| Current Cleanroom Equipment Usage |
| Equipment | User | Logged in on |
|---|
| AET RTP | *** Machine Down | 2009-11-20 16:29:20 |
| Black Magic PECVD | *** Machine Down | 2009-11-20 09:49:06 |
| CVC E-Beam Evaporator | Balakrishnam Jampana | 2009-11-24 00:54:02 |
| CVC E-Beam Evaporator 2 | Jie Liu | 2009-11-24 01:34:09 |
| Dektak 150 | *** Machine Down | 2009-10-14 18:09:06 |
| EV620 Mask Aligner | *** Machine Down | 2009-10-26 17:39:32 |
| EVS Mask Aligner | *** Machine Down | 2009-11-19 11:46:39 |
| FC Spinner Right | Balakrishnam Jampana | 2009-11-24 02:16:19 |
| Hysitron TriboIndenter | Parisa Pour Shahid Saeed Abadi | 2009-11-23 12:22:17 |
| Lindberg Furnace 4 (Polymer Curing Tube) | Markondeya Pulugurtha | 2009-11-23 17:34:36 |
| Microscope 1 | Muhammad Qazi | 2009-11-24 02:00:19 |
| Plasma-Therm ICP | Muhammad Qazi | 2009-11-23 23:51:23 |
| Plasma-Therm PECVD | Jie Liu | 2009-11-24 01:48:07 |
| STS Pegasus | Tran-Vinh Nguyen | 2009-11-23 12:16:29 |
| Tencor KLA Profilometer - FC | *** Machine Down | 2009-09-17 15:52:50 |
| Tystar Nitride Furnace 4 | *** Machine Down | 2009-11-23 10:58:01 |
| Unifilm Sputterer | Harley Hayden | 2009-11-23 21:06:45 |
| Vision RIE - Oxide 2 CMOS ONLY | *** Machine Down | 2009-10-08 11:11:58 |
