AET RTP
ALD - Al2O3
ALD - SrTi
Astex ECR
Asys Screen Printer & Vaccum Pump
Beneq ALD
Bioforce Nano eNabler
Bioforce Nano eNabler
Black Magic PECVD
Brunker MicrOTOF
CEE 100 Spinner -- Junior
CEE 100CB Spinner -- Left
CEE 100CB Spinner -- Right
CHA Ebeam 1
CHA Ebeam 2
CMOS Cleaning Station
CMOS Semitool Spin Rinse Dryer
Coyote PECVD
Critical Point Dryer
CVC DC Sputterer
CVC DC Sputterer 2
CVC E-Beam Evaporator
CVC E-Beam Evaporator 2
CVC E-Beam Filament
Dage X-Ray XD7600NT
DCA
Dektak 150
Dektak 3030 Profilometer
Dicing Technologies Dicing Saw
DLTS
Dryer
EBL CEE Spinner
EBL Developer Station
Ernest Fullam SputterCoater
EV620 Mask Aligner
EVS Mask Aligner
FC Spinner Left
FC Spinner Right
FEI Nova Nanolab 200 FIB/SEM
FEI Quanta 200 3D FIB/SEM
Flip Chip Bonder
Focus Center Microscope
FTIR
Gasonics Asher
Gasonics Asher 1
Graphene Furnace
Heraeus Vacuum Oven 1
Heraeus Vacuum Oven 2
Hitachi 3500H SEM
Hummer Sputtering System
Hysitron TriboIndenter
IR Microscope
IR/HMDS Oven
JEOL JBX-9300FS EBL System
Jet Lab II
Karl Suss Bonder
Karl Suss MA-6 Mask Aligner
Karl Suss MJB-3 Mask Aligner -- Left
Karl Suss MJB-3 Mask Aligner -- Right
Karl Suss RC8 Spin Coater
Karl Suss TSA MA6 Mask Aligner
| Kulicke & Sofa Industrial Bonder
Kulicke Bonder 1
Kulicke Bonder 2
Lam Etch 1
Lam Etch 2
Lam Etch 3
Lap Master Lapper
Lap Master Polisher
Laurell Developer
Leitz Ergolux Microscope 2
LEO SEM
LFE Barrel Etcher
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Logitech Polisher
M10 Flexible Bonder
Mask Align 1
Mask Shop
ME Spinner
MEMS Wet Bench
Microfuge 18 Centrifuge
Microscope 1
Microscope 2 - RM164
MPM Screen Printer
Nanospec Refractometer
Noran EDS System
Nova Micromanipulator
OAI: Optical Associates, Inc. Mask Aligner
Obducat Nanoimprint Lithography System
Olympus / C Squared Vanox Microscope
Olympus Video Microscope
Oxford PECVD 1
Oxford RIE 1
Parylene Labcoater
Paxco Dicing Saw
Plas-Mos Ellipsometer
Plasma Cleaner
Plasma-Therm ICP
Plasma-Therm PECVD
Plasma-Therm RIE
Plasma-Therm SLR RIE
Plating Station Au
Plating Station Cu
Plating Station Ti
PVD75 Filament Evaporator
PVD75 RF Sputterer
qNANO
Qsense
Radiation Safety Class
Samco UV Ozone Dry Stripper
Screen Printer
SemiTest SCA-2500 Surface Charge Analyzer
Semitool Spin Rinse Dryer
Sierratherm Compressor & Dryer
Signatone Probe
SIMS
Solitec Developer
Solitec Spin Coater (Right)
Specialty Coating Systems Spin Coater (Left)
| Spin-Rinse
STS AOE
STS ICP
STS PECVD
STS PECVD 2
STS Pegasus
STS SOE
Subfab Microscope 1
Surface Charge Analyzer
Tempress Dicing Saw
Tencor Alpha-Step Profilometer
Tencor KLA Profilometer
Tencor KLA Profilometer - FC
test machine 1
test machine 10
test machine 11
test machine 12
test machine 2
test machine 3
test machine 4
test machine 5
test machine 6
test machine 7
test machine 8
test machine 9
Thermo Raman
Toray Bonder 1
Tousimis Super Critical Dryer
Trion ICP
Trion RIE
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 3
Tystar Nitride Furnace 4
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
Ultratech Plate Cleaner
Unaxis PECVD
Unifilm Sputterer
UV-VIS Spectrophotometer
Vase Ellipsometer
Veeco AFM
Veeco Dektak Profilometer
Verteq Spin Rinse Dryer
Vision RIE - Oxide
Vision RIE - Oxide 2 CMOS ONLY
Woollam Ellipsometer
Wyko Profilometer
Wyko Profilometer RM161
Xactix Xenon Difluoride Etcher
XPS SSX-100
XRF
Zeiss SEM Ultra60
|
