Microelectronics Research Center

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Shipley Co., Inc. Photolithography Chemicals
Chemical Name Technical Data Sheet Supplied by Cleanroom?
Microposit 319 Developer PDF Yes
Microposit 321 Developer PDF No
Microposit 351 Developer PDF Yes
Microposit 1112A Remover PDF Yes
Microposit S1800 Series Photo Resist
Microposit S1827
PDF
JPG
1813, 1827
Microposit S1400 Series Photo Resist PDF No
Megaposit SPR 220 Series Photoresist PDF SPR 220-7.0

**Note** that Microposit 354 Developer is 1 part 351 Developer to 3.5 parts deionized water.

View the full list of chemicals supplied by the MiRC for cleanroom use.