Microelectronics Research Center

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FileDescriptionUploaderEquipmentWhen Uploaded
Standard Oxide PT PECVD.docStandard Oxide ReportTyler, PhillipPlasma-Therm PECVD2009-02-03 14:39:49
Standard Nitride PT PECVD.docStandard NitrideTyler, PhillipPlasma-Therm PECVD2009-02-03 14:37:16
STS PECVD - hfsin.docHigh Frequency Standard NitrideTyler, PhillipSTS PECVD2009-02-03 14:40:14
STS_PECVD_HFSIO.docHigh Frequency Standard OxideTyler, PhillipSTS PECVD2009-02-03 14:40:50
Unaxis_Standard_Nitride.docStandard Nitride ReportTyler, PhillipUnaxis PECVD2009-02-03 14:41:42
Unaxis_Standard_Oxide.docStandard Oxide ReportTyler, PhillipUnaxis PECVD2009-02-03 14:42:31
STS_PECVD_lfsio_5-13.docLow Frequency Standard OxideTyler, PhillipSTS PECVD2009-06-02 16:43:30
STS_PECVD_lfsin_5-13.docLow Frequency Standard NitrideTyler, PhillipSTS PECVD2009-06-02 16:43:12
STS_PECVD_hfsin_5-13.docHigh Frequency Standard NitrideTyler, PhillipSTS PECVD2009-06-02 16:42:54
STS_PECVD_hfiso_5-13.docHigh Frequency Standard OxideTyler, PhillipSTS PECVD2009-06-02 16:42:38
Temperature Test on Ebeam.docTemperature Tests for Ebeam EvaporatorsThomas, MikkelCVC E-Beam Evaporator2009-06-17 11:44:15
PT RIE Etch Rate and Etch UniforEtch Rate and Etch UniformityTyler, PhillipPlasma-Therm RIE2009-06-18 12:54:19