Microelectronics Research Center

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New X-Ray Tomography Tool Installed in MiRC

Dage XiDAT XD7600NT Ultra High Resolution Digital X-ray Technology

Sep 10, 2008:

The MiRC has just installed a new tool that is available to our users. The Dage XD7600-NT has been installed in Room 161 of the Pettit Microelectronics Research Center.

The Dage XiDAT XD7600NT provides ultrahigh resolution and large X-ray images for failure analysis with oblique angle views up to 70 degrees, displayed at full 2 Mpixel resolution on screen. (XiDAT - X-ray integrated Digital Acquisition Technology)

The XD7600NT features:
  1. 250nm feature recognition
  2. Revolutionary 'filament-free' Dage NT X-ray tube
  3. AXIS - Active Image Stabilisation
  4. XiDAT 2.0 imaging chain
  5. Up to 70 degree oblique angle views over the entire inspection area
  6. 24" widescreen digital LCD monitor
  7. Enhanced automated inspection routines
  8. Automatic BGA and die-void measurements
  9. Uninterrupted rotating live oblique views 360 degrees around any point in the sample

For more information on this tool or to gain access please contact Dr. Greg Book (greg.book@gatech.edu) or Rebhadevi Jeevagan (rebhadevi@gmail.com), or visit http://grover.mirc.gatech.edu/equipment/#Lab.