Solitec Spinner

Trainers

One of the Solitec spinners is set up for photoresist spin coating. The other one is set up for developing exposed photoresist. Most photoresist coatings are performed with the CEE 100CB spinners in the class 1000 photolithograpy bay. If a photoresist spin coating must be performed in the class 10 photolithography bay is may be done in one of the Solitec spinners or the Karl Suss RC8.

Features

supports circular substrates up to 9" in diameter, and rectangular substrates with up to 9" diagonals.
one spinner includes an ultrasonic positive developer system with prewet, develop, dwell, rinse, and spin steps.
50 - 10,000 RPM spin speeds
1,000 - 40,000 RPM/s acceleration

Operating Instructions

Install a chuck that is slightly smaller than the sample that you are going to spin. A chuck can be removed by simply pulling it off of the spindle. Put a new chuck on by aligning it with the spindle and pushing down gently, but firmly.
Place the sample on the chuck and center it. If it is not centered, it may fly off while it is spinning.
On the control panel, there is a section for each step of the spin process. The last spin step will always be performed. The other steps are optional. To use a step, press the button with the step name in. To disable the step, release the button. For each step, the time and spin speed can be set. Rotate the speed knob to the desired speed. Set the timer by flipping the "+" or "-" tab up and pressing it.
The "RAMP" knob can be used to set the acceleration. The switch labeled "PROCESS HEAD" should be set to AUTO. The "DISPENSE" switch should be set to "AUTO." if you are performing a wet run.
Depress the white VACUUM button to activate the vacuum chuck. Make sure that the sample is held on the chuck by trying to move it.
For safety, do not operate the spinner with the cover open. To start the spinner, press the START button. If you want to stop the spinner in the middle of a run, press "STOP."
When the spin process is completed, turn the vacuum off by pressing the VACUUM button. Remove the sample from the chuck.

Troubleshooting

I pressed start, but the spinner didn't start.

The spinner will not start unless the sample is properly secured to the chuck. Check the following things:

Is the VACUUM button pressed in? It should be.
Is the sample larger than the chuck? If it isn't the chuck will not form a good seal.
Is the sample you are trying to spin warped? It must be flat to form a good seal with the chuck.
Is the chuck pushed down all the way? If it is not, it will not seal with the spindle
Is there an o-ring in the hole in the chuck where the chuck touches the top of the spindle? If there isn't, the vacuum will leak there.
Are the chuck and back side of the sample clean? If not, they will not form a good seal.

The spinner didn't dispense during the dispense step.

Make sure the "PROCESS HEAD" switch is set to AUTO and the "DISPENSE" switch is set to "AUTO."

Problems? Contact the MiRC Technical Staff.