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Video Training Script for the Ultratech Plate Cleaner

Part 1: Introduction

The Ultratech Model 603 Plate Cleaner is a photolithography mask cleaner. It will perform an optional Microclean wash step, then it will rinse the mask and dry it. It can be used to automatically clean photolithography masks.

Features include:

The ability to clean 3 to 7 inch square masks
dispensing cleaning solution
full rinse and dry

Now let's introduce our lab users

Part 2: Plate Cleaner Parts

We will now go over the various parts of the plate cleaner.

The Cover
Here we have the cover.

Heating Lamp
Here we have the lamp housing which holds the heating lamp.

Sample Holder
Here we have the sample holder.

Control Panel
Over here we have the control panel for clean and dry times

Cleaning Solution
The cleaning solution controller is located here.

Part 3: Loading a Sample:

Remove the cover from the top of the plate cleaner. Place the mask to be cleaned so that the corners of the mask fit in the notches on the mask holder.

Warning: If they do not fit exactly in the notches, it may be thrown off of the rotor and destroyed during cleaning.

Part 4: Cleaning a Sample:

Set the desired clean time and dry time using the "CLEAN" and "DRY" knobs on the control panel. Bigger numbers will give longer times, but the numbers do not correspond to anything specific. Set the "CLEAN" time to at least four.

Using the Cleaning Solution:
If you do not want cleaning solution, just move the lamp housing over the mask without pressing the red button.

If you would like a cleaning solution applied, program the timer next to the red button on the small white box. Then press the red button. This will spray a cleaning solution onto the mask. If you have pressed the button, but nothing is being sprayed on the plate, try pressing the button again once. If there is still nothing coming out, the dispenser is probably out of cleaning solution. Contact MiRC staff for assistance. As soon as the cleaning solution starts to flow, move the lamp housing over the mask. The lamp housing should lock into place. The mask holder will start spinning, the rinse step will begin. Once the rinse step is finished, the drying process will begin. When the drying step is finished, the lamp housing lock should release.

Warning: Please do not spray solvents into the plate cleaner. The drain leads to the city drainage system, so solvents should not be used.

Part 5: Unloading a Sample:

Please wait a few minutes to let the mask to cool down. The mask may still be hot from the drying process. Move the lamp cover aside and remove the mask from the cleaner. Repeat the cleaning procedure for the other side of the mask.

Warning: Please handle the mask correctly when inserting and removing from the plate cleaner. Only grab the edges of the mask.

Cover the cleaner with the clear protective lid when you are finish.

Part 6: Conclusion

After watching this training video you should know how to :

load a sample
clean a sample
and unload a sample