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| Equipment | Instructions |
|---|---|
| 3600F PG | |
| AET RTP | |
| ALD 1 | |
| Astex ECR | |
| Bioforce Nano eNabler | |
| Blue M: A Unit of General Signal Ovens -- class 10 | |
| Blue M: A Unit of General Signal Ovens -- class 1000 | |
| Brewer Scieces CMOS Hot Plate | |
| Brunker MicrOTOF | |
| CEE 100 Spinner -- Junior | |
| CEE 100CB Spinner | |
| CEE 100CB Spinner -- Left | |
| CEE 100CB Spinner -- Right | |
| CEE Spin Coater--Focus Center | |
| CMOS Cleaning Station | |
| CMOS Semitool Spin Rinse Dryer | |
| Contact Printer | |
| Coyote PECVD | |
| CVC DC Sputterer | |
| CVC DC Sputterer 2 | |
| CVC E-Beam Evaporator | |
| CVC E-Beam Evaporator 2 | |
| Dektak 3030 Profilometer | |
| Development Bench | |
| Dexon Fume Hood--Class 10 | |
| Dexon Fume Hood--Class 1000 | |
| Dexon Fume Hood--Dry Process | |
| Dexon Fume Hood--Metalization | |
| Dexon Fume Hood--Plasma Processing | |
| Dicing Technologies Dicing Saw | |
| EBL CEE Spinner | |
| EBL Developer Station | |
| EV620 Mask Aligner | |
| FC Spinner Left | |
| FC Spinner Right | |
| FEI Nova Nanolab 200 FIB/SEM | |
| FEI Quanta 200 3D FIB/SEM | |
| Focus Center Microscope | |
| Fume Hood--Focus Center | |
| Fume Hood--Focus Center | |
| Gasonics Asher | |
| Heraeus Vacuum Oven 1 | |
| Heraeus Vacuum Oven 2 | |
| Hitachi 3500H SEM | |
| Hummer Sputtering System | |
| Hysitron TriboIndenter | |
| Jeol 6400 SEM | |
| JEOL JBX-9300FS EBL System | |
| Karl Suss Bonder | |
| Karl Suss MA-6 Mask Aligner | |
| Karl Suss Microscope | |
| Karl Suss MJB-3 Mask Aligner -- Left | |
| Karl Suss MJB-3 Mask Aligner -- Right | |
| Karl Suss Probe Station | |
| Karl Suss RC8 Spin Coater | |
| Karl Suss TSA MA6 Mask Aligner | |
| Kulick Dicing Saw 7100AD | |
| Kulicke & Sofa Industrial Bonder | |
| Lap Master Lapper | |
| Lap Master Polisher | |
| Laurell Developer | |
| Laurell Technologies Corp. Spin Coater | |
| Leitz Ergolux Microscope | |
| Leitz Ergolux Microscope 2 | |
| Lindberg Furnace | |
| Logitech Polisher | |
| M-10A Semi-Automatic Flip Chip Die Bonder | |
| MEMS Wet Bench | |
| Nanospec Refractometer | |
| Noran EDS System | |
| Nova Micromanipulator | |
| OAI: Optical Associates, Inc. Mask Aligner | |
| Obducat Nanoimprint Lithography System | |
| Olympus / C Squared Vanox Microscope | |
| Olympus Inspection Microscope | |
| Olympus Video Microscope | |
| Plas-Mos Ellipsometer | |
| Plasma Cleaner | |
| Plasma-Therm ICP | |
| Plasma-Therm PECVD | |
| Plasma-Therm RIE | |
| Plasma-Therm SLR RIE | |
| Plating Station | |
| Plating Station Au | |
| Plating Station Cu | |
| Plating Station Ti | |
| Probe Station | |
| PVD75 Filament Evaporator | |
| PVD75 RF Sputterer | |
| Samco UV Ozone Dry Stripper | |
| Screen Printer | |
| SemiTest SCA-2500 Surface Charge Analyzer | |
| Semitool Spin Rinse Dryer | |
| Signatone Probe | |
| SIMS | |
| Slow Thermal Processor | |
| Solitec Developer | |
| Solitec Spin Coater (Right) | |
| Specialty Coating Systems Spin Coater (Left) | |
| STS AOE | |
| STS ICP | |
| STS PECVD | |
| STS Pegasus | |
| STS SOE | |
| Surface Charge Analyzer | |
| Tektronix / Sony Programmable Curve Tracer | |
| Tektronix / Sony Programmable Curve Tracer | |
| Tektronix Curve Tracer | |
| Tencor Alpha-Step Profilometer | |
| Tencor Instruments M Gage | |
| Tencor KLA Profilometer | |
| Tencor KLA Profilometer - FC | |
| Tousimis Super Critical Dryer | |
| Trion ICP | |
| Tystar Nitride Furnace | |
| Tystar Polysilicon Furnace | |
| Ultratech Plate Cleaner | |
| Unaxis PECVD | |
| Unifilm Sputterer | |
| Veeco AFM | |
| Veeco Dektak Profilometer | |
| Veeco Instruments, Ltd. Four Point Probe | |
| Verteq Spin Rinse Dryer | |
| Vision RIE - Oxide | |
| Vision RIE - Oxide 2 CMOS ONLY | |
| VWR Oven | |
| Wafer Stepper | |
| West Bond, Inc. Wire Bonder | |
| Woollam Ellipsometer | |
| Wyko Profilometer | |
| Xactix | |
| XPS SSX-100 | |
| Zeiss SEM Ultra60 |