to
respond to your request. |
| 2005-3-16 | A cleanroom user reported a problem that occured yesterday. Staff made a
temperature calibration and made test runs to verify the status of the
system. The system was restored to standard operating conditions. |
| 2005-2-23 | Once again, if you need any recipes programed in the RTP please let
Charlie Suh know 48 hours in advance. The maximum available temperature
is 1300 degrees C and can only be run for 30 seconds. |
| 2005-2-15 | A cleanroom user reported that oil was leaking from the exhaust from the
RTP pump. The oil will be cleaned and monitored. This will not affect
your process, but users should be aware of it. |
| 2005-2-1 | Miscellaneous | Any users that need recipes programmed into the RTP will have to email
the main trainer your recipe, and allow 24 hours for the recipe to be
implemented into the system. |
| 2005-1-21 | If you would like to have a recipe added to the RTP, please e-mail the
recipe parameters to Charlie (charlie.suh@mirc.gatech.edu). Please allow
24 hours for the recipe to be entered into the system. |
| 2005-1-20 | Any user need to add anymore recipe to the system. Please let Charlie Suh
know.
cs176@mail.gatech.edu |
| 2004-11-17 | Temperature Control | A cleanroom user reported that the temperature controller needs to be re-
calibrated. Charlie Suh will look into this issue tomorrow. |
| 2000-4-3 | Temperature Control | We have recalibrated the temperatures to work better at low temperatures. A user is trying to run the system at 100 degrees. |
| 1999-6-21 | Test Run | We ran a test run on the RTP at 1000 degrees C. The system ran properly, and yielded satisfactory results. |
| 1999-5-7 | Cooling Water | The RTP has been taken off line until the cooling lines can be replaced. The thermocouple has also broken and will be replaced later in the week. |
| 1999-5-5 | Cooling Water | Yesterday a user was attempting a high temperature run. The high internal temperatures of the chamber caused several of the coolant lines to burst. One of the fittings was damaged, thus the machine remains unavailable. We are considering replacing all of the coolant lines with high-temperature Teflon tubing to prevent this type of problem from recurring. |
| 1999-5-26 | Cooling Water | The booster pump has been attached to the system. The cooling water temperature has fallen to acceptable levels. The system is ready for use. It's maximum temperature is currently 1100 degrees Celsius. It can be operated at an absolute maximum of 1200 degrees. See either Gary Spinner or Alex Carver if you require high temperature runs. |
| 1999-5-25 | Miscellaneous | Currently the system operates at a maximum temperature of 1000 degrees Celsius. An overheating problem in the cooling system remains. A booster pump has been ordered and will be installed on the systm later this week in an attempt to correct the cooling problem. |
| 1999-5-17 | Cooling Water | The system remains down until sufficient cooling water flow can be established through the system. |
| 1999-4-9 | Cooling Water | Late Wednesday afternoon, a user reported water leaking from the bottom of the RTP. We opened the RTP and determined that one of the cooling water tubes had been melted. We turned the water off and repaired the tube. We also performed a calibration run on the RTP. |
| 1999-4-5 | Miscellaneous | Currently, the valves in the RTP are not operating. This may be due to a problem encountered with the house compressed air system eariler today. The equipment is down pending a full diagnosis. |
| 1999-4-20 | Software | Early Monday morning, the system's computer crashed. It was restarted and there were no problems with the system. |
| 1999-3-9 | Temperature Control | The calibration program ramps up from 100 to 1200 degrees C in intervals of 100. The RTP runs each interval of 100 for 20 seconds. Then, it ramps up to the next interval. When the run time was extended from 20 seconds to 5 minutes, an error message appeared when 900 degrees was reached. When an actual recipe was run, the same error message appeared at 800 degrees C. The problem will be looked into as soon as possible. |
| 1999-3-12 | Test Run | We ran a test run on the RTP today. The RTP is working, but the door does not unlock itself at the end of vacuum runs. We are trying to find a workaround for a this problem. |
| 1999-3-10 | Temperature Control | The RTP is up and running. We have run several test runs and the temperature is consistent. We may need to replaced the overtemperature switch on the process chamber. It is acting somewhat inconsistant. We are still waiting for the spare chamber we have ordered to arrive. However, this should not affect most cleanroom users. The RTP can safely handle temperatures up to 1100 degrees C. Please do not exceed 1100 degrees. |
| 1999-3-1 | Test Run | The RTP has been calibrated and test runs have been made. The test runs have been successful. The RTP is now functional and ready to use. |
| 1999-2-9 | Chamber | The vendor that is making the replacement chamber for the RTP returned the existing chamber. We received it this morning and reinstalled it. We also purchased a replacement monitor to replace the one that had failed. We have installed the new monitor. |
| 1999-2-4 | Chamber | We removed the RTP chamber and shipped it to a manufacturer in order for
the manufacturer to get precise dimensions to purchase a new chamber. |
| 1999-2-16 | Chamber | The replacement tray for the RTP arrived today. We installed the tray and we will be running test runs Wednesday. |
| 1999-2-1 | Computer Hardware | The monitor is not functional. We will be replacing it. |
| 1999-11-5 | Temperature Control | Cleanroom user reported temperature not reached alarm. After serveral days of trouble shooting we rewired the lamp house assembly, replaced several thermal couples, recalibrated hardware pc boards, and recalibrated the system. The RTP is now fully operational. |
| 1999-10-28 | Temperature Control | Cleanroom users reported "temperature not being reached alarm". We replaced the solid state trigger device and recalibrated the system. The RTP is now fully operational. If you esperience any problems with the system, please contact MiRC technical staff. |
| 1999-1-21 | Chamber | The new substrate holder has been ordered and is expected to arrive next week. |
| 1999-1-15 | Chamber | We ran an additional test run and are working on ordering a new chamber and substrate holder. |
| 1999-1-14 | Chamber | The spare process chamber has been installed. Sketches including
dimensions and parameters of the chamber were drawn and sent to various
quartz companies for estimates on the purchase of a new chamber. The
substrate holder on the RTP needs to be installed. |
| 1999-1-13 | Chamber | The chamber imploded, and the substrate holder has been distroyed. We
will examine the situation further this week. The system is temporarily
down, but should be operable sometime next week. |
| 1999-1-11 | Temperature Control | We have had some problems controlling the RTP tempurature, at least at high temperatures. We will be examining this problem more closely tomorrow. |