Microelectronics Research Center

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Equipment Group:
Equipment Instructions
3600F PG
AET RTP
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ALD - Al2O3
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ALD - SrTi
Astex ECR
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Asys Screen Printer & Vaccum Pump
Beneq ALD
Bioforce Nano eNabler
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Bioforce Nano eNabler
View Instructions
Black Magic PECVD
Blue M: A Unit of General Signal Ovens -- class 10
Blue M: A Unit of General Signal Ovens -- class 1000
Brewer Scieces CMOS Hot Plate
Brunker MicrOTOF
CEE 100 Spinner -- Junior
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CEE 100CB Spinner
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CEE 100CB Spinner -- Left
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CEE 100CB Spinner -- Right
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CEE Junior Spinner
CEE Spin Coater--Focus Center
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CHA Ebeam 1
CHA Ebeam 2
Chemical Safety Seminar - Rm 102B
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CMOS Cleaning Station
CMOS Semitool Spin Rinse Dryer
Contact Printer
Coyote PECVD
Critical Point Dryer
CVC DC Sputterer
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CVC DC Sputterer 2
CVC E-Beam Evaporator
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CVC E-Beam Evaporator 2
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CVC E-Beam Filament
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Dage X-Ray XD7600NT
DCA
Dektak 150
Dektak 3030 Profilometer
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Development Bench
Dexon Fume Hood--Class 10
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Dexon Fume Hood--Class 1000
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Dexon Fume Hood--Dry Process
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Dexon Fume Hood--Metalization
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Dexon Fume Hood--Plasma Processing
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Dicing Technologies Dicing Saw
DLTS
Dryer
EBL CEE Spinner
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EBL Developer Station
Edwards Sputterer
Ernest Fullam SputterCoater
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EV620 Mask Aligner
EVS Mask Aligner
FC Spinner Left
FC Spinner Right
FEI Nova Nanolab 200 FIB/SEM
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FEI Quanta 200 3D FIB/SEM
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Flip Chip Bonder
Focus Center Microscope
FTIR
Fume Hood--Focus Center
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Fume Hood--Focus Center
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Gasonics Asher
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Gasonics Asher 1
Graphene Furnace
Heraeus Vacuum Oven 1
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Heraeus Vacuum Oven 2
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Hitachi 3500H SEM
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Hummer Sputtering System
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Hysitron TriboIndenter
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IR Microscope
IR/HMDS Oven
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Jeol 6400 SEM
JEOL JBX-9300FS EBL System
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Jet Lab II
Karl Suss Bonder
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Karl Suss MA-6 Mask Aligner
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Karl Suss Microscope
Karl Suss MJB-3 Mask Aligner -- Left
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Karl Suss MJB-3 Mask Aligner -- Right
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Karl Suss Probe Station
Karl Suss RC8 Spin Coater
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Karl Suss TSA MA6 Mask Aligner
Kulick Dicing Saw 7100AD
Kulicke & Sofa Industrial Bonder
Kulicke Bonder 1
Kulicke Bonder 2
Lam Etch 1
Lam Etch 2
Lam Etch 3
Lap Master Lapper
Lap Master Polisher
Lapmaster 1
Lapmaster 2
Laurell Developer
Laurell Technologies Corp. Spin Coater
Leitz Ergolux Microscope 2
LEO SEM
Leybold Vacuum Products Leak Detector
LFE Barrel Etcher
Lindberg Furnace
View Instructions
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Logitech LP50
Logitech PM5
Logitech Polisher
View Instructions
M-10A Semi-Automatic Flip Chip Die Bonder
M10 Flexible Bonder
Machine Technology, Inc. Flexifab Substrate Processing System
Mask Align 1
Mask Shop
Mask shop air table
ME Spinner
MEMS Wet Bench
Microfuge 18 Centrifuge
Microscope 1
Microscope 2
Microscope 2 - RM164
Microscope 3
Microscope 4
Microscope 5
Microscope 6
MPM Screen Printer
Nanospec Refractometer
View Instructions
Noran EDS System
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Nova Micromanipulator
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OAI: Optical Associates, Inc. Mask Aligner
Obducat Nanoimprint Lithography System
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Olympus / C Squared Vanox Microscope
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Olympus Inspection Microscope
Olympus Inspection Microscope
Olympus Inspection Microscope
Olympus Inspection Microscope
Olympus Inspection Microscope
Olympus Video Microscope
Oxford PECVD 1
Oxford RIE 1
Parylene Labcoater
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Paxco Dicing Saw
Plas-Mos Ellipsometer
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Plasma Cleaner
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Plasma-Therm ICP
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Plasma-Therm PECVD
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Plasma-Therm RIE
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Plasma-Therm SLR RIE
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Plating Station
Plating Station Au
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Plating Station Cu
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Plating Station Ti
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Probe Station
PVD75 Filament Evaporator
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PVD75 RF Sputterer
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qNANO
Qsense
Radiation Safety Class
Radiation Training Session
Samco UV Ozone Dry Stripper
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Screen Printer
SemiTest SCA-2500 Surface Charge Analyzer
Semitool Spin Rinse Dryer
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Sierratherm Compressor & Dryer
Signatone Probe
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SIMS
Slow Thermal Processor
Solitec Developer
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Solitec Spin Coater (Right)
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Specialty Coating Systems Spin Coater (Left)
Spin-Rinse
STS AOE
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STS ICP
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STS PECVD
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STS PECVD 2
STS Pegasus
STS SOE
View Instructions
Subfab Microscope 1
Surface Charge Analyzer
Tektronix / Sony Programmable Curve Tracer
Tektronix / Sony Programmable Curve Tracer
Tektronix Curve Tracer
Tektronix Programmable Digital Multimeter
Tempress Dicing Saw
Tencor Alpha-Step Profilometer
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Tencor Instruments M Gage
Tencor KLA Profilometer
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Tencor KLA Profilometer - FC
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test machine 1
TEST MACHINE 1
test machine 10
test machine 11
test machine 12
test machine 2
TEST MACHINE 2
TEST MACHINE 3
test machine 3
TEST MACHINE 4
test machine 4
TEST MACHINE 5
test machine 5
test machine 6
TEST MACHINE 6
test machine 7
test machine 8
test machine 9
Thermo Raman
Toray Bonder 1
Tousimis Super Critical Dryer
View Instructions
Toxic Gas Monitor
Trion ICP
Trion RIE
Tystar Nitride Furnace
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 3
Tystar Nitride Furnace 4
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
Tystar Polysilicon Furnace
Ultratech Plate Cleaner
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Unaxis PECVD
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Unifilm Sputterer
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Unknown Particle Counter
UV-VIS Spectrophotometer
Vase Ellipsometer
Veeco AFM
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Veeco AFM 2
Veeco AFM Advanced Training
Veeco Dektak Profilometer
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Veeco Instruments, Ltd. Four Point Probe
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Verteq Spin Rinse Dryer
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Vision RIE - Oxide
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Vision RIE - Oxide 2 CMOS ONLY
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VWR Oven
Wafer Stepper
West Bond, Inc. Wire Bonder
Woollam Ellipsometer
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Wyko Profilometer
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Wyko Profilometer RM161
Xactix Xenon Difluoride Etcher
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XPS SSX-100
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XRF
Zeiss SEM Ultra60
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