Microelectronics Research Center

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Equipment Mailing List
3600F PG-users@grover.mirc.gatech.edu
AET RTPrtp-users@grover.mirc.gatech.edu
ALD 1ald1-users@grover.mirc.gatech.edu
Astex ECRecr-users@grover.mirc.gatech.edu
Bioforce Nano eNablernanoenabler-users@grover.mirc.gatech.edu
Brunker MicrOTOFmicrotof-users@grover.mirc.gatech.edu
CEE 100CB Spinnercee_spinner-users@grover.mirc.gatech.edu
CEE 100CB Spinner -- Leftcee_spinner-users@grover.mirc.gatech.edu
CEE 100CB Spinner -- Rightcee_spinner-users@grover.mirc.gatech.edu
Chemical Safety Seminar - Rm 102Bsafetyseminar-users@grover.mirc.gatech.edu
CMOS Cleaning Stationcmosbench-users@grover.mirc.gatech.edu
Coyote PECVDcoyote-users@grover.mirc.gatech.edu
CVC DC Sputtererdcsputterer-users@grover.mirc.gatech.edu
CVC DC Sputterer 2dcsputterer2-users@grover.mirc.gatech.edu
CVC E-Beam Evaporatorebeam-users@grover.mirc.gatech.edu
CVC E-Beam Evaporator 2ebeam2-users@grover.mirc.gatech.edu
CVC E-Beam Filamentfilament-users@grover.mirc.gatech.edu
Dexon Fume Hood--Class 10class10bench-users@grover.mirc.gatech.edu
EBL CEE Spinnereblspinner-users@grover.mirc.gatech.edu
EBL Developer Stationebl-developer-users@grover.mirc.gatech.edu
Edwards Sputtereredwards-users@grover.mirc.gatech.edu
Ernest Fullam SputterCoatergoldcoater-users@grover.mirc.gatech.edu
EV620 Mask Alignerev620-users@grover.mirc.gatech.edu
FC Spinner Left-users@grover.mirc.gatech.edu
FEI Nova Nanolab 200 FIB/SEMnova-users@grover.mirc.gatech.edu
FEI Quanta 200 3D FIB/SEMquanta-users@grover.mirc.gatech.edu
Gasonics Asherasher-users@grover.mirc.gatech.edu
Heraeus Vacuum Oven 1-users@grover.mirc.gatech.edu
Heraeus Vacuum Oven 2-users@grover.mirc.gatech.edu
Hitachi 3500H SEMsem-users@grover.mirc.gatech.edu
Hummer Sputtering Systemhummer-users@grover.mirc.gatech.edu
Hysitron TriboIndenterindenter-users@grover.mirc.gatech.edu
JEOL JBX-9300FS EBL Systemjeolebeam-users@grover.mirc.gatech.edu
Karl Suss Bonderksbonder-users@grover.mirc.gatech.edu
Karl Suss MA-6 Mask Alignerma6-users@grover.mirc.gatech.edu
Karl Suss MJB-3 Mask Aligner -- Leftmjb3_2-users@grover.mirc.gatech.edu
Karl Suss MJB-3 Mask Aligner -- Rightmjb3_1-users@grover.mirc.gatech.edu
Karl Suss RC8 Spin Coaterrc8suss-users@grover.mirc.gatech.edu
Karl Suss TSA MA6 Mask Alignertsa-ma6-users@grover.mirc.gatech.edu
Kulick Dicing Saw 7100AD-users@grover.mirc.gatech.edu
Kulicke & Sofa Industrial Bonderkasbonder-users@grover.mirc.gatech.edu
Lap Master Lapperlapper-users@grover.mirc.gatech.edu
Lap Master Polisherpolisher-users@grover.mirc.gatech.edu
Laurell Developerlaurelldeveloper-users@grover.mirc.gatech.edu
Leitz Ergolux Microscopeleitzmicroscope-users@grover.mirc.gatech.edu
Leitz Ergolux Microscope 2leitzmicroscope-users@grover.mirc.gatech.edu
Leybold Vacuum Products Leak Detector-users@grover.mirc.gatech.edu
LFE Barrel Etcherbarreletcher-users@grover.mirc.gatech.edu
Lindberg Furnacelindberg-users@grover.mirc.gatech.edu
Lindberg Furnace 1 (CMOS Sintering Tube)lindberg1-users@grover.mirc.gatech.edu
Lindberg Furnace 2 (Polymer Curing Tube)lindberg2-users@grover.mirc.gatech.edu
Lindberg Furnace 3 (Oxidation Tube)lindberg3-users@grover.mirc.gatech.edu
Lindberg Furnace 4 (Polymer Curing Tube)lindberg4-users@grover.mirc.gatech.edu
Logitech Polisherpolisher_2-users@grover.mirc.gatech.edu
M-10A Semi-Automatic Flip Chip Die Bonderflipchip-users@grover.mirc.gatech.edu
Mask Shopmaskshop-users@grover.mirc.gatech.edu
MEMS Wet Benchmemsbench-users@grover.mirc.gatech.edu
Nanospec Refractometernanospec-users@grover.mirc.gatech.edu
Noran EDS Systemeds-users@grover.mirc.gatech.edu
