Nanospec Film Analyzer 3000
Instructions by: Pezhman Monajemi
The Nanospec 3000 is a precise AFT (Automated Film Thickness) Measurement system which
measures the thickness of films deposited on various substrates and also the reflectance
relative to Silicon.
Features
- Measures vertical features from 100Aring up to 0.02mm with a resolution of 50Aring
- Supports 4" and 6" wafers
- Measures Up to 3 films on Si substrate
- Has up to 200 different programs
- Measurement time is 3 seconds
Operating Instructions
- In the main screen, choose your desired program, then in the measurement screen, enter
your sample ID.
- Use the knobs under the stage to move the stage to left or right.
- Do the reference measurement by moving to dark position, then focus on the reference
sample which is a clean bare silicon wafer on the right side of stage. You can repeat this
everytime by clicking on 'Ref' button.
Caution: Don't
change the microscope settings.
- Now Move the sample under the microscope, focus on it and using the 'Meas' button
measure the sample. Only the area under the black spot is measured.
- The 'Graph' button displays the data list in an interferogram graph.
- The 'Fit' is a measure of resolution, it should be less than 0.1 for fine films (like
deposited oxide) and less than 5 for porous films (like deposited Polysilicon). If not,
you have to ask the mirc staff to edit the program and change the parameters for you.
- To quit to main menu, click on 'Calib' button.
- If you want to save your data, in the main menu, go to 'Data' menu, select 'Process Last
saved Measurement Result', find your program by clicking on 'Search', click on 'Simple
data', choose 'Export' from the 'Process' menu and finally 'Save'. For posting your data
on the web, select 'e://grover/nanospec'.
Caution: Don't ever turn off the Lamp power supply.
Problems? Contact the MiRC Technical Staff.
