Microelectronics Research Center

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AsTEX ECR

These instructions are not complete and have not been tested.

Sample Preparation

The ECR is designed to handle six-inch wafers only. If you need to process something smaller AsTEX has recommended taping the smaller sample to a six-inch wafer with Kapton tape. Do not use other products that will not withstand high temperatures. Do not allow your sample to cover the outer half inch of the six-inch host wafer. This area must be clear as the wafer clamp will come down on the wafer in this area.

Logging In

  1. Press the "OPERATOR" button in the upper left corner of the screen
  2. Enter your login name and password, then press OK

Please remember to log off when you are finished (see Logging Off below)

Running Process

  1. Press the "Run" button at the top of the screen. The system will display the Run page
  2. Press "Select Recipe" at the right side of the screen.
  3. Select the recipe you wish to run from the list and press OK.
  4. Press "Run" at the right side of the screen.
  5. The system will ask whether to run a wafer that is already in the chamber, run a wafer that is already in the load lock, or load a new wafer. Usually you should select load a new wafer here.
  6. If you choose to load a new wafer, the system will vent the load lock. This may take several minutes. When it is finished you will be prompted to load your sample into the lock.
  7. Open the lock cover. It should open easily if the lock is vented.
  8. Place your wafer on the sample transfer arm. It should fit securely into the cutout with the wafer flat facing towards the left.
  9. Close the lock cover.
  10. tell the system that you are finished.
  11. You will be prompted to look into the chamber and verify that the wafer pedestal is clear. After you have checked it press OK.
  12. The system will load the wafer into the chamber and run the process automatically.
  13. After the process completes, the system will transfer the wafer back to the load lock.
  14. The system will ask if it should vent the load lock. Choose yes.
  15. After the load lock has vented, open the cover and remove your sample
  16. Close the cover and press "Pump Lock?" to pump the load lock back down. The lock should always be left under vacuum when your run is complete.

Revision 1 - 31 March 2000, David Sigmon