Video Training Script for the Gasonics Asher

Typical Process
There are currently two recipes on the system. Recipe A is a one minute recipe used to remove up to one micron of photoresist. Shipley 1813 Photoresist was used to test the removal rate. Recipe B is a 30 sec recipe used for a descumming process. A typical process involves a one minute RF warm up time. The wafer is then loaded onto the process sample holder which is located on the door that seals the chamber. The chamber is then pumped down. Next the chosen recipe is run. Then, the chamber vents and the door opens. The unload arm loads the processed wafer into the Unload Boat. If there are more wafers located in the load boat, then the process repeats itself until the Load Boat is empty.

Lab User Intro

Now let's introduce our lab users.

Part 2: Overview of Parts of the Gasonics Asher

We will now go over the various parts of the Gasonics Asher

Cover Plate
The cover plate seen here will be removed so that we have a better view of the loading and unloading process. The cover should be in place during regular use.

Load Platform
The load platform is located on the left side of the Asher. It holds the boat with the unprocessed wafers.

Load Arm
The load arm takes a wafer from the load boat and sets it onto the Process Sample Holder.

Process Sample Holder
The process sample holder is located on the main door that seals the chamber.

Unload Arm
Once the process is finished the unload arm removes the wafer from the process sample holder. It then places the sample onto the boat located on the unload platform.

Unload Platform
The unload platform is located on the right side of the Asher. It holds the processed wafers.

Main Display
The main is found on the top half of the Gasonics Asher. It displays the process being run and the current status of the machine.

Utilities LED's
The LEDs located beneath the main disply show the chamber pressure and the gas pressures.

Key Pad
The key pad is located on the right side of the main display.

WARNING: Please do not turn the key. The key should remain in auto mode.

WARNING: Please do not remove the key. The key is needed by the staff to program and do maintenance on the system.

Emergency Off Button
The off button shown here is the emergency off button. Please only press the Emergency off button in the case of an emergency.

Part 3: Loading a Sample

All the 4" that need to be processed must be loaded into the load boat. The boat is then placed onto the loading platform with the h-bar of the boat placed over the sensor lever. All of the wafers must have the large flat part of the wafer facing the machine.

The unload boat must also be placed in the same manner onto the unload platform. The platform should go down all the way if the boat is empty. If it has wafers in it, it will go down until it the optic sensor detects a wafer. The platform will then stop at that point.

To load a recipe, press the Recipe button on the keypad. Then choose the recipe you want to run by pressing that number or letter. Then press enter. After the recipe has been chosen, the "Start" button must be pushed to activate the process.

WARNING: While the machine is running, please do not stick your arm in system. Injuries can occur if this is done.

Once the load boat is empty, simply remove your wafers from the unload boat and leave the machine. The machine will then enter the hibernate mode automatically after a few minutes.

After each run, if another set of wafers needs to be processed, the sensors on both platforms must be reset by tilting the boats back and putting them back down. The unload platform should go all the way down since the boat is empty.

The off button shown here is used to power down the system.

WARNING: Please do not press the off button. The system needs to be turned on in a specific way for it to work properly. In the case of a power outage, please contact the MiRC staff to reactivate the machine.

Part 5: Concluding Remarks

After watching this training video, you should have a good understanding of how to use the Gasonics Asher. You should know how to.

If you have any further questions, please direct them to the trainer for this equipment. Please do not direct your questions to Mohammad.