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Equipment log for the Hitachi 3500H SEM
| 2009-7-6 | Information | The tool has had some small vacuum leaks eliminated and various maintenance issues addressed by the service engineer. It is expected that the tool will no longer burn out one filament a week. |
| 2009-7-22 | Information | A user reported a problem with the filament going out. The filament has been replaced. |
| 2009-7-20 | Information | the water filter was changed. The low water flow was causing certain problems with the system that have now been corrected.
|
| 2009-6-9 | Information | The issues regarding the filaments & the Noran system are currently being investigated. |
| 2009-6-8 | Information | The filament has been replaced. |
| 2009-6-24 | Information | The filament has been changed. |
| 2009-6-23 | Information | Filament has burned out. |
| 2009-6-2 | Information | The reason that filaments are burning out at a higher rate is being investigated. |
| 2009-6-15 | Information | The filament has been replaced. |
| 2009-6-10 | Information | The filament has been replaced. |
| 2009-5-29 | Information | The filament has been changed |
| 2009-5-27 | Information | Filament has burned out late in the day; will be fixed tomorrow. |
| 2009-10-1 | Information | Several users have reported extremely degraded image quality on the problem. The problem will be further investigated tomorrow. |
| 2007-8-30 | We are sorry to report that the service engineer was unable to make it
today. We hope he will be here to look at the equipment tomorrow. |
| 2007-8-22 | The filament has been replaced in the SEM. |
| 2007-6-21 | The Hitachi engineer was here on Wednesday. The gun housing has been
replaced and the alignment has been fixed. |
| 2007-5-3 | The filament has been repaired. If you have any trouble getting a picture
on the SEM please contact Charlie Suh. |
| 2007-4-6 | The SEM has been logged back up. The engineer said the alignment was off.
Users are reminded not to adjust the alignment themselves. |
| 2007-4-4 | Several users have reported problems with the SEM. We are aware of the
problems and will continue working on them. We expect the service engineer
to be in on Friday. |
| 2007-4-17 | The SEM is now up and running. If you notice any more problems, please let
a staff member know immediately. |
| 2007-3-7 | Information | The SEM has been logged back up. The
service engineer discovered cause of the
problem. Someone had activated a setting
on the Noran EDS that was causing the
image to shift. We have reset the software
on the EDS to correct this problem. |
| 2007-3-6 | A service engineer will be here in the morning and he will be doing a
maintenance check on the source of the interference that is effecting the
imaging. The machine will be done until the problem will be resolved. |
| 2007-3-26 | Information | A user reported a problem with the image
quality. Some adjustments were made
today, and the image quality has improved.
Please notify a staff member if you
experience any problems.
Important notice for Ernest Fullam Gold
Coater Users:
To facilitate the changeover from the Ernest
Fullam to the Hummer, training sessions are
being held every day for the Hummer
Sputtering System for the remainder of the
week starting tomorrow at 3:00pm and
4:00pm. Please email Nikky
(Nikky@gatech.edu) to let her know which
date and time you would like to attend. |
| 2007-2-23 | Information | The filament has not been replaced, but the filament assembly was cleaned
and reinstalled. The image quality has improved. |
| 2007-2-22 | Several users have reported intermittent image problems. The filament will
be changed out tomorrow in hopes that it will improve image quality. We
have also scheduled a service visit for next week. |
| 2007-11-14 | A new filament has been installed on the SEM and is now giving clearer
images. If you notice any problems, please let a staff member know. |
| 2007-10-11 | If you need to coat your sample in gold, please attend a training session
for the Hummer. Several training session have been created to make the
transition easier for you. |
| 2007-1-5 | Information | Problems were experienced with the water
flow meter today. The correct flow setting
has been set.
We conducted a few test runs and found
that the image quality is good. |
| 2007-1-4 | Information | A user reported a problem with the vacuum
chamber. Several test runs were made and
several users have used the system. The
vacuum is within specification. |
| 2007-1-29 | Information | The service engineer inspected the machine
today to determine the source of the
vacuum problem. We discovered that there
was some out gassing in the column. The
column will be cleaned by service engineer
within the next few days. |
| 2007-1-23 | Information | We have optimized the image quality that
can be achieved on the SEM. A user
reported poor quality. We are also
expecting the Hitachi engineer to
investigate the vacuum problem this week.
