AET RTP
ALD 1
Astex ECR
Bioforce Nano eNabler
Brunker MicrOTOF
CEE 100 Spinner -- Junior
CEE 100CB Spinner -- Left
CEE 100CB Spinner -- Right
CMOS Cleaning Station
CMOS Semitool Spin Rinse Dryer
Coyote PECVD
CVC DC Sputterer
CVC DC Sputterer 2
CVC E-Beam Evaporator
CVC E-Beam Evaporator 2
CVC E-Beam Filament
Dektak 3030 Profilometer
Dicing Technologies Dicing Saw
EBL CEE Spinner
EBL Developer Station
Ernest Fullam SputterCoater
EV620 Mask Aligner
EVS Mask Aligner
FC Spinner Left
FC Spinner Right
FEI Nova Nanolab 200 FIB/SEM
FEI Quanta 200 3D FIB/SEM
Focus Center Microscope
Gasonics Asher
Hitachi 3500H SEM
Hummer Sputtering System
Hysitron TriboIndenter
JEOL JBX-9300FS EBL System
Karl Suss Bonder
Karl Suss MA-6 Mask Aligner
Karl Suss MJB-3 Mask Aligner -- Left
Karl Suss MJB-3 Mask Aligner -- Right
Karl Suss RC8 Spin Coater
Karl Suss TSA MA6 Mask Aligner
| Kulicke & Sofa Industrial Bonder
Lap Master Lapper
Lap Master Polisher
Laurell Developer
Leitz Ergolux Microscope
Leitz Ergolux Microscope 2
LFE Barrel Etcher
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Logitech Polisher
Mask Shop
MEMS Wet Bench
Nanospec Refractometer
Noran EDS System
Nova Micromanipulator
OAI: Optical Associates, Inc. Mask Aligner
Obducat Nanoimprint Lithography System
Olympus / C Squared Vanox Microscope
Olympus Video Microscope
Plas-Mos Ellipsometer
Plasma Cleaner
Plasma-Therm ICP
Plasma-Therm PECVD
Plasma-Therm RIE
Plasma-Therm SLR RIE
Plating Station Au
Plating Station Cu
Plating Station Ti
PVD75 Filament Evaporator
PVD75 RF Sputterer
Samco UV Ozone Dry Stripper
Screen Printer
SemiTest SCA-2500 Surface Charge Analyzer
Semitool Spin Rinse Dryer
Signatone Probe
SIMS
Solitec Developer
| Solitec Spin Coater (Right)
Specialty Coating Systems Spin Coater (Left)
STS AOE
STS ICP
STS PECVD
STS Pegasus
STS SOE
Surface Charge Analyzer
Tencor Alpha-Step Profilometer
Tencor KLA Profilometer
Tencor KLA Profilometer - FC
Tousimis Super Critical Dryer
Trion ICP
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 3
Tystar Nitride Furnace 4
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
Ultratech Plate Cleaner
Unaxis PECVD
Unifilm Sputterer
Veeco AFM
Veeco Dektak Profilometer
Verteq Spin Rinse Dryer
Vision RIE - Oxide
Vision RIE - Oxide 2 CMOS ONLY
Woollam Ellipsometer
Wyko Profilometer
Xactix
XPS SSX-100
Zeiss SEM Ultra60
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