Equipment log for the Astex ECR

2009-8-7	Information
The tool is tuning properly for most recipes. It is still generating microwave errors for SiO2 deposition. The recipe will be investigated Monday.
2009-4-28	Gas Supply
Power surge took the tool offline and it is off. It will be restarted & the status of the tool will be investigated in the morning.
2007-3-27
A new 100% Silane tank has been installed on the ECR.
2000-3-30	Substrate Clamp
While performing a test run today we found that the wafer was not being seated properly when it loaded into the chamber. We found that the tops of the pedistals that lift the wafer for loading and unloading have melted and become deformed. We will be contacting Astex for further assistance.
2000-2-22	Information
All new ECR users must contact William Kimes to be checked out using the system before they will be given access.
2000-2-18	Gas Supply
The ethylene cylinder, that we have been waiting for, arrived today.
2000-2-15	Gas Supply
We expect the ethylene to arrive by Friday.
2000-1-19	Miscellaneous
We discovered oil in the exhaust gas scrubber water. We are planning to drain and refill the scrubber to see if the oil returns.
2000-1-13	Information
Training for ECR users will occur in the near future. We will announce the training date.
2000-1-11	Information
We are in the process of setting up the exhaust gas scrubber for this system. The scrubber should be operational tomorrow. Training will be announced via email when we know when it will occur.