| Current Cleanroom Equipment Usage |
| Equipment | User | Logged in on |
|---|
| AET RTP | *** Machine Down | 2009-11-20 16:29:20 |
| Black Magic PECVD | *** Machine Down | 2009-11-20 09:49:06 |
| CMOS Semitool Spin Rinse Dryer | Stuart Truax | 2009-11-21 14:32:49 |
| Dektak 150 | *** Machine Down | 2009-10-14 18:09:06 |
| EV620 Mask Aligner | *** Machine Down | 2009-10-26 17:39:32 |
| EVS Mask Aligner | *** Machine Down | 2009-11-19 11:46:39 |
| Karl Suss MA-6 Mask Aligner | Wanling Pan | 2009-11-21 14:10:20 |
| Lindberg Furnace 3 (Oxidation Tube) | Stuart Truax | 2009-11-21 14:10:18 |
| Microscope 1 | Roozbeh Tabrizian | 2009-11-21 14:11:32 |
| Nanospec Refractometer | Kianoush Naeli | 2009-11-21 14:40:02 |
| Plasma-Therm ICP | Wanling Pan | 2009-11-21 14:06:17 |
| Plasma-Therm RIE | Stuart Truax | 2009-11-21 14:45:48 |
| PVD75 Filament Evaporator | Chien-I Lin | 2009-11-21 13:18:32 |
| STS ICP | Roozbeh Tabrizian | 2009-11-21 10:19:06 |
| Tencor KLA Profilometer - FC | *** Machine Down | 2009-09-17 15:52:50 |
| Tystar Nitride Furnace 2 | Stuart Truax | 2009-11-20 11:40:40 |
| Tystar Nitride Furnace 3 | Ehsan Shah Hosseini | 2009-11-20 17:28:27 |
| Tystar Nitride Furnace 4 | Kianoush Naeli | 2009-11-20 16:57:15 |
| Tystar Poly Furnace 4 | Mengli Wang | 2009-11-21 10:29:01 |
| Vision RIE - Oxide 2 CMOS ONLY | *** Machine Down | 2009-10-08 11:11:58 |
| XRF | Hang Chen | 2009-11-20 12:21:05 |