|
| 2007-1-16 | The broken filament has been changed and
the inner fittings cleaned. The machine has
been inspected and calibrated. |
| 2006-9-22 | The image quality has been improved. We have implemented a temporary fix
for the x-knob stage skip and should be reasonable to work with. We will
correct the problem entirely as soon as the part comes in. |
| 2006-9-21 | Information | The service technician is here, and he is working on the problem. As
soon as he is done and the machine is working, we will log the machine up
and send out an email. |
| 2006-9-20 | Information | This machine is down due to an issue with the stage. The service engineer
was here today to inspect the system. Part of the stage assembly was
damaged, and the new part will be here tomorrow. The service engineer
will install the new part into the stage assembly and will do a
calibration test run tomorrow morning to check image quality. |
| 2006-9-19 | A Service engineer will be here tomorrow to fix the SEM. |
| 2006-9-13 | A user reported a problem with the image
quality. We calibrated the tool this
morning. You should be able to obtain a
much clearer image now. |
| 2006-5-19 | Information | A trainer discovered a problem with the
SEM image quality after a check-off
session. The system needed to be
recalibrated and the filament position
needed to be adjusted. The calibration was
completed early this afternoon. |
| 2006-5-12 | Information | A user reported an imaging problem. A few
adjustments have been made to improve
the image quality. |
| 2006-4-8 | Information | A user reported a problem with the image
quality. We performed a basic cleaning on
some of the components. The system was
also calibrated. The image quality
improved, but we will still schedule some
time next week for the Hitachi Engineer to
come in and take a look. |
| 2006-4-24 | Information | A user reported a problem with the vacuum
in the chamber while adjusting the angle of
the sample. Please be sure to check the o-
ring seal for any debris that may cause
problems with the vacuum. |
| 2006-4-18 | Information | Two problems were reported over the
weekend on this system. There was a
pumpdown problem that was resolved this
morning. The imaging problem was resolve
late this afternoon. The system has been
logged back up.
We are planning to have some maintenance
done on the system on Monday. We expect
the system to be down all day until the
maintenance is completed. |
| 2006-3-6 | Information | Due to some extenuating circumstances,
the Hitachi Engineer was unable to make his
service visit today. We have rescheduled a
visit for later this week. In the mean time,
we suggest users who use the system this
week to make a record of any problems
with the image quality and submit them to
the Pettit Request page. |
| 2006-3-3 | Information | As we mentioned yesterday, we are
expecting a visit from the Hitachi Engineer
on Monday. He will take a look at
calibrating the measuring tool. |
| 2006-3-22 | Information | The system has been logged down due to a
problem with the filament. We are currently
consulting with the manufacturer to help
resolve this issue. |
| 2006-3-2 | Information | We have schedule a visit from the Hitachi
Service Engineer for Monday. He will be
doing a calibration on the measuring
software and image quality. |
| 2006-3-15 | Information | The Hitachi Service Engineer arrived this
morning to take a look at the calibration for
the measuring tool He stated that the tool
has an error of 2nm. The error is pretty
negligable. |
| 2006-3-13 | Information | This morning, the filament had burned out
during a check-off on the system. The
system was logged down until late this
afternoon. A new filament has been
installed. If any users have any imaging
problems, please report them right away. |
| 2006-3-10 | Information | A user reported a problem with the
vacuum. The vacuum was fluctuating due
to a poor seal on the door. The main door
o-ring needed to be set properly. |
| 2006-2-9 | Information | The service engineer completed the
schedule preventive maintenance early this
afternoon. The system was cleaned and
recalibrated. If there are any issues with
the image quality, please contact the staff. |
| 2006-2-8 | Information | The filament was changed this morning.
The images at high magnification were not
as good as expected. The SEM Service
Engineer will be here tomorrow at 11am for
a scheduled Preventive Maintenance. It is
very likely that the apeture in the collumn
will need to be replaced. |
| 2006-2-7 | Information | A user reported late in the afternoon that
the image had suddenly gone dark. The
system has been logged down. We will
check to see if the filament needs to be
replaced tomorrow morning. |
| 2006-12-4 | Information | This tool is still logged down due to problems with the pumpdown. The
service engineer will be back tomorrow to continue working on the system. |
| 2006-11-30 | The safety flow setter is leaking. We need to replace that part before
logging the machine back up. |
| 2006-11-3 | Information | We ran a calibration on the SEM today and improved the image quality. |
| 2006-11-2 | The x control and the counter have been repaired.
A user reported that the image quality needs to be improved; we will take
care of that this afternoon and tomorrow morning. |
| 2006-10-19 | Information | The image quality on the SEM has been
improved. The x axis knob was repaired
this afternoon. If any users still see the
image "jumping" please report it
immediately. |
| 2006-1-26 | Information | We expect another visit from the service
engineer next week. If you have any
issues with the system, please let the staff
know. We will address the problems to the
service engineer if we cannot resolve them. |
| 2005-9-26 | Information | A user reported that the filament had
burned out over the weekend. The filament
has been replaced, and the system was
calibrated this morning. |
| 2005-8-31 | Information | Service engineer finished installing a new
apeture fitting. We ran various test runs
using different voltage settings. The images
looked pretty good. Please give us any
feedback on how your images look. |
| 2005-8-25 | Information | A few small components were replaced in
the SEM column. The system was
recalibrated and optimized. Please let us
know if there is still a problem with the
image. |
| 2005-8-24 | Information | The service engineer was unable to come in
today. We expect him to arrive tomorrow
to take a look at the system. |
| 2005-8-22 | Information | A new mechancal pump was installed on
this system. A user reported that the image
quality of SEM was lower than expected.