Nova Micromanipulatormicromanipulator-users@grover.mirc.gatech.edu
OAI: Optical Associates, Inc. Mask Aligneroai-users@grover.mirc.gatech.edu
Obducat Nanoimprint Lithography Systemnil-users@grover.mirc.gatech.edu
Olympus / C Squared Vanox Microscopevanox-users@grover.mirc.gatech.edu
Plas-Mos Ellipsometerplasmos-users@grover.mirc.gatech.edu
Plasma Cleanerplasma_cleaner-users@grover.mirc.gatech.edu
Plasma-Therm ICPicp-users@grover.mirc.gatech.edu
Plasma-Therm PECVDpecvd1-users@grover.mirc.gatech.edu
Plasma-Therm RIErie1-users@grover.mirc.gatech.edu
Plasma-Therm SLR RIErie2-users@grover.mirc.gatech.edu
Plating Station-users@grover.mirc.gatech.edu
Plating Station Auplating_au-users@grover.mirc.gatech.edu
Plating Station Cuplating_cu-users@grover.mirc.gatech.edu
Plating Station Tiplating_ti-users@grover.mirc.gatech.edu
Probe Station-users@grover.mirc.gatech.edu
PVD75 Filament Evaporatorpvd75-users@grover.mirc.gatech.edu
PVD75 RF Sputtererpvd75rf-users@grover.mirc.gatech.edu
Samco UV Ozone Dry Stripperuvstripper-users@grover.mirc.gatech.edu
Screen Printerscreenprinter-users@grover.mirc.gatech.edu
SemiTest SCA-2500 Surface Charge Analyzersca-users@grover.mirc.gatech.edu
Semitool Spin Rinse Dryersemitool_srd-users@grover.mirc.gatech.edu
Signatone ProbeSignatoneprobe-users@grover.mirc.gatech.edu
SIMSsims-users@grover.mirc.gatech.edu
Solitec Developer-users@grover.mirc.gatech.edu
STS AOEstsaoe-users@grover.mirc.gatech.edu
STS ICPstsicp-users@grover.mirc.gatech.edu
STS PECVDpecvd2-users@grover.mirc.gatech.edu
STS Pegasuspegasus-users@grover.mirc.gatech.edu
STS SOEstssoe-users@grover.mirc.gatech.edu
Tencor Alpha-Step Profilometeralphastep-users@grover.mirc.gatech.edu
Tencor KLA Profilometerklatencor-users@grover.mirc.gatech.edu
Tencor KLA Profilometer - FCklatencor-users@grover.mirc.gatech.edu
TEST MACHINE 1test1-users@grover.mirc.gatech.edu
TEST MACHINE 3test3-users@grover.mirc.gatech.edu
TEST MACHINE 6-users@grover.mirc.gatech.edu
Tousimis Super Critical Dryercriticaldryer-users@grover.mirc.gatech.edu
Trion ICPicp_2-users@grover.mirc.gatech.edu
Tystar Nitride Furnacetystar_nitride-users@grover.mirc.gatech.edu
Tystar Nitride Furnace 1tystar_nitride1-users@grover.mirc.gatech.edu
Tystar Nitride Furnace 2tystar_nitride2-users@grover.mirc.gatech.edu
Tystar Nitride Furnace 3tystar_nitride3-users@grover.mirc.gatech.edu
Tystar Nitride Furnace 4tystar_nitride4-users@grover.mirc.gatech.edu
Tystar Poly Furnace 1tystar_poly1-users@grover.mirc.gatech.edu
Tystar Poly Furnace 2tystar_poly2-users@grover.mirc.gatech.edu
Tystar Poly Furnace 3tystar_poly3-users@grover.mirc.gatech.edu
Tystar Poly Furnace 4tystar_poly4-users@grover.mirc.gatech.edu
Tystar Polysilicon Furnacetystar_poly-users@grover.mirc.gatech.edu
Ultratech Plate Cleanermaskcleaner-users@grover.mirc.gatech.edu
Unaxis PECVDpecvd3-users@grover.mirc.gatech.edu
Unifilm Sputtererunifilm-users@grover.mirc.gatech.edu
Veeco AFMafm-users@grover.mirc.gatech.edu
Veeco AFM Advanced Trainingafm_advanced-users@grover.mirc.gatech.edu
Veeco Dektak Profilometerdektak-users@grover.mirc.gatech.edu
Veeco Instruments, Ltd. Four Point Probeveeco_fpp-users@grover.mirc.gatech.edu
Verteq Spin Rinse Dryerverteq_srd-users@grover.mirc.gatech.edu
Vision RIE - Oxidevision-oxide-users@grover.mirc.gatech.edu
Vision RIE - Oxide 2 CMOS ONLYvision-oxide-2-users@grover.mirc.gatech.edu
Woollam Ellipsometerwoollam-users@grover.mirc.gatech.edu
Wyko Profilometerwyko-users@grover.mirc.gatech.edu
Xactixxactix-users@grover.mirc.gatech.edu
XPS SSX-100xps-users@grover.mirc.gatech.edu
Zeiss SEM Ultra60fesem-users@grover.mirc.gatech.edu