Microelectronics Research Center

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Signatone probe

The Signatone probe is designed for measuring sheet resistivity on samples with a flat surface. The probe head contains four thin wire probes which are made to contact the sample under test. Current is made to flow between the outer probes, and voltage is measured between the two inner probes.

Instructions

  1. Log into the machine. The meter and source will not turn on until you are logged in.
  2. Make sure the lever is all the way to the right before loading your sample. Also, check to make sure all 4 points of the probe are intact. If a point looks broken, let a staff member know immediately.
  3. Load your sample onto the sample plate and slowly place it under the probe.
  4. IF YOU HAVE A PLAIN SILICON WAFER: Turn the lever all the way clockwise. IF YOU HAVE A THIN LAYER OVER SILICON: Turn the lever until the points are pressed into the head between 50-70%.
  5. Using the open program .__________., choose the appropriate mAmps needed.
  6. Input the thickness of your sample. Do not change the Correction Factor or the Calibration Constant.
  7. Hit the Go button. Record the resistivity. Hit the go button again, and make sure the reading is constant. If the resistivity reading is not constant, increase the mAmps applied.
  8. Turn the lever completely counter clockwise to raise the probe head.
  9. Unload your wafer, and log out of the machine. Do not turn off either the source or the meter. Do not close any of the programs running on the computer.

DO NOT:

  • Do not change the Correction Factor or Calibration Constant.
  • Do not try to load your sample when the probe head is lowered.
  • Do not turn off the source or the meter.
  • Do not log out of any programs on the computer.
  • Do not get onto the internet.

DO:

  • Read the instructions if you feel lost.
  • Ask a staff member if you have any questions.
  • Log off the machine when you are finished.