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NOTE: Argon is used for removing oxidation layers. Oxygen is used for organic films.
MiRC Plasma Cleaner Operation (YES-R1)
(revised December, 2006)
Running Clean Process (Total time: ~9 mins, Process time: 6 min)
1) Open door and make sure electrodes (2) and shelf (1) are in place and secure.
2) Place parts to be cleaned on shelf (do not place on electrodes! – see Fig. 1)
3) Close and latch door.
4) Make sure Lark Sequencer screen displays SEQ 6 and press RESET button.
5) Set thumbwheel to 1 for Ar or 2 for O2 clean and press START.
1 st stage: program monitors vacuum gauge for a minimum pressure of 100 Torr. (~45 secs)
2 nd stage: program monitors respective gas flow (Ar or O2) on flow gauge. Make sure the gauge reads between 1.5-2.0 CFM. The vacuum will continue to pump down to at least 1 Torr or else the system will halt. (~1:15 secs.)
3 rd stage: Monitor all led indicators on RF Generator. The left hand column of indicators should be on. Do NOT rely on the Plasma indicator to justify a successful plasma. Should the RF Generator's ARC or OVER-TEMP indicators trigger, adjust the Tap Setting on the transformer (black box with rotary switch) to a higher or lower number, error indicators should go off once the proper tap setting is achieved.
(actual process time: 6 minutes)
6) Listen for a click when the 3rd stage is complete. Allow chamber to backfill to atmosphere. When program is complete a yellow light will flash. Press RESET , open door, and retrieve your finished samples.
NOTE : In the case that the purge/backfill step does not complete, set thumbwheel to 4 and press START . Wait for the yellow light to flash and retrieve your samples.
In the case that the lark sequencer goes into HALT mode (on display) press PRG/RUN/HALT . Make sure RF generator does not arc nor over-heat . If the system halts once again, press RESET , turn thumbwheel to 4, press START , wait for yellow light to flash and retrieve your samples. Notify cleanroom technical staff of any problems.
For additional information, please contact the designated trainer(s).