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Gasonics Aura 1000 Asher
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I. Introduction
The Aura 1000 Asher is a microprocessor controlled downstream, or "afterglow", photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. It is also able to function as a descummer by removing approximately 200-500 angstroms of photoresist. The Asher can also remove a maximum of one micron of photoresist.
II. Machine Specifications
Capabilities
- 4" wafer sizes
- Process 1 - 10 wafers per run
III. Operating Instructions
Loading a wafer
- Log into the access controller box.
- Load all the wafers that need to be processed for the recipe you want to use.
- Make sure that all the wafer "flats" are facing the machine for all of the wafers.
- Be sure to lift both wafer boats to reset the sensors, then put them back onto the stages. The left stage should stay up. The right stage should go all the way down.
- Make sure that the h-bar of the boat placed over the sensor lever
- Make sure that all of the wafers are pushed all the way into the boat
Loading and running a recipe
- To load a recipe, press the Recipe button on the keypad.
- Choose the recipe you want to run by pressing the name of it.
- Then press enter.
- Push the start button to activate the process.
Unloading a wafer
- Allow the wafers to cool down a few minutes after the unload arm unloads the last wafer.
- Remove the wafer boat and then remove your samples.
- Replace the wafer boat, making sure to place the slotted end in the correct position so that it lowers itself down again.
- Log out of the access controller box.
IV. Troubleshooting
Q:Sometimes I get a RF Warning message. What does this mean?
A: This message usually appears when wafers have been run for a long period of time. The user needs to allow the machine a few minutes to cool down before running it again.
Q:Sometimes I get a Plasma Failure message. What does this mean?
A: This means that the system did not strike a plasma in the chamber. There are a couple of common causes for this message. A common reason would be insufficient gas flow. Make sure that there is O2 and N2 flowing into the chamber. The flow rates are shown in the LEDs underneath the main display. Another reason is the pressure. The pressure may be too high. There may be a leak in the system. Please report this to a staff member.
Q:The Load Arm tries to unload my wafer but the wafer is stuck.
A: The wafer may have been loaded improperly. Make sure that the large "flat" part of the wafer is facing the machine. Contact a staff member to help you remove the wafer.
Q:The Unload arm is out but the display states that the arm is not fully out.
A: There is probably a loose connection to the sensor that senses the arms position. Contact a staff member to help you with this problem.
V. DO's and DON'Ts
DO
- Leave the machine on at all times.
- Allow wafers to cool down after each run.
- Contact a staff member if you have any questions.
- Turn the machine off.
DO NOT
- Hit the machine.
- Program your own recipe
- Turn the key in any direction.
- Run Recipes longer than 2 mins long.
- Put your hand into the system while the arms are moving.
VI. Check-off requirements
The trainee must demonstrate the following procedures to become checked-off on the Gasonics Asher. Also, the trainee must watch the training video and bring a sample blank wafer with them.
You must be able to:
- Load a wafer.
- Load a recipe.
- Run a recipe.
- Unload a wafer.
- Repeat steps 1-4 with a different recipe.