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Operating Instructions
Hummer VI Sputter Coater
- Check:
- Timer switch is on MANUAL and knob is at zero.
- Gas switch is set to OFF .
- Voltage switch is OFF .
- Open sample chamber.
- Place sample in chamber and close lid gently.
- Turn main power on and place slight pressure on lid to start vacuum seal.
- Set Mode switch to PLATE .
- ( Note : Do not switch between modes when high-voltage is on. )
- Wait till pressure reaches ~50 mTorr and toggle gas switch to ON .
- Make sure gas is on and wait for pressure to stabilize. (~80 mTorr)
- Make sure voltage dial is set to zero, then turn voltage switch to ON .
- ( Note: process starts when plasma is ignited (pink-purple glow) )
- ( Note: if plasma flickering develops, check pressure and current )
- Turn voltage control knob clockwise to achieve approximately 30 milliamps.
- Let the machine run for 3 to 5 minutes.
- Turn voltage control knob to zero. Turn voltage switch OFF .
- Turn gas toggle switch to OFF .
- Turn main power switch to OFF , the system will automatically vent itself.
- When atmospheric pressure is reached in the sample chamber (lid will be loose), open lid and remove sample.