Microelectronics Research Center

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Current Cleanroom Equipment Usage
EquipmentUserLogged in on
Dektak 150*** Machine Down2009-10-14 18:09:06
EV620 Mask Aligner*** Machine Down2009-10-26 17:39:32
Karl Suss BonderLuke Beardslee2009-11-07 08:38:45
Karl Suss MA-6 Mask AlignerRoozbeh Tabrizian2009-11-07 10:20:19
LEO SEMJohn Pham2009-11-05 15:54:01
Lindberg Furnace 4 (Polymer Curing Tube)Markondeya Pulugurtha2009-11-06 20:52:48
Microscope 1Roozbeh Tabrizian2009-11-07 08:24:47
STS ICPRoozbeh Tabrizian2009-11-07 10:54:10
Tencor KLA Profilometer - FC*** Machine Down2009-09-17 15:52:50
Tystar Poly Furnace 3Xin Gao2009-11-06 13:19:33
Tystar Poly Furnace 4*** Machine Down2009-10-12 16:19:03
Unaxis PECVDRoozbeh Tabrizian2009-11-07 09:08:52
Vision RIE - OxideRoozbeh Tabrizian2009-11-07 07:47:05
Vision RIE - Oxide 2 CMOS ONLY*** Machine Down2009-10-08 11:11:58
XPS SSX-100*** Machine Down2009-09-23 14:30:08

Users in Cleanroom
UserEnteredDuration H:M:S
Roozbeh Tabrizian2009-11-07 07:30:123:29:18
Luke Beardslee2009-11-07 08:23:392:35:51
Total Users2