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| STS Processing Recipes | |||
| PECVD Recipes | HTML | ||
| PlasmaTherm, Inc. Processing Recipes | |||
| Full collection (31 pages) | PDF (11.4 MB) | ||
| Deposition collection (13 pages) | PDF (3.5 MB) | ||
| Silicon Dioxide (2% SiH4 in N2) | |||
| Silicon Dioxide (100% SiH4) | |||
| Silicon Oxynitride | |||
| Silicon Nitride (2% SiH4 in N2) | |||
| Silicon Nitride (100% SiH4) | |||
| Silicon Nitride (Low Stress-He Based) | |||
| Silicon Nitride (Low Stress-Mixed Frequency) | |||
| SiO2, SiNx, & Amorphous-Si Chamber Clean (SF6) | |||
| SiO2, SiNx, & Amorphous-Si Chamber Clean (CF4) | |||
| SiO2, SiNx, & Amorphous-Si Chamber Clean (NF3) | |||
| Diamond Like Carbon (DLC) | |||
| Silicon Carbide (2% SiH4 in N2) | |||
| Silicon Carbide (5% SiH4 in He) | |||
| Reactive Ion Etch collection (14 pages) | PDF (6.9 MB) | ||
| Aluminum | |||
| Chrome Mask | |||
| GaAs / AlGaAs Feature | |||
| GaAs Via Hole | |||
| Indium Phosphide | |||
| Polyimide (Isotropic) | |||
| Photo-resist/Polyimide (Anisotropic) | |||
| Silicon Dioxide | |||
| Silicon Nitride (High Rate) | |||
| Silicon Nitride (Selective to Si) | |||
| Silicon Nitride (Passivation Removal) | |||
| Silicon Trench (Chlorine) | |||
| Silicon Trench (Fluorine) | |||
| Zinc Sulfide | |||
| ICP Etch collection (4 pages) | |||
| Bosch Process | |||
| Gallium Nitride | |||
| Chrome | |||
| Silicon Nitride | |||
| Silicon Dioxide | |||