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| Maskshop Frequently Asked Questions (FAQ) |
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| 1.Which kind of masks can maskshop provide? Maskshop can provide clear field and dark field masks. There are two kinds of mask plates: 5 X 5 inches and 4 X 4 inches. |
| 2.Where can I find the specification of the masks? The specification of the masks can be found through the following link. Mask Guidelines |
| 3.What is the procedure of the mask request? 1) Design your pattern through AutoCAD, ADS or Cadence. 2) Convert your design to .DWM file through the conversion software in our computer room (Room 230A at MiRC first floor). 3) Fill the online mask request form and print it out. 4) Upload the converted .DWM file in the file upload field of the mask request form 5) Submit the print out of your design, mask request form and Inter Departmental Sales and Service Authorization Form (all signed by your PI) |
| 4. How long can I get my masks? If your converted .DWM files are good, the average time is 10 days or less after we receive all of your paper work. |
| 5. How about the price of mask fabrication? The price information can be found through the following link. Pricing Information |
| 6. How can I get the access of the computer of Room 230A? Please contact with Mr. Kimsey T. Pollard through 404-894-4207 or email: kimsey.pollar@mirc.gatech.edu. His office is at Room 202. |
| 7. Where can I find the instruction of the conversion software?The instructions of the conversion software can be found in the following page. Please follow the instruction carefully. http://grover.mirc.gatech.edu/userServices/maskGuidelines.php If you want maskshop to help you to convert it, the consultant service will be charged on the rate of $52/per hour. |
| 9. How can I pick up my masks? You will receive an email after your masks are fabricated. Please pick your mask within FIVE working days and sign the pick-up sheet at the same time. |
| 10. What is the re-fabrication policy? Please check your masks carefully after you pick them up. If there are any problems, you should email us within TEN working days and report the problem. Maskshop would like to re-fabricate the mask for you ONLY for the fabrication problems. If it is the problem of the design or your conversion, please submit a new mask request and paperwork for it. It will be charged as a new mask. PLEASE CHECK YOUR CONVERTED .DWM FILE CAREFULLY BEFORE YOU SUBMIT IT. |
| 11. Why I get so many errors and warnings during the conversion? The most common problems might be: 1) Open figures 2) Minimum feature size less than 3um It is the users responsibility to submit a .dwm without any warnings and errors during the conversion. Otherwise, these warning or errors will cause the problems during the mask fabrication. |
| 12. It is my first time to use AutoCAD. Where can I find the software and how to use it? The software is available at Room 230A MiRC. Please use google to search the tutorial of AutoCAD to help you. |