Microelectronics Research Center

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Equipment Group:
Equipment: Trainers
AET RTPEmail Trainers
ALD - Al2O3Email Trainers
ALD - SrTiEmail Trainers
Astex ECREmail Trainers
Asys Screen Printer & Vaccum PumpStephen Tyler
st144@mail.gatech.edu
Bioforce Nano eNablerEmail Trainers
Black Magic PECVDBaratunde Cola
-baratunde.cola@me.gatech.edu
Ben Hollerbach
ben.hollerbach@nrc.gatech.edu
Gary Spinner
gary.spinner@mirc.gatech.edu
CEE 100CB SpinnerEmail Trainers
CHA Ebeam 2Charlie Suh
charlie.suh@mirc.gatech.edu
Kevin Bicknell
kbicknell3@gatech.edu
CMOS Cleaning StationEmail Trainers
Coyote PECVDEmail Trainers
CVC DC SputtererEmail Trainers
CVC E-Beam EvaporatorEmail Trainers
CVC E-Beam Evaporator 2Email Trainers
Dage X-Ray XD7600NTEmail Trainers
DCAJohn Pham
johnpham@gatech.edu
David Gottfried
david.gottfried@mirc.gatech.edu
Dexon Fume Hood--Class 10Email Trainers
EV620 Mask AlignerEmail Trainers
FEI Nova Nanolab 200 FIB/SEMEmail Trainers
FEI Quanta 200 3D FIB/SEMEmail Trainers
Flip Chip BonderHang Chen
hc64@mail.gatech.edu
Gasonics AsherEmail Trainers
Heraeus Vacuum Oven 1Nicole Saint-Aubin
nicole.saintaubin@nrc.gatech.edu
Eli Ellis
eellis3@gatech.edu
Jason Herrington
jason.herrington@mirc.gatech.edu
Tran-Vinh Nguyen
tn42@mail.gatech.edu
Phillip Tyler
ptyler4496@gmail.com
Heraeus Vacuum Oven 2Nicole Saint-Aubin
nicole.saintaubin@nrc.gatech.edu
Tran-Vinh Nguyen
tn42@mail.gatech.edu
Phillip Tyler
ptyler4496@gmail.com
Hitachi 3500H SEMEmail Trainers
Hummer Sputtering SystemEmail Trainers
Hysitron TriboIndenterEmail Trainers
IR/HMDS OvenEmail Trainers
JEOL JBX-9300FS EBL SystemEmail Trainers
Jet Lab IIJohn Pham
johnpham@gatech.edu
David Gottfried
david.gottfried@mirc.gatech.edu
Karl Suss BonderEmail Trainers
Karl Suss MA-6 Mask AlignerEmail Trainers
Karl Suss RC8 Spin CoaterEmail Trainers
Karl Suss TSA MA6 Mask AlignerEmail Trainers
Kulick Dicing Saw 7100ADCharlie Suh
charlie.suh@mirc.gatech.edu
Ben Hollerbach
ben.hollerbach@nrc.gatech.edu
Kulicke & Sofa Industrial BonderEmail Trainers
Lap Master LapperEmail Trainers
Lap Master PolisherEmail Trainers
Lindberg FurnaceEmail Trainers
Logitech LP50Pedro Garcia
pgarcia6@mail.gatech.edu
Logitech PM5Pedro Garcia
pgarcia6@mail.gatech.edu
Logitech PolisherEmail Trainers
MEMS Wet BenchEmail Trainers
Nanospec RefractometerEmail Trainers
Noran EDS SystemEmail Trainers
OAI: Optical Associates, Inc. Mask AlignerEmail Trainers
Obducat Nanoimprint Lithography SystemEmail Trainers
Olympus / C Squared Vanox MicroscopeEmail Trainers
Parylene LabcoaterJaime Zahorian
gth772f@mail.gatech.edu
John Pham
johnpham@gatech.edu
Eric Woods
eric.woods@mirc.gatech.edu
Plas-Mos EllipsometerEmail Trainers
Plasma CleanerEmail Trainers
Plasma-Therm ICPEmail Trainers
Plasma-Therm PECVDEmail Trainers
Plasma-Therm RIEEmail Trainers
Plasma-Therm SLR RIEEmail Trainers
PVD75 Filament EvaporatorEmail Trainers
PVD75 RF SputtererEmail Trainers
QsenseJohn Pham
johnpham@gatech.edu
David Gottfried
david.gottfried@mirc.gatech.edu
Samco UV Ozone Dry StripperEmail Trainers
Screen PrinterEmail Trainers
SemiTest SCA-2500 Surface Charge AnalyzerEmail Trainers
Semitool Spin Rinse DryerEmail Trainers
Signatone ProbeEmail Trainers
STS AOEEmail Trainers
STS ICPEmail Trainers
STS PECVDEmail Trainers
STS SOEEmail Trainers
Tencor Alpha-Step ProfilometerEmail Trainers
Tencor KLA ProfilometerEmail Trainers
Tencor KLA Profilometer - FCEmail Trainers
Tousimis Super Critical DryerEmail Trainers
Trion ICPEmail Trainers
Tystar Nitride FurnaceEmail Trainers
Tystar Nitride Furnace 1Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Nitride Furnace 2Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Nitride Furnace 3Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Nitride Furnace 4Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Poly Furnace 1Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Poly Furnace 2Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Poly Furnace 3Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Poly Furnace 4Eric Woods
eric.woods@mirc.gatech.edu
Pedro Garcia
pgarcia6@mail.gatech.edu
Tystar Polysilicon FurnaceEmail Trainers
Ultratech Plate CleanerEmail Trainers
Unaxis PECVDEmail Trainers
Unifilm SputtererEmail Trainers
Veeco AFMEmail Trainers
Verteq Spin Rinse DryerEmail Trainers
Vision RIE - OxideEmail Trainers
Vision RIE - Oxide 2 CMOS ONLYEmail Trainers
Woollam EllipsometerEmail Trainers
Wyko ProfilometerEmail Trainers
Wyko Profilometer RM161Nicholas Ginga
nick.ginga@gatech.edu
Janet Cobb-Sullivan
janet.cobb-sullivan@gtri.gatech.edu
John Pham
johnpham@gatech.edu
Xactix Xenon Difluoride EtcherEmail Trainers
XPS SSX-100Email Trainers
XRFEmail Trainers
Zeiss SEM Ultra60Email Trainers