Questions, comments, complaints, bugs about this page? We would like to hear from you.
This page contains processing information and recipes for the various pieces of equipment and chemicals in the cleanroom. The recipes are made available to serve as examples and templates for users that need specific processes. Many of them have been provided by the equipment manufacturer as examples of processes which they have tested and verified to be both functional and safe for the equipment.
Please direct all questions concerning processing to process_help@grover.mirc.gatech.edu.
| Standard recipe collections | Standard recipes provided by the manufacturers for use in their processing tools. Georgia Tech access only. |
| Shipley Co., Inc. photolithographic chemicals | Product and processing information for the line of Shipley products carried
by the cleanroom. Shipley chemicals can be purchased from the Microlithography Chemical Corp. They are located in Newton Upper Falls, MA at (617)965-5511. |
| AZ Electronic Materials photolithographic chemicals | Product and processing information for the line of AZ products available in the cleanroom (note that these chemicals are not supplied by the cleanroom). |
| Futurrex, Inc. photolithographic chemicals | Product and processing information for the line of Futurrex products available in the cleanroom. |
| Metal Etchant Reference - (PDF) | |
| Selective Etchant Reference - (PDF) | |
|
Cleanroom Technical Seminar Slides (PDF) | Slides from the lecture series originally presented by Benjamin Small. |
| MiRC CMOS Group | CMOS services provided by the MiRC CMOS group including oxidations, nitridations, polysilicon, doping, and cleaning services. |
| NNIN RET Data Summary | The Effects of Process Parameters during the Deposition of SiNx using PECVD. |
| NNIN RET 2007 Baseline Testing | |
| NNIN RET 2007 ICP Selectivity Profiling |