Microelectronics Research Center

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Equipment Manual Description
STI Electroplating Bath Operation and maintenance manual for the electroplating station.
The maintenance sections are for staff use only! Users must not attempt any adjustments.
Hysitron TriboIndenter User Manual Operating manual for users of the TriboIndenter. This does not include DSM operation of the system.
(Note: This file is very large.)
Control Vision Software Manual - Volume 3 Operating manual for the PAL operating system on Brooks Automation controllers (sputterers).
General ellipsometry using the Woollam ellispometer PDF version of a slide presentation by the J. A. Woollam company outlining general ellipsometry procedures and methods using their VASE ellipsometers and software.
Digital Instruments AFM Training Basic overview and operation of the DI IIIa Nanoscope AFM
Unifilm Manual Basic overview and operation of the Unifilm Sputterer