| Current Cleanroom Equipment Usage |
| Equipment | User | Logged in on |
|---|
| Dektak 150 | *** Machine Down | 2009-10-14 18:09:06 |
| EV620 Mask Aligner | *** Machine Down | 2009-10-26 17:39:32 |
| LEO SEM | John Pham | 2009-11-05 15:54:01 |
| Lindberg Furnace 4 (Polymer Curing Tube) | Markondeya Pulugurtha | 2009-11-06 20:52:48 |
| Tencor KLA Profilometer - FC | *** Machine Down | 2009-09-17 15:52:50 |
| Tystar Poly Furnace 3 | Xin Gao | 2009-11-06 13:19:33 |
| Tystar Poly Furnace 4 | *** Machine Down | 2009-10-12 16:19:03 |
| Vision RIE - Oxide 2 CMOS ONLY | *** Machine Down | 2009-10-08 11:11:58 |
| XPS SSX-100 | *** Machine Down | 2009-09-23 14:30:08 |