We ran a few test runs and made some
adjustments to the system this afternoon.
The image did not improve. We will be
performing a mechanical clean tomorrow. |
| 2005-8-18 | Information | Please remember to close the software on
SEM after you finish pumping the system
down.
|
| 2005-8-17 | Information | A user reported that the filament had
burned out on the system. The filament has
been replaced and the system has been
calibrated. |
| 2005-7-12 | The calibration for the SEM is completed.
You can now view images up to 100k
magnification. Please take note that for
images at higher magnification, samples
must be mounted differently. Also, no
users may change the filament current. It
is currently set at the saturation point.
Increasing the current will not improve your
image, and it will unnecessarily reduce the
life of the filament.
|
| 2005-6-8 | Although it seems that the Hitachi SEM is missing something, users are
still able to operate the system as per usual. If you notice any
difference in pump down times or image quality please contact MiRC Staff. |
| 2005-6-3 | An SEM calibration was recently run, and the system is once again
functioning properly. |
| 2005-5-25 | Information | A user reported poor image quality in the SEM. A few calibration
adjustments have been made to the system. The image should improve for
all users. Please let us know if it does now. |
| 2005-5-12 | A calibration was performed today on the system. The image quality has
improved. If any users have any problems with the image quality, please
report it to staff immediately. |
| 2005-4-5 | Today, the Hitachi SEM was recalibrated and had its image settings
adjusted. If you use this system and notice any image problems please
contact MiRC staff immediately. |
| 2005-4-20 | The Hitachi Service Guy will be here next week to perform some routine
maintenance. The system will be logged down while he is working on the
system. |
| 2005-3-23 | If any SEM users come across any imaging issues please report these
changes or problems to MiRC Staff immediately. |
| 2005-2-4 | The service engineer arrived early this morning. They performed a
cleaning service for the filament collumn. The system has also be
recalibrated to optimize the image quality. |
| 2005-12-6 | Information | The service engineer arrived yesterday to
take a look at the system. A user reported
problems with the image. The engineer
found no image problems after he made his
test runs. |
| 2005-11-9 | Information | A few users have reported some problems
with the system. One of the problems was
an issue with the image drifting. Another
issue was with focusing problems when
tilting the sample. The Hitachi Service
Engineer is scheduled to arrive tomorrow.
If you have any other problems with the
system, please let us know while the
Engineer is here. |
| 2005-11-11 | Information | The service engineer arrived today to check
on the SEM system. A user reported a
problem with the image drifting. The same
user put their sample into the system, but
no drifting was seen. If any other users
experience this problem, please report it to
the staff. We are aware of a problem with
image vibration, but this only occurs at
magnifications higher thatn 50k. |
| 2005-10-6 | Information | The Hitachi Service Engineer performed a
service visit this afternoon. We were
having some issues with the measurement
calibration. The service engineer informed
us that the software on the system has a +/-
10% error. The system was within spec. |
| 2005-10-26 | Information | A user reported an imaging problem on the
SEM. The problem was caused by the
LutCopy software. The software had been
turned off. Please remember to leave this
the LutCopy software running at all times. |
| 2005-1-20 | The filament has been replaced and the beam has been aligned to its
original position. If you have any problem, please contact MiRC staff. |
| 2004-11-11 | Yesterday the filament was changed. The current image quality should be
of normal quality. Please notify a cleanroom staff member if you ever
receive poor images while using this system. |
| 2004-10-8 | Information | A service technician from Hitachi was at the Center today. He cleaned the
column and replaced the filament. After testing, we found that the image
quality is once again up to previous levels. If you have any problems
with poor image quality, please contact a cleanroom staff member. |
| 2004-10-21 | Information | The service engineer from Hitachi is here today, and is still working on
the SEM. We will send out an e-mail when the system is available again. |
| 2000-3-31 | Information | The SEM is now equipped with an access controller. You will need your Buzz card to use the SEM. |
| 2000-2-7 | Information | The SEM filament has been replaced. The SEM is working now. |
| 1999-11-9 | Information | Installation and training of staff is completed. In order to use this piece of equipment you must be checked out by either James Zhou or Kevin Martin. |
| 1999-11-5 | Information | the installation has been completed. For training please contact Dr. Zhou, james.zhou@mirc.gatech.edu |
| 1999-11-11 | Information | Installation and training of staff is completed. In order to use this piece of equipment you must be checked out by either James Zhou or Kevin Martin. |