Microelectronics Research Center

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Revision 1 - 10 Feb 1999, David Sigmon

Karl Suss RC8 Spin Coater

Trainers

Spin coaters are used to distribute photoresist evenly across the surface of a substrate by spinning the substrate. The RC8l spinner is reserved for photoresist use. Spin coatings of other materials must be done with the SCS spinners. Photoresist coatings are usually performed with the CEE 100CB spin coaters.

Features

  • supports substrates up to 6" in diameter
  • cover maintains solvent saturated atmosphere
    • eliminates usual defects such as rebounding, splashback, comet, ans striation for improved uniformity
    • allows for lower spin speeds and evaporations, reducing stress on substrate
    • reduces photoresist consumption
    • reduces spin time
  • automatic photoresist application
  • 5,000 RPM maximum spin speed


    Operating Instructions

    Programming the Controller

    1. Enter the number of the program you want to set up. You can use any number 2 - 6. The display should show "00N," where N is the number of the program you selected. Press ENTER. The display should show "ooN" (whith small o's). This indicates that N is the active process.

      Note that when you enter a CLOSE (1) or OPEN (2) step, the step only starts the spin. To make the spin continue for a length of time, you must put a TIME step (3) after the spin step.

    2. To clear the existing recipe contents, press RESET. The display will show "00N." Press ENTER to erase the program. The display will show "ooN."
    3. To begin entering the program, press ENTER. The display will show "000."
    4. Enter the number corresponding to the first recipe step. For example, if the first step of the recipe will be to spin with the cover closed, enter 1. After typing in the number, press ENTER.
    5. Depending on the type of step you chose, the controller will prompt for some parameters. For example, if you entered 1 for a "close" step the SPEED light on the front of the controller will flash. This indicates that you should enter the desired speed. After entering the speed, the controller would prompt for the acceleration. You would then enter the desired acceleration. After entering all of the required parameters for the step, the display will show "000" and no other lights will be on.
    6. If you want to insert another step, repeat the proceedure above for the next step. After you have entered the last step, simply press ENTER when the display shows "000." The display will return to "ooN," where N is the number of your process.

    Running a process.

    1. If the process is not already active, you need to select the process you want to run by typing the number and pressing ENTER. This should cause the display to show "ooN," where N is the number of the process you selected.
    2. Center your wafer on the chuck and press START. Your process will run.
    3. When your process is complete, remove your wafer from the chuck.
    4. Clean the spinner bowl after each use.
    Problems? Contact the MiRC Technical Staff.